3D Time-of-flight distance measurement with custom - Universität ...

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DEMODULATION PIXELS IN CMOS/CCD 105 (a) (b) (c) metal wire contact n+ diffusion poly 2 poly 1 CCD channel light opening Dimensions: photogate: 15x15 µm 2 , pixel: 95x110 µm 2 , aspect ratio: 1:1, fill factor: 2.2%. metal wire contact n+ diffusion poly 2 poly 1 light opening Dimensions: photogate: 15x15 µm 2 , pixel: 40x85 µm 2 , aspect ratio: 1:2, fill factor: 6.6%. store1 PG store3 samp1 samp3 potential a 1 Figure 5.3 Four-tap lock-in pixel realized with (a) one- and (b) two output diffusions: layout and cross-sectional view (c). The 4-tap device has been realized in two different versions, one with a wheelshaped readout CCD, ending in only one sense diffusion node and one with two separate sense diffusion nodes, doubling the conversion capacitance and thus leading to only half the output voltage amplitude. The wheel-shaped CCD occupies a 3
106 CHAPTER 5 a lot of space and diminishes the pixel’s fill factor to only 2.2%. In spite of the lower conversion gain the 2-side readout version is the preferable realization of both 4-tap pixels, because it offers a three times higher fill factor (6.6%) and has a reduced demand on a highly efficient CCD charge transport. This is because the photoelectrons only have to pass three CCD gates from their generation site, the photogate, to the detection diffusion. The influences of the unconventionally shaped CCD gates of both realization versions have to be investigated thoroughly. The array-friendlier aspect ratio of 1:2 (1:1 respectively for the wheel-shaped version) and the short transport paths of the photoelectrons in the demodulation process are the major advantages of this 4-tap device compared to the multitap- CCD. However, it is not possible to realize more than four storage sites with this pixel architecture without drastically enlarging the photogate. The photogate, on the other hand, should be as small as possible for a fast and efficient charge separation. This appeared to be a problem in the first implementation of this technique [SP1], where, due to an over-dimensioned size of the photogate compared to the relatively narrow transfer gates, an inhomogeneous sensitivity of the single sampling points could be measured. By the modified, highly symmetrical pixel layouts shown in Figure 5.3 this problem of inhomogeneities between the sampling points was partly overcome, at least for low sampling frequencies.
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3D Time-of-flight distance measurem
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To my parents
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Meinen Eltern
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II 4. Power budget and resolution l
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Abstract Since we are living in a t
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centimeter accuracy. With the singl
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X Eine elegantere Methode zur Entfe
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INTRODUCTION 1 1. Introduction One
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INTRODUCTION 3 light source observe
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INTRODUCTION 5 Propagation time, ho
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INTRODUCTION 7 Chapter 3 gives a sh
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OPTICAL TOF RANGE MEASUREMENT 9 2.
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OPTICAL TOF RANGE MEASUREMENT 13 pr
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OPTICAL TOF RANGE MEASUREMENT 15 hi
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OPTICAL TOF RANGE MEASUREMENT 17 Pu
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OPTICAL TOF RANGE MEASUREMENT 23 wh
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OPTICAL TOF RANGE MEASUREMENT 25 δ
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OPTICAL TOF RANGE MEASUREMENT 27 c(
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OPTICAL TOF RANGE MEASUREMENT 29 A
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OPTICAL TOF RANGE MEASUREMENT 31 ph
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OPTICAL TOF RANGE MEASUREMENT 33 Ts
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OPTICAL TOF RANGE MEASUREMENT 35 f1
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OPTICAL TOF RANGE MEASUREMENT 37 an
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OPTICAL TOF RANGE MEASUREMENT 39 in
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OPTICAL TOF RANGE MEASUREMENT 41 Ss
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OPTICAL TOF RANGE MEASUREMENT 43 Fr
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OPTICAL TOF RANGE MEASUREMENT 45 1
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50 CHAPTER 3 the smearing effect, r
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52 CHAPTER 3 3.1 Silicon properties
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Page 79 and 80: 62 CHAPTER 3 Very special processes
Page 81 and 82: 64 CHAPTER 3 1 kT Dn = ⋅ vth ⋅
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Page 87 and 88: 70 CHAPTER 3 Flicker noise is cause
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Page 91 and 92: 74 CHAPTER 3 amount of the charge p
Page 93 and 94: 76 CHAPTER 3 substrate (Equation 3.
Page 95 and 96: 78 CHAPTER 3 charge carriers the CT
Page 97 and 98: 80 CHAPTER 3 without causing short
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IMAGING TOF RANGE CAMERAS 155 6.1.2
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IMAGING TOF RANGE CAMERAS 157 gate
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IMAGING TOF RANGE CAMERAS 159 6.2 2
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IMAGING TOF RANGE CAMERAS 161 n+ di
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IMAGING TOF RANGE CAMERAS 163 pixel
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IMAGING TOF RANGE CAMERAS 165 Power
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IMAGING TOF RANGE CAMERAS 167 Delay
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IMAGING TOF RANGE CAMERAS 169 6.3 3
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IMAGING TOF RANGE CAMERAS 171 Gate
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IMAGING TOF RANGE CAMERAS 173 Bound
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IMAGING TOF RANGE CAMERAS 175 Figur
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IMAGING TOF RANGE CAMERAS 177 Final
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IMAGING TOF RANGE CAMERAS 179 #5 #6
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SUMMARY AND PERSPECTIVE 181 7. Summ
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SUMMARY AND PERSPECTIVE 183 into th
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SUMMARY AND PERSPECTIVE 185 or phas
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188 CHAPTER 8 8.2 Typical parameter
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190 CHAPTER 8 Spectral luminous int
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192 CHAPTER 8 MCD03S: Conditions SC
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194 CHAPTER 8 MCD06S: Measurement c
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196 [BRK] Brockhaus, “Naturwissen
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198 [KAI] I. Kaisto, et al., “Opt
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200 [SP1] T. Spirig et al., “The
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ACKNOWLEDGMENTS 203 Acknowledgments
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206 Publication list 1. R. Lange, P
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