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BULK MULTICRYSTALLINE SILICON 221<br />

Like oxygen, carbon in multicrystalline silicon appears in concentrations considerably<br />

higher than those of the boron dopant concentrations. Typical concentrations of<br />

substitutional carbon are in the range of 2–6 × 10 17 /cm 3 generally increasing with increasing<br />

block height. The incorporation of carbon into the silicon melt takes place via gaseous<br />

CO formation inside the crystallisation chamber by SiO chemically reacting with the<br />

graphite heaters. The main problem that is caused by an increased carbon concentration<br />

is the formation of needle-shaped SiC crystals (often associated with oxygen and nitrogen,<br />

see Figure 6.12) within the silicon material. SiC representing an electrically conductive<br />

semiconductor material effectively shorts the solar cell pn-junction, thereby leading to<br />

drastically reduced efficiencies. The problem of SiC formation, however, usually occurs<br />

only in the uppermost region of the ingot that is anyway rejected because of segregation<br />

of metallic impurities.<br />

Despite oxygen and carbon being present in much higher concentrations, transition<br />

metals like iron or titanium are considered as much more important with regard to<br />

solar cell efficiencies with the exception of the outer edges (width 5–10 mm) of an ingot<br />

where in-diffusion from the Si 3 N 4 coating may occur and the top segregation region metal<br />

point defects in high-quality multicrystalline silicon are present in concentration levels<br />

below the detection limit of Deep Level Transient Spectroscopy (DLTS) measurements,<br />

Si<br />

N<br />

C<br />

O<br />

XL30_07955<br />

0.20 0.40 0.60 0.80 1.00 1.20 1.40 1.60 1.80 2.00 2.20 2.40 2.60<br />

XL30_07956<br />

10 µm<br />

Figure 6.12 SEM (Scanning Electron Microscope) image of a heavily shunted solar cell region.<br />

The microscopic investigations reveal needle-shaped structures containing silicon, nitrogen, oxygen<br />

and carbon. The shunting mechanism is assumed to be due to electrically conductive SiC that<br />

short-circuits the solar cell pn-junction

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