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1996 Electronics Industry Environmental Roadmap - Civil and ...

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Emerging Technologies<br />

self-aligned processes, silicon-on-insulators (SOI), tantalum oxide (Ta2O5), 3-D cell structures,<br />

<strong>and</strong> chip scale packaging—will be necessary, <strong>and</strong> the vision of that future is less clear ([31], p.<br />

16):<br />

90<br />

“Beyond these trends, the direction of technology is largely uncharted with no consensus<br />

about which areas of innovation will be successful. In areas other than DRAM, it is even<br />

more difficult to find a consensus on the likely directions of technology.”

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