PCT/2002/1 : PCT Gazette, Weekly Issue No. 1, 2002 - WIPO

01/2002
3 Jan/jan 2002 PCT Gazette - Section I - Gazette du PCT 317
New Milford, CT 06776 (US). KEOGH,
David, M. [US/US]; 3544 Villanova Avenue,
San Diego, CA 92122 (US). XU,
Xueping [US/US]; 15 Central Street, Stamford,
CT 06906 (US). LANDINI, Barbara,
E. [US/US]; 33 Whip-o-Will Lane, Milford,
MA 01757 (US).
(74) ZITZMANN, Oliver, A., M.; Advanced
Technology Materials, Inc., 7 Commerce
Drive, Danbury, CT 06810 (US).
(81) AL AM AT AU AZ BA BB BG BR BY CA
CH CN CU CZ DE DK EE ES FI GB GE GH
HU IL IS JP KE KG KP KR KZ LC LK LR
LS LT LU LV MD MG MK MN MW MX NO
NZ PL PT RO RU SD SE SG SI SK SL TJ TM
TR TT UA UG US UZ VN YU ZW.
(84) AP (GH GM KE LS MW MZ SD SL SZ TZ
UG ZW); EA (AM AZ BY KG KZ MD RU
TJ TM); EP (AT BE CH CY DE DK ES FI
FR GB GR IE IT LU MC NL PT SE TR); OA
(BF BJ CF CG CI CM GA GN GW ML MR
NE SN TD TG).
(51) 7 H01L
(11) WO 02/01609 (13) A2
(21) PCT/US01/41160
(22) 26 Jun/juin 2001 (26.06.2001)
(25) en (26) en
(30) 60/214,116 26 Jun/juin 2000 US
(26.06.2000)
(30) 09/891,730 25 Jun/juin 2001 US
(25.06.2001)
(43) 3 Jan/jan 2002 (03.01.2002)
(54) CLEANING METHOD AND SOLU-
TION FOR CLEANING A WAFER IN A
SINGLE WAFER PROCESS
PROCEDE DE NETTOYAGE ET SO-
LUTION DE NETTOYAGE DE PLA-
QUETTE EN PROCESSUS DE NET-
TOYAGE DE PLAQUETTE UNIQUE
(71) APPLIED MATERIALS, INC. [US/US];
P.O. Box 450A, Santa Clara, CA 95052 (US).
(72) VERHAVERBEKE, Steven; 139 Welsh
Street, #10, San Francisco, CA 94107 (US).
TRUMAN, J., Kelly; 2200 Bayo Claros
Circle, Morgan Hill, CA 95037 (US).
(74) BERNADICOU, Michael, A. et al. / etc.;
Blakely, Sokoloff, Taylor & Zafman LLP, 7th
Floor, 12400 Wilshire Boulevard, Los Angeles,
CA 90025 (US).
(81) CN JP KR.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
(51) 7 H01L 21/00
(11) WO 02/01610
(21) PCT/US01/18727
(13) A2
(22) 8 Jun/juin 2001 (08.06.2001)
(25) en (26) en
(30) 09/603,791 26 Jun/juin 2000
(26.06.2000)
US
(43) 3 Jan/jan 2002 (03.01.2002)
(54) APPARATUS AND METHOD FOR
ELECTRO CHEMICAL DEPOSITION
APPAREIL ET PROCEDE DE DEPOT
ELECTROCHIMIQUE
(71) APPLIED MATERIALS, INC. [US/US];
P.O. Box 450A, Santa Clara, CA 95052 (US).
(72) STEVENS, Joseph, J.; 5653 Enning Avenue,
San Jose, CA 95123 (US). RABI-
NOVICH, Yevgeniy; 41952 Corte Santa
Barbara, Fremont, CA 95639 (US). CHAO,
Sandy, S.; 1429 Main Entrance Drive, San
Jose, CA 95131 (US). DENOME, Mark, R.;
418 Galleria Drive #8, San Jose, CA 95134
(US). D’AMBRA, Allen, L.; 32 Bayview
Court, Millbrae, CA 94030 (US). OLGADO,
Donald, J.; 831 Melville Avenue, Palo Alto,
CA 94307 (US).
(74) BERNADICOU, Michael, A. et al. / etc.;
Blakely, Sokoloff, Taylor & Zafman LLP,
12400 Wilshire Boulevard, 7th Floor, Los
Angeles, CA 90025 (US).
(81) JP.
(51) 7 H01L 21/00
(11) WO 02/01611 (13) A2
(21) PCT/US01/19292
(22) 15 Jun/juin 2001 (15.06.2001)
(25) en (26) en
(30) 09/602,002 23 Jun/juin 2000 US
(23.06.2000)
(43) 3 Jan/jan 2002 (03.01.2002)
(54) APPARATUS FOR SUPPORTING A
SUBSTRATE AND METHOD OF FAB-
RICATING SAME
APPAREIL PERMETTANT DE SUP-
PORTER UN SUBSTRAT ET PROCEDE
DE FABRICATION
(71) APPLIED MATERIALS, INC. [US/US];
P.O. Box 450A, Santa Clara, CA 95052 (US).
