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Introduction to Acoustics

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Microphones and Their Calibration 24.8 Overall View on Microphone Calibration 1043<br />

24.7 Frequency Response Measurement with Electrostatic Actua<strong>to</strong>rs<br />

Electrostatic actua<strong>to</strong>rs were used by Ballantine [24.2]<strong>to</strong><br />

investigate microphone calibration and Koidan [24.59]<br />

gave a comprehensive discussion of the uncertainties<br />

between measurements obtained with electrostatic<br />

actua<strong>to</strong>rs compared with those measured with the<br />

coupler pressure reciprocity method. The description<br />

and analyses of some commercially available electrostatic<br />

actua<strong>to</strong>rs for microphone calibration have<br />

been published [24.60–62] and standardized [24.63]<br />

for frequency response measurement for working<br />

standard (WS) microphones. The electrostatic actua<strong>to</strong>r<br />

method, Fig. 24.16, consists of a metal grid<br />

polarized with a high voltage direct-current (DC)<br />

supply (usually 800 V). An AC time-varying sweep<br />

signal provides the electrostatic pressure on the microphone<br />

diaphragm. With the usual amplification<br />

and a recorder, the frequency response is displayed<br />

graphically.<br />

Madella [24.64] andNedzelnitsky [24.65] pointed<br />

out that with electrostatic actua<strong>to</strong>r measurements the effective<br />

mechanical radiation impedance loading of the<br />

microphone diaphragm in the presence of the electrostatic<br />

actua<strong>to</strong>r is different from that of those used in<br />

a coupler or in a free field. Consequently, at higher frequencies<br />

the absolute values of the difference between<br />

the actua<strong>to</strong>r-determined response of type L microphones<br />

and pressure calibrations determined in couplers by<br />

reciprocity can be as large as about 1.5 dB [24.65].<br />

In practice, the design of the metal grid can be optimized<br />

for a particular microphone type. According <strong>to</strong><br />

the IEC standard [24.63], the expanded uncertainty of<br />

the method is 0.1–0.2 dB for frequencies up <strong>to</strong> 10 kHz<br />

for WS1 (1-inch) and WS2 (half-inch) type microphones.<br />

Since the air gap between the metal grid and<br />

the microphone diaphragm is very small (nominally approximately<br />

0.5 mm) the use of electrostatic actua<strong>to</strong>rs<br />

for models of microphones other than those specified is<br />

not recommended. Since the motion of the microphone<br />

diaphragm, caused by electrostatic pressure produce by<br />

the actua<strong>to</strong>r, creates a sound pressure on the outer surface<br />

DC-voltage supply<br />

AC-voltage supply<br />

24.8 Overall View on Microphone Calibration<br />

Primary microphone calibrations, such as those performed<br />

with the reciprocity method, provide uncertainty<br />

estimations. One may wonder what is the contribution<br />

<strong>to</strong> the calibration uncertainty from two major sources:<br />

10 MΩ<br />

5000pF<br />

Actua<strong>to</strong>r<br />

Microphone<br />

Preamplifier<br />

Measurement<br />

amplifier<br />

Recorder<br />

Fig. 24.16 Frequency response measurement with an electrostatic<br />

actua<strong>to</strong>r (after Frederiksen [24.29], Chap. 15)<br />

of the diaphragm that adds <strong>to</strong> the electrostatic pressure<br />

and influences the measure response, precautions should<br />

be taken <strong>to</strong> avoid blocking the actua<strong>to</strong>r space that opens<br />

<strong>to</strong> the atmosphere.<br />

Apart from being economically attractive, there<br />

are some salient features <strong>to</strong> the electrostatic actua<strong>to</strong>r<br />

method.<br />

1. The method is ideal for comparing the frequency<br />

responses of microphones, such as those in a production<br />

line, at which only changes from a nominal<br />

value is important.<br />

2. Since the actua<strong>to</strong>r method is unaffected by atmospheric<br />

pressure, humidity and temperature<br />

(assuming the air gap remains constant) [24.63], the<br />

method may be used <strong>to</strong> measure the change in microphone<br />

responses with respect <strong>to</strong> variations in the<br />

environment.<br />

Given the fact that the international standard [24.63]<br />

only discusses type WS1 and WS2 working standard<br />

microphones and not the labora<strong>to</strong>ry types LS1 and LS2<br />

microphones, it is obvious that the electrostatic actua<strong>to</strong>r<br />

method still requires further development <strong>to</strong> reduce<br />

uncertainties.<br />

(a) the stability of the microphones and (b) the stability<br />

of the calibration system that performed the microphone<br />

calibration. It is very difficult <strong>to</strong> separate these two<br />

sources of uncertainties.<br />

Part H 24.8

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