PCT/2002/1 : PCT Gazette, Weekly Issue No. 1, 2002 - WIPO

01/2002
3 Jan/jan 2002 PCT Gazette - Section I - Gazette du PCT 319
[JP/JP]; 7-1, Shiba 5-chome, Minato-ku,
Tokyo 108-8001 (JP).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) MORI, Takuya [JP/JP]; c/o Tokyo Electron
AT Limited, 2381-1, Kitagejo, Fujii-cho,
Nirasaki-City, Yamanashi 407-8511 (JP). IN-
AZAWA, Koichiro [JP/JP]; c/o Tokyo Electron
AT Limited, 2381-1, Kitagejo, Fujii-cho,
Nirasaki-City, Yamanashi 407-8511 (JP).
KOBAYASHI, Noriyuki [JP/JP]; c/o Tokyo
Electron AT Limited, 2381-1, Kitagejo, Fujii-cho,
Nirasaki-City, Yamanashi 407-8511
(JP). SUGIURA, Masahito [JP/JP]; c/o
Tokyo Electron Limited Technology Development
Center, 650, Mitsuzawa, Hosaka-cho,
Nirasaki-City, Yamanashi 407-0174 (JP).
HAYASHI, Yoshihiro [JP/JP]; c/o NEC
Corporation, 7-1, Shiba 5-chome, Minato-ku,
Tokyo 108-8001 (JP). KINOSHITA, Keizo
[JP/JP]; c/o NEC Corporation, 7-1, Shiba
5-chome, Minato-ku, Tokyo 108-8001 (JP).
(74) KAMEYA, Yoshiaki et al. / etc.; Shinjuku
Akebonobashi Building, 1-12, Sumiyoshicho,
Shinjuku-ku, Tokyo 162-0065 (JP).
(81) KR US.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
(51) 7 H01L 21/3105
(11) WO 02/01620
(21) PCT/US01/20623
(13) A2
(22) 28 Jun/juin 2001 (28.06.2001)
(25) en (26) en
(30) 60/214,409 28 Jun/juin 2000
(28.06.2000)
US
(30) 09/723,802 28 Jun/juin 2000
(28.06.2000)
US
(43) 3 Jan/jan 2002 (03.01.2002)
(54) TWO STEP CHEMICAL MECHANI-
CAL POLISHING PROCESS
PROCEDE DE POLISSAGE CHIMICO-
MECANIQUE EN DEUX ETAPES
(71) INFINEON TECHNOLOGIES NORTH
AMERICA CORP. [US/US]; 1730 North
First Street, San Jose, CA 95112-4508 (US).
INFINEON TECHNOLOGIES RICH-
MOND, LP [US/US]; 6000 Technology
Blvd., Sandston, VA 23150 (US).
(72) PAGE, Joseph; 6052 Havenview Drive, Mechanicsville,
VA 23111 (US).
(74) BRADEN, Stanton, C. et al. / etc.; Siemens
Corporation, Intellectual Property Dept., 186
Wood Ave. South, Iselin, NJ 08830 (US).
(81) JP KR.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE).
(51) 7 H01L 21/316
(11) WO 02/01621 (13) A2
(21) PCT/US01/19466
(22) 19 Jun/juin 2001 (19.06.2001)
(25) en (26) en
(30) 60/214,219 23 Jun/juin 2000
(23.06.2000)
(43) 3 Jan/jan 2002 (03.01.2002)
US
(54) METHOD TO RESTORE HYDROPHO-
BICITY IN DIELECTRIC FILMS AND
MATERIALS
PROCEDE PERMETTANT DE CONFE-
RER DES PROPRIETES HYDRO-
PHOBES A DES FILMS DIELEC-
TRIQUES ET A DES MATERIAUX
ENDOMMAGES
(71) HONEYWELL INTERNATIONAL, INC.
[US/US]; Patent Dept., 101 Columbia Road,
Morristown, NJ 07962 (US).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) HACKER, Nigel, P. [GB/US]; 991 Lincoln
Avenue, Palo Alto, CA 94301 (US).
THOMAS, Michael [US/US]; 2258 Devon
Place, Milpitas, CA 92025 (US). DRAGE,
James, S. [US/US]; 34906 Seal Rock Terrace,
Fremont, CA 94555 (US).
(74) ROBERTS, Richard, S.; Roberts & Mercanti,
LLP, P.O. Box 484, Princeton, NJ
08542-0484 (US).
(81) AE AG AL AM AT AU AZ BA BB BG BR
BY BZ CA CH CN CO CR CU CZ DE DK
DM DZ EE ES FI GB GD GE GH GM HR
HU ID IL IN IS JP KE KG KP KR KZ LC
LK LR LS LT LU LV MA MD MG MK MN
MW MX MZ NO NZ PL PT RO RU SD SE
SG SI SK SL TJ TM TR TT TZ UA UG US
UZ VN YU ZA ZW.
(84) AP (GH GM KE LS MW MZ SD SL SZ TZ
UG ZW); EA (AM AZ BY KG KZ MD RU
TJ TM); EP (AT BE CH CY DE DK ES FI
FR GB GR IE IT LU MC NL PT SE TR); OA
(BF BJ CF CG CI CM GA GN GW ML MR
NE SN TD TG).
(51) 7 H01L 21/316
(11) WO 02/01622
(21) PCT/US01/19787
(13) A2
(22) 21 Jun/juin 2001 (21.06.2001)
(25) en (26) en
(30) 60/214,285 26 Jun/juin 2000
(26.06.2000)
US
(43) 3 Jan/jan 2002 (03.01.2002)
(54) NOVEL NON-CRYSTALLINE OXIDES
FOR USE IN MICROELECTRONIC, OP-
TICAL, AND OTHER APPLICATIONS
NOUVEAUX OXYDES NON CRISTAL-
LINS UTILISES DANS DES APPLICA-
TIONS OPTIQUES, MICRO-ELECTRO-
NIQUES, ET AUTRES
(71) NORTH CAROLINA STATE UNIVER-
SITY [US/US]; Campus Box 7003, 1 Holladay
Hall, Raleigh, NC 27695-7003 (US).
(72) LUCOVSKY, Gerald; 124 Lochwood West
Drive, Cary, NC 27511-9744 (US). PAR-
SONS, Gregory, N.; 2330 Hathaway Road,
Raleigh, NC 27608 (US).
(74) MYERS BIGEL SIBLEY & SAJOVEC;
P.O. Box 37428, Raleigh, NC 27627 (US).
(81) JP.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
(51) 7 H01L 21/331, 29/732
(11) WO 02/01623 (13) A1
(21) PCT/SE01/01385
(22) 19 Jun/juin 2001 (19.06.2001)
(25) en (26) en
(30) 0002389-5 26 Jun/juin 2000 SE
(26.06.2000)
(43) 3 Jan/jan 2002 (03.01.2002)
(54) HIGH FREQUENCY TRANSISTOR DE-
VICE WITH ANTIMONY IMPLANTA-
TION AND FABRICATION METHOD
THEREOF
DISPOSITIF TRANSISTOR HAUTE
FREQUENCE AYANT UNE IMPLAN-
TATION D’ANTIMOINE ET SON PRO-
CEDE DE PRODUCTION
(71) TELEFONAKTIEBOLAGET LM ERIC-
SSON [SE/SE]; S-126 25 Stockholm (SE).
(72) NORSTRÖM, Hans; Mårdstigen 3, S-170
71 Solna (SE). ARNBORG, Torkel; Cardellgatan
5, S-114 36 Stockholm (SE). JOHANS-
SON, Ted; Sveavägen 66, S-182 62 Djursholm
(SE).
(74) FRITZON, Rolf et al. / etc.; Kransell &
Wennborg AB, Box 27834, S-115 93 Stockholm
(SE).
(81) AE AG AL AM AT AT (Utility model /
modèle d’utilité) AUAZBABBBGBRBY
BZ CA CH CN CO CR CU CZ CZ (Utility
model / modèle d’utilité) DE DE (Utility
model / modèle d’utilité) DK DK (Utility
model / modèle d’utilité) DMDZECEEEE
(Utility model / modèle d’utilité) ESFIFI
(Utility model / modèle d’utilité)GBGDGE
GH GM HR HU ID IL IN IS JP KE KG KP
KR KZ LC LK LR LS LT LU LV MA MD
MG MK MN MW MX MZ NO NZ PL PT
RO RU SD SE SG SI SK SK (Utility model
/ modèle d’utilité) SLTJTMTRTTTZUA
UG UZ VN YU ZA ZW.
(84) AP (GH GM KE LS MW MZ SD SL SZ TZ
UG ZW); EA (AM AZ BY KG KZ MD RU
TJ TM); EP (AT BE CH CY DE DK ES FI
FR GB GR IE IT LU MC NL PT SE TR); OA
(BF BJ CF CG CI CM GA GN GW ML MR
NE SN TD TG).
(51) 7 H01L 21/331
(11) WO 02/01624
(21) PCT/US01/16689
(13) A1
(22) 23 May/mai 2001 (23.05.2001)
(25) en (26) en
(30) 09/605,037 27 Jun/juin 2000
(27.06.2000)
US
(43) 3 Jan/jan 2002 (03.01.2002)
(54) SEMICONDUCTOR COMPONENT
AND METHOD OF MANUFACTUR-
ING
COMPOSANT A SEMI-CONDUCTEUR
ET PROCEDE DE FABRICATION
(71) MOTOROLA, INC. [US/US]; 1303 East
Algonquin Road, Schaumburg, IL 60196
(US).
(72) LU, Shifeng,; 1460 West Bridge Street,
Phoenix, AZ 85045 (US). BORUCKI,
Leonard, J.; 3831 East Ivy Street, Mesa,
AZ 85205 (US). HILDRETH, Jill, C.;
2830 South Tumbleweed Lane, Chandler,
AZ 85248 (US). MORTON, Andrew, S.;
1431 East Lynx Way, Chandler, AZ 85249
(US). JOHN, Jay, P.; 11112 West Wildhorse
Drive, Chandler, AZ 85248 (US). THOMAS,