handbook of modern sensors

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Index 583 H 2 O, 108 Hall, 82 Hall coefficient, 83 Hall effect, 82, 267, 346, 534 Hall effect sensor, 85, 268 harmonic, 230, 334 heat, 457 heat absorption, 475 heat capacity, 98 heat loss, 364 heat pump, 402 heat sink, 81, 309 heat transfer, 99 heated probe, 520 heat-flow detector, 77 Henry, 56, 370 Hooke, 95 hot junction, 89 Howland, 167 humidity, 29, 35, 75, 393, 526 humidity sensor, 49, 401 hybrid, 159 hydrocarbon fuel, 512 hydrocarbon sensor, 500 hydrogel, 505 hydrophone, 381 hygristors, 66 hygrometer, 402 hygrometric sensor, 399 hysteresis, 20, 253, 332 identification, 499 illumination, 130 image, 242 immobilization, 519 inclination detectors, 256 index of refraction, 125, 141 inductance, 57 inertia, 26, 115 inertial mass, 308, 311 infrared, 105, 238, 434, 492, 514 infrared detectors, 425 infrared flux, 3 infrared sensor, 543 infrasonic, 388 inherent noise, 204 input, 151 input impedance, 151, 152, 158 input resistance, 154 input stage, 152 instrumentation amplifier, 159 insulation, 486 integrator, 179 intensity sensor, 143 interface circuit, 152 interferometer, 280, 383 intrusion, 173 intrusive sensors, 294 ion, 448 ionization, 447 ionizing chamber, 448 ionizing radiation, 29, 164, 450 IR, 128 IR detector, 107 IR spectrometers, 520 iridium, 542 ISA, 481 ITS-90, 463 JFET, 154, 219, 375, 388, 431, 432 Johnson noise, 205, 206 Joule, 89, 355, 364 Joule heat, 479 junction, 427, 482 junction capacitance, 411 Kawai, 72 Kelvin, 7, 96, 248, 490, 496 keyboard, 324 kinetic energy, 60, 104 Kirchhoff, 61, 105, 145, 458 Kirchhoff’s laws, 61, 118 KOH etch, 550 Korotkoff sounds, 385 krypton, 451 KTY, 464 Laplace transforms, 303 laser, 112, 384 laser gyro, 318 law of reflection, 125 LC, 171 LCD, 113 lead, 541 leakage current, 154, 414 least squares, 22 LeChatelier, 89 LED, 37, 195, 239, 258, 280, 283, 494, 515
584 Index lens, 240, 242, 249, 277, 420 Leslie, 393 level detectors, 278, 291 life test, 32 LIGA, 547 light, 111, 123, 136, 146, 243, 276, 411, 445, 494, 511 linearity, 21 liquid, 278, 296, 363 lithium, 66, 147, 222, 453 load cells, 324 logarithmic scale, 15 logic circuits, 171 long-term stability, 29 loudspeaker, 3 lumen, 130 luminescence, 441 LVDT, 263, 302, 325 magnesium, 541 magnet, 55, 268, 274 magnetic field, 50, 53, 82, 103, 215, 268, 314, 317, 371, 447 magnetic flux, 267, 351 magnetic noise, 216 magnetic pole, 50 magnetic reluctance sensor, 275 magnetic sensor, 262, 540 magnetic shielding, 216, 540 magnetism, 50 magnetite, 50 magnetization, 52 magnetoresistive sensor, 271 magnetostrictive detector, 274 manganese, 63 mass, 305, 324, 359, 378, 516 mass spectrometers, 520 material characteristic, 468 matrix, 487 Maxwell, 371 MCT, 423 measurand, 2 membrane, 427, 525 MEMFET, 505 MEMS, 269, 427, 430, 439, 534, 547 MEMSIC, 310 MEOMS, 547 mercury switch, 257 metal, 223, 272, 408, 504, 540 metal carbides, 542 metal films, 145, 549 metal oxide, 69, 473, 503 metallic electrode, 452 metallization, 473 Michelson, 383 microbalance method, 525 microbalance sensors, 516 microcalorimetry, 513 microcontroller, 185 microgravimetric technique, 517 micromachining, 547, 549 microphone, 381 microsensor, 510 microwave, 288, 477 microwave devices, 434 mid-infrared, 111, 425, 426 military standard, 32 MIR, 289 mirror, 134, 242 modulation, 171, 290 moisture, 66, 393, 396 molybdenum, 542 monolithic sensors, 491 MOS, 188 motion detector, 136, 227, 237 MTBF, 31 multiplexing, 183 multiplicative noise, 209 multivibrator, 178 mutual inductance, 58 natural frequency, 27, 344 near-infrared, 111, 420 Nernst equation, 507, 511 neural network, 527 neuron, 528 Newton, 95, 115, 126 Newton’s law, 313 nichrome, 326, 430, 487 nickel, 63, 224, 541 noise, 178, 204, 219, 238, 275, 312, 351, 417, 423, 522 nonlinearity, 20, 21 NTC, 465, 503 nuclear radiation, 443 n-wells, 85 nylon, 539 Nyquist, 371
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HANDBOOK OF MODERN SENSORS PHYSICS,
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HANDBOOK OF MODERN SENSORS PHYSICS,
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To the memory of my father
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Preface Seven years have passed sin
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Contents Preface ..................
