3D Time-of-flight distance measurement with custom - Universität ...

SOLID-STATE IMAGE SENSING 77
(a)
(b)
CTE
CTE
1.000
0.995
0.990
0.985
0.980
0.975
0.970
0.965
0.960
1.0000
0.9995
0.9990
0.9985
0.9980
0.9975
0.9970
0.9965
10000 100000
Size of charge packet in #electrons
1000000
0 5 10 15 20 25
Clock frequency in MHz
Figure 3.20 Charge transfer efficiency of a SCCD realized in Orbit 2.0µm
CMOS/CCD technology. (a) CTE vs. number of transported electrons
@ 20 MHz clock frequency. (b) CTE vs. clock frequency @
1,000,000 electrons charge packet. Gate amplitude for both
measurements: 10 V. [BLU].
The CTE decreases for high modulation frequencies and small charge packets, as
the measurements of a surface channel CCD line shows (Figure 3.20). We realized
this CCD line to characterize the CCD performance of the ORBIT 2.0µm
CMOS/CCD technology, the same technology that we used for the demodulation
pixels. At high frequencies an increasing number of charge carriers does not have
enough time for the transfer from one pixel to the next. For a small number of