1996 Electronics Industry Environmental Roadmap - Civil and ...

Appendix A
SIA/SEMATECH In a steady state basis, a linked set of CAD tools is needed to interpret
a chip factory’s technology performance and evolve its process design
for improved yield. Design of new generations requires the added
capability of predicting performance, reliability, and yield. These tools
must cover a wide spectrum of technologies, be robust, be calibrated
easily by the end user, and allow for routine technical support without
the intervention of an expert user.
The roadmap includes a list of the sixteen top CAD priorities (Table
7), several of which potentially have some environmental
implementation (i.e., defect-mediated dopant profile evolution,
silicidation models).
Modeling And Simulation
There will not be radical changes in the process technology used to
manufacture semiconductors throughout this decade. Rather, there will
be expansion and refinement of current processes.
Current modeling tools are isolated, sporadically used, seldom reused,
and lack a common application plan or strategy.
Solving the problem requires fostering a unified modeling team effort
that is cognizant of the full spectrum of modeling required to capture
the manufacturing and business environment. A coherent modeling
architecture, effective partnering with manufacturers, suppliers,
universities, and national laboratories, and compatibility with industry
standard systems.
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