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Contents XI 4.5 Lenses ............
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Contents XIII 7.7.1 Micropower Impu
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Contents XV 15 Radiation Detectors
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Contents XVII Table A.9 Physical Pr
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1 Data Acquisition “It’s as lar
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1.1 Sensors, Signals, and Systems 3
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1.1 Sensors, Signals, and Systems 5
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1.2 Sensor Classification 7 oscillo
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1.3 Units of Measurements 9 Table 1
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Table 1.7. SI Basic Units Reference
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2 Sensor Characteristics “O, what
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2.2 Span (Full-Scale Input) 15 Fig.
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2.4 Accuracy 17 2.4 Accuracy Avery
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2.6 Calibration Error 19 To compute
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2.8 Nonlinearity 21 Fig. 2.4. Trans
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2.12 Resolution 23 (A) (B) Fig. 2.7
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2.16 Dynamic Characteristics 25 2.1
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2.16 Dynamic Characteristics 27 Sub
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2.17 Environmental Factors 29 2.17
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2.18 Reliability 31 guide. For inst
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2.20 Uncertainty 33 • Thermal sho
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Table 2.2. Uncertainty Budget for T
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3 Physical Principles of Sensing
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3.1 Electric Charges, Fields, and P
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3.2 Capacitance 45 The capacitor ma
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3.2 Capacitance 47 (A) (B) Fig. 3.6
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3.2 Capacitance 49 h 0 (A) (B) Fig.
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3.3 Magnetism 51 N S S N (A) (B) Fi
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3.3 Magnetism 53 electric charge ca
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3.3 Magnetism 55 3.3.3 Toroid Anoth
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3.4 Induction 57 • Changing the o
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3.5 Resistance 59 Fig. 3.16. Voltag
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3.5 Resistance 61 For pure resistan
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3.5 Resistance 63 resistor) and the
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3.5 Resistance 65 Fig. 3.19. Strain
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3.6 Piezoelectric Effect 67 (A) (B)
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3.6 Piezoelectric Effect 69 Another
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3.6 Piezoelectric Effect 71 Another
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3.6 Piezoelectric Effect 73 absorpt
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3.6 Piezoelectric Effect 75 that en
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3.7 Pyroelectric Effect 77 circuit
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3.7 Pyroelectric Effect 79 through
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3.7 Pyroelectric Effect 81 Fig. 3.2
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3.8 Hall Effect 83 Fig. 3.30. Hall
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Table 3.2. Typical Characteristics
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3.9 Seebeck and Peltier Effects 87
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3.10 Sound Waves 93 If we consider
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3.11 Temperature and Thermal Proper
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3.11 Temperature and Thermal Proper
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3.12 Heat Transfer 99 to about 35
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3.12 Heat Transfer 101 (A) (B) Fig.
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3.12 Heat Transfer 103 Fig. 3.41. S
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3.12 Heat Transfer 105 Fig. 3.42. S
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3.12 Heat Transfer 107 Fig. 3.44. W
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3.12 Heat Transfer 109 (A) (B) Fig.
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3.13 Light 111 [38] whose emissivit
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3.14 Dynamic Models of Sensor Eleme
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References 119 specified and three
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References 121 34. Thomson, W. On t
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124 4 Optical Components of Sensors
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150 Optical Components of Sensors 1
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5 Interface Electronic Circuits 5.1
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5.1 Input Characteristics of Interf
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5.1 Input Characteristics of Interf
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5.2 Amplifiers 157 (A) (B) Fig. 5.5
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5.2 Amplifiers 159 Fig. 5.7. Voltag
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5.2 Amplifiers 161 (A) (B) Fig. 5.9
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5.2 Amplifiers 163 Fig. 5.11. An eq
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5.3 Excitation Circuits 165 5.3.1 C
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5.3 Excitation Circuits 167 (A) (B)
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5.3 Excitation Circuits 169 Fig. 5.
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5.3 Excitation Circuits 171 atures.
