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Chapter 2
V. A vacuum was created by turning on gas cylinder the dial was adjusted
(on the gas outlet) to alter the pressure and allow entry into the
chamber and the sputter chamber was started
VI.
VII.
The dial on the gold sputter was assessed for adjustment (if the dial
was not moving the cleaning process may have to be repeated).
After completion the dial readjusted to 0.7mBar and the pressure was
turned off automatically. The vacuum was released in the chamber to
open the lid.
2.5.2.3. SEM Analysis
I. The exchange position on manual levers of the SEM microscope was
adjusted before opening.
II. >20mm - X axis (left-right), >20mm - Y axis (up-down), >Ex-Ex (exchange
size of stage).
III. The vacuum within the chamber was released to open the chamber and
load specimens.
IV. The coupon (now fixed, gold coated and set on metal pin stub) were
height adjusted using the metal height ruler.
V. The vacuum is started under the appropriate conditions:
o Conditions: Vacuum created with 25.0 kilo Volts (kV) with
high resolution, a beam of 50 and working distance variable
depending on the specimen under examination (used to
bring the specimen into focus).
VI. If the kV is adjusted, the filament is re-saturated (usually after entry of
new specimen into vacuum)
VII. >Help >Gun Alignment >execute >Help >Filament >Re-saturate the
filament.
VIII.
Low magnification was used to get the image in focus. (“TV2 Settings”
to scan item) once the object was in view “TV3 setting” was used for
finer focus.
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