(72) BROWN, Karl; 445 Milan Drive #222, San
Jose, CA 95134 (US). SANSONI, Steven;
25761 Silver Canyon Court, Castro Valley,
CA 94552 (US). CROCKER, Steven, C.;
811 Kingfisher, Sunnyvale, CA 94087 (US).
(74) BERNADICOU, Michael, A. et al. / etc.;
Blakely, Sokoloff, Taylor & Zafman LLP,
12400 Wilshire Boulevard, 7th Floor, Los
Angeles, CA 90025 (US).
(81) CN JP KR SG.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
(51) 7 H01L 21/00
(11) WO 02/01612
(21) PCT/US01/20100
(13) A2
(22) 22 Jun/juin 2001 (22.06.2001)
(25) en (26) en
(30) 60/214,417 28 Jun/juin 2000
(28.06.2000)
US
(30) 09/764,133 19 Jan/jan 2001
(19.01.2001)
US
(43) 3 Jan/jan 2002 (03.01.2002)
(54) MECHANICAL CLAMPER FOR
HEATED SUBSTRATES AT DIE AT-
TACH
DISPOSITIF DE CALAGE MECA-
NIQUE POUR SUBSTRATS CHAUFFES
PENDANT LA FIXATION DES MICRO-
CIRCUITS
(71) ADVANCED MICRO DEVICES, INC.
[US/US]; One AMD Place, Mail Stop 68,
Sunnyvale, CA 94088-3453 (US).
(72) FOONG, Sally, Y., L.; 1884 Yosemite Drive,
Milpitas, CA 95035 (US). HO, Kok, Khoon;
70, Medan Mayangpasir, Bayan Baru, 11950
Penang (MY).
(74) RODDY, Richard, J.; Advanced Micro Devices,
Inc., One AMD Place, Mail Stop 68,
Sunnyvale, CA 94088-3453 (US).
(81) AE AG AL AM AT AU AZ BA BB BG BR
BY BZ CA CH CN CO CR CU CZ DE DK
DM DZ EE ES FI GB GD GE GH GM HR
HU ID IL IN IS JP KE KG KP KR KZ LC
LK LR LS LT LU LV MA MD MG MK MN
MW MX MZ NO NZ PL PT RO RU SD SE
SG SI SK SL TJ TM TR TT TZ UA UG UZ
VN YU ZA ZW.
(84) AP (GH GM KE LS MW MZ SD SL SZ TZ
UG ZW); EA (AM AZ BY KG KZ MD RU
TJ TM); EP (AT BE CH CY DE DK ES FI
FR GB GR IE IT LU MC NL PT SE TR); OA
(BF BJ CF CG CI CM GA GN GW ML MR
NE SN TD TG).
(51) 7 H01L 21/00
(11) WO 02/01613 (13) A2
(21) PCT/US01/20466
(22) 26 Jun/juin 2001 (26.06.2001)
(25) en (26) en
(30) 09/603,792 26 Jun/juin 2000 US
(26.06.2000)
(30) 09/891,849 25 Jun/juin 2001 US
(25.06.2001)
(43) 3 Jan/jan 2002 (03.01.2002)
(54) METHOD AND APPARATUS FOR
WAFER CLEANING
PROCEDE ET APPAREIL POUR NET-
TOYER DES TRANCHES DE SILICIUM
(71) APPLIED MATERIALS, INC. [US/US];
P.O. Box 450A, Santa Clara, CA 95052 (US).
(72) VERHAVERBEKE, Steven; Unit #10, 139
Welsh Street, San Francisco, CA 94107 (US).
TRUMAN, J., Kelly; 2200 Bayo Claros
Circle, Morgan Hill, CA 95037 (US). KO,
Alexander; Apartment 193, 1275 Vicente
Drive, Sunnyvale, CA 94086 (US). ENDO,
Rick, R.; 960 Sunset Drive, San Carlos, CA
94070 (US).
(74) BERNADICOU, Michael, A. et al. / etc.;
Blakely, Sokoloff, Taylor & Zafman LLP, 7th
floor, 12400 Wilshire Boulevard, Los Angeles,
CA 90025 (US).
(81) AE AG AL AM AT AT (Utility model /
modèle d’utilité) AUAZBABBBGBRBY
BZ CA CH CN CO CR CU CZ DE DK DM
DZ EE ES FI GB GD GE GH GM HR HU ID
IL IN IS JP KE KG KP KR KZ LC LK LR
LS LT LU LV MA MD MG MK MN MW
MX MZ NO NZ PL PT RO RU SD SE SG
SI SK SL TJ TM TR TT TZ UA UG UZ VN
YU ZA ZW.
(84) AP (GH GM KE LS MW MZ SD SL SZ TZ
UG ZW); EA (AM AZ BY KG KZ MD RU
TJ TM); EP (AT BE CH CY DE DK ES FI
FR GB GR IE IT LU MC NL PT SE TR); OA
(BF BJ CF CG CI CM GA GN GW ML MR
NE SN TD TG).
(51) 7 H01L 21/00, B01F 3/08, 15/04
(11) WO 02/01614 (13) A2
(21) PCT/US01/20469
(22) 26 Jun/juin 2001 (26.06.2001)
(25) en (26) en