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5.3 Excitation Circuits 173 (A) (B)
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5.4 Analog-to-Digital Converters 17
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Table 5.2. Binary Bit Weights and R
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5.5 Direct Digitization and Process
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5.5 Direct Digitization and Process
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5.6 Ratiometric Circuits 191 (A) (B
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5.7 Bridge Circuits 193 determine t
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5.7 Bridge Circuits 195 Fig. 5.38.
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5.7 Bridge Circuits 197 Fig. 5.39.
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It can be solved for the temperatur
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5.8 Data Transmission 201 (A) (B) (
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5.8 Data Transmission 203 wire meth
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5.9 Noise in Sensors and Circuits 2
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5.10 Batteries for Low Power Sensor
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References 225 nickel-metal hydrate
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6 Occupancy and Motion Detectors Se
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6.2 Microwave Motion Detectors 229
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6.2 Microwave Motion Detectors 231
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6.3 Capacitive Occupancy Detectors
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6.3 Capacitive Occupancy Detectors
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6.4 Triboelectric Detectors 237 6.4
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6.5 Optoelectronic Motion Detectors
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and the facet pitch is 6.5 Optoelec
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References 251 Fig. 6.17. Calculate
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7 Position, Displacement, and Level
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7.1 Potentiometric Sensors 255 (A)
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7.2 Gravitational Sensors 257 (A) (
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7.3 Capacitive Sensors 259 (A) (B)
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7.3 Capacitive Sensors 261 Fig. 7.7
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7.4 Inductive and Magnetic Sensors
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7.5 Optical Sensors 275 Therefore,
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7.5 Optical Sensors 277 (A) (B) (C)
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7.5 Optical Sensors 279 (A) (B) Fig
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7.5 Optical Sensors 281 Fig. 7.32.
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7.5 Optical Sensors 283 (A) (B) (C)
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7.5 Optical Sensors 285 is proporti
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7.6 Ultrasonic Sensors 287 (A) (B)
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7.7 Radar Sensors 289 (A) (B) Fig.
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7.7 Radar Sensors 291 (A) (B) Fig.
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7.8 Thickness and Level Sensors 293
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References 299 8. Dakin, J. P., Wad
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8 Velocity and Acceleration Acceler
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8.1 Accelerometer Characteristics 3
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8.2 Capacitive Accelerometers 305 a
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8.3 Piezoresistive Accelerometers 3
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8.5 Thermal Accelerometers 309 Fig.
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8.5 Thermal Accelerometers 311 forc
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8.6 Gyroscopes 313 8.6 Gyroscopes N
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8.6 Gyroscopes 315 (A) (B) Fig. 8.1
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8.6 Gyroscopes 317 Products Company
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8.7 Piezoelectric Cables 319 (A) (B
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References 321 (A) (B) Fig. 8.16.Ap
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9 Force, Strain, and Tactile Sensor
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9.1 Strain Gauges 325 (A) (B) Fig.
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9.2 Tactile Sensors 327 9.2 Tactile
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9.2 Tactile Sensors 329 (A) (B) Fig
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9.2 Tactile Sensors 331 Fig. 9.7. P
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9.2 Tactile Sensors 333 Fig. 9.9. T
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9.3 Piezoelectric Force Sensors 335
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References 337 14. Karrer, E. and L
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10 Pressure Sensors “To learn som
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10.3 Mercury Pressure Sensor 341 1
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10.4 Bellows, Membranes, and Thin P
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10.5 Piezoresistive Sensors 345 Fig
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10.5 Piezoresistive Sensors 347 bri
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10.6 Capacitive Sensors 349 (A) (B)
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10.7 VRP Sensors 351 (A) (B) Fig. 1
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10.8 Optoelectronic Sensors 353 Fig
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10.9 Vacuum Sensors 355 (A) (B) Fig
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References 357 (A) (B) (C) Fig. 10.
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11 Flow Sensors It’s a simple tas
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11.2 Pressure Gradient Technique 36
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11.3 Thermal Transport Sensors 363
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11.3 Thermal Transport Sensors 365
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11.4 Ultrasonic Sensors 367 A senso
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11.4 Ultrasonic Sensors 369 Fig. 11
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induced in the liquid. The magnitud
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11.6 Microflow Sensors 373 (A) (B)
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11.7 Breeze Sensor 375 (A) (B) Fig.
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11.9 Drag Force Flow Sensors 377 Wi
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References 379 11. Philip-Chandy, R
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12 Acoustic Sensors “Your ears wi
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12.3 Fiber-Optic Microphone 383 (A)
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12.4 Piezoelectric Microphones 385
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12.5 Electret Microphones 387 Fig.
