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290 CRYSTALLINE SILICON SOLAR CELLS AND MODULES<br />

Figure 7.15<br />

Cross-section of a buried contact. (Reprinted with permission from BP Solar)<br />

Cleaning and etching<br />

Heavy n + diffusion in grooves<br />

Texturing<br />

Al evaporation<br />

Light n + diffusion<br />

Al drive-in<br />

SiN x deposition<br />

Electroless plating of Ni/Cu/Ag<br />

Laser grooving<br />

Edge isolation by laser<br />

Figure 7.16<br />

Laser-grooved buried-grid solar cell process

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