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handbook of modern sensors

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11.7 Breeze Sensor 375<br />

(A)<br />

(B)<br />

Fig. 11.15. Piezoelectric breeze sensor. (A) a circuit diagram; (B) a packaging in a TO-5 can.<br />

Fig. 11.16. In a breeze sensor, gas movement strips <strong>of</strong>f electric charges from the surface <strong>of</strong> a<br />

piezoelectric element.<br />

temperature. The elements are connected in a series-opposed circuit; that is, whenever<br />

both <strong>of</strong> them generate the same electric charge, the resulting voltage across the bias<br />

resistor R b (Fig. 11.15A) is essentially zero. Both elements, the bias resistor and the<br />

JFET voltage follower, are encapsulated into a TO-5 metal housing with vents for<br />

exposing the S 1 element to the gas movement (Fig. 11.15B).<br />

The operating principle <strong>of</strong> the sensor is illustrated in Fig. 11.16. When airflow<br />

is either absent or is very steady, the charge across the piezoelectric element is balanced.<br />

Element internal electric dipoles, which are oriented during the poling process<br />

(Section 3.6 <strong>of</strong> Chapter 3), are balanced by both the free carriers inside the material<br />

and the charged floating air molecules at the element’s surface. As a result, voltage<br />

across the piezoelectric elements S 1 and S 2 is zero, which results in baseline output<br />

voltage V out . When the gas flow across both S 1 surfaces changes (S 2 surfaces are protected<br />

by resin), moving gas molecules strip <strong>of</strong>f the floating charges from the element.<br />

This results in the appearance <strong>of</strong> voltage across the element’s electrodes, because the<br />

internally poled dipoles are no longer balanced by the outside floating charges. The<br />

voltage is repeated by the JFET follower, which serves as an impedance converter,<br />

and appears as a transient in the output terminal.

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