Introduction to Nanotechnology

13
NANOMACHINES AND
NANODEVICES
In previous chapters some potential applications of nanotechnology have been
described. In this final chapter we discuss research aimed at developing other
applications such as tiny machines, devices having nanosized components, and
nanosized molecules as the writing and reading elements of faster computers. We
also discuss some of the issues involved in the fabrication of such small devices.
13.1. MICROELECTROMECHANICAL SYSTEMS (MEMSs)
Although microelectromechanical systems do not technically fall under the subject
of nanotechnology, it is useful to briefly discuss them at the beginning of the chapter
because they represent a more mature technology, and many of the differences in
behavior observed in the micromechanical world could well apply to the nano-
regime, thereby providing a basis for the design of nanomachines.
The extensive fabrication infrastructure developed for the manufacture of silicon
integrated circuits has made possible the development of machines and devices
having components of micrometer dimensions. Lithographic techniques, described
in previous chapters, combined with metal deposition processes, are used to make
MEMS devices. Microelectromechanical systems involve a mechanical response to
Introduction to Nmotechnohgy, by Charles P. Poole Jr. and Frank J. Owens
ISBN 0-471-07935-9. Copyright 0 2003 John Wiley & Sons, Inc.