3D Time-of-flight distance measurement with custom - Universität ...

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APPENDIX 187 8.1 Physical constants 8. Appendix Speed of light c 2.9979⋅10 8 m/s Permeability of vacuum µ0 1.2566⋅10 -6 H/m Permittivity of free space ε0 8.86⋅10 -12 F/m Relative permittivity of SiO2 εox 3.9 Relative permittivity of Si εSi 11.9 Electron charge q 1.6022⋅10 -19 C Boltzmann constant k 1.3807⋅10 -23 J/K 8.6174⋅10 -5 eV/K Electron rest mass m0 9.1094⋅10 -31 kg Proton rest mass mp 1.6726⋅10 -27 kg Planck constant h 6.6261⋅10 -34 J s 4.1357⋅10 -15 eV⋅s Reduced Planck constant (h/2π) h 1.0546⋅10 -34 J s 6.5821⋅10 -16 eV⋅s Thermal potential at 300K (kT/q) φT 0.025852 V Electronvolt eV eV 1.6022⋅10 -19 J
188 CHAPTER 8 8.2 Typical parameters of a 2 µm CMOS technology Layer Thickness / depth Doping concentration Sheet resistance p substrate - 5⋅10 14 cm -3 3000 Ω/square APT implant (anti punch through) - 5⋅10 15 cm -3 - n+ 0.3 µm 10 20 cm -3 30 Ω/square p+ 0.3 µm 10 20 cm -3 70 Ω/square n-well 3.0 µm 1.5⋅10 16 cm -3 2500 Ω/sq. Metal1 0.6 µm - 0.06 Ω/sq. Metal2 1.2 µm - 0.03 Ω/sq. Poly1 0.5 µm - 20 Ω/square Poly2 0.5 µm - 25 Ω/square Interpoly oxide 0.08 µm - - Poly1 gate oxide 0.04 µm - - Poly2 gate oxide 0.045 µm - - Field oxide (poly to substrate) 0.6 µm - - Gate to oxide capacitances Poly1 80⋅10 -5 pF/µm 2 Poly2 70⋅10 -5 pF/µm 2
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3D Time-of-flight distance measurem
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To my parents
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Meinen Eltern
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II 4. Power budget and resolution l
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Abstract Since we are