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Thixoforming : Semi-solid Metal Processing

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280j 8 Tool Technologies for Forming of <strong>Semi</strong>-<strong>solid</strong> <strong>Metal</strong>s<br />

Figure 8.37 Friction coefficient measured during hightemperature<br />

tribological tests of the deposited alumina films [56].<br />

evaluation of the coatings after the treatment by cross-sectional SEM and EDS<br />

analysis was aimed at identifying possible adhesive or cohesive failure and also signs<br />

of possible interdiffusion taking place through cracks or other defects in the films.<br />

The alumina films show very good resistance to thermal shock; as can be seen in<br />

Figure 8.38, no crack formation or erosion of the films was observed. Moreover, after<br />

contact with steel, the film surface was smooth without indication of damage or<br />

delamination. Possible diffusion of the counterpart material into the substrate was<br />

not observed based on EDS experiments.<br />

The results of these performance-related tests confirmed the applicability of the<br />

alumina films for die protection during semi-<strong>solid</strong> processing of steel.<br />

8.5.3<br />

Conclusions<br />

Alumina thin films were deposited on tempered hot working steel by PECVD in an<br />

AlCl3–O2–H2–Ar mixture. The constitution and mechanical properties of the films<br />

were found to be strongly dependent on the deposition conditions such as substrate<br />

temperature, gas mixture and peak voltage. It has been shown that a-alumina films can<br />

be grown at substrate temperatures as low as 560 C. Finally, the constitution,<br />

morphology, impurity incorporation and elastic properties of the alumina thin films<br />

were found to depend on the normalized ion flux. The changes in structure and<br />

properties may be understood by considering surface and bulk diffusion-related<br />

mechanisms. The formation of porous structures is observed. The formation of the<br />

porosity may be understood by considering vacancy generation, migration and subsequent<br />

clustering and/or the incorporation of Cl during growth, migration and bubble<br />

formation. The elastic properties of the films were strongly affected by the formation of<br />

the pores in the structure and were intimately linked to the normalized ion flux.

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