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12.6 Solid-State Acoustic Detectors
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References 391 References 1. Hohm,
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13 Humidity and Moisture Sensors 13
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13.1 Concept of Humidity 395 Table
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13.2 Capacitive Sensors 397 Fig. 13
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13.3 Electrical Conductivity Sensor
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13.4 Thermal Conductivity Sensor 40
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13.6 Oscillating Hygrometer 403 chi
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References 405 9. Jachowicz, R. S.
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14 Light Detectors “There is noth
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14.1 Introduction 409 Table 14.1. B
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14.2 Photodiodes 411 Maximum revers
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14.2 Photodiodes 413 when i = 0), w
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14.2 Photodiodes 415 (A) (B) (C) Fi
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14.2 Photodiodes 417 Fig. 14.9. Res
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14.3 Phototransistor 419 Fig. 14.12
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14.4 Photoresistors 421 (A) (B) Fig
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14.5 Cooled Detectors 423 (A) (B) F
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14.6 Thermal Detectors 425 Table 14
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14.6 Thermal Detectors 427 Fig. 14.
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Table 14.3. Typical Specifications
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14.6 Thermal Detectors 431 A dual e
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14.6 Thermal Detectors 433 Fig. 14.
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14.6 Thermal Detectors 435 (A) (B)
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14.6 Thermal Detectors 437 Section
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14.7 Gas Flame Detectors 439 P = V
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References 441 housing assures wide
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15 Radiation Detectors Figure 3.41
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15.1 Scintillating Detectors 445 Fi
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15.2 Ionization Detectors 447 emitt
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15.2 Ionization Detectors 449 Fig.
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15.2 Ionization Detectors 451 parti
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15.2 Ionization Detectors 453 There
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References 455 the pure intrinsic t
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16 Temperature Sensors When a scien
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16 Temperature Sensors 459 from whi
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16.1 Thermoresistive Sensors 461 2.
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16.1 Thermoresistive Sensors 463 Ta
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16.1 Thermoresistive Sensors 465 Fi
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16.1 Thermoresistive Sensors 467 pr
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16.1 Thermoresistive Sensors 475 (m
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16.2 Thermoelectric Contact Sensors
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16.3 Semiconductor P-N Junction Sen
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16.4 Optical Temperature Sensors 49
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16.4 Optical Temperature Sensors 49
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16.5 Acoustic Temperature Sensor 49
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References 497 plate—the so-calle
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17 Chemical Sensors 1 Chemical sens
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17.3 Classification of Chemical-Sen
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17.4 Direct Sensors 503 17.4 Direct
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17.4 Direct Sensors 505 voltage e.
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17.4 Direct Sensors 507 This reacti
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17.4 Direct Sensors 509 (A) (B) Fig
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17.4 Direct Sensors 511 µm thick a
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17.5 Complex Sensors 513 Fig. 17.11
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17.5 Complex Sensors 515 Fig. 17.12
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17.5 Complex Sensors 517 frequency
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Table 17.1. SAW Chemical Sensors 17
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17.6 Chemical Sensors Versus Instru
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References 531 13. LaCourse, W.R. P
Page 552 and 553: 18 Sensor Materials and Technologie
Page 554 and 555: 18.1 Materials 535 etching is a key
Page 556 and 557: 18.1 Materials 537 Fig. 18.3. The a
Page 558 and 559: 18.1 Materials 539 The following is
Page 560 and 561: 18.1 Materials 541 should be consid
Page 562 and 563: 18.2 Surface Processing 543 sensor
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Page 566 and 567: 18.3 Nano-Technology 547 6000-Å la
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Page 572 and 573: 18.3 Nano-Technology 553 (A) (B) Fi
Page 574 and 575: References 555 Fig. 18.17. Bonding
Page 576 and 577: Appendix Table A.1. Chemical Symbol
Page 578 and 579: Table A.4. SI Conversion Multiples
Page 580 and 581: Table A.4 Continued Light cd/in. 2
Page 582 and 583: Table A.4 Continued Cup 2.36588 ×
Page 584 and 585: Appendix 565 Table A.7. Some Materi
Page 586 and 587: Appendix 567 Table A.11. Thermoelec
Page 588 and 589: Table A.14. Mechanical Properties o
Page 590 and 591: Appendix 571 Table A.18. Typical Em
Page 592 and 593: Table A.20. Characteristics of C-Zn
Page 594 and 595: Table A.23 Continued Manufacturer P
Page 596 and 597: Table A.25. Properties of Glasses S
Page 598 and 599: Index α-particles, 443 A/D, 175, 1
Page 600 and 601: Index 581 Coulomb’s law, 40 cross
Page 604 and 605: Index 585 occupancy sensors, 227 od
Page 606 and 607: Index 587 SAW, 75, 388, 404, 496, 5
Page 608: Index 589 velocity sensor, 302 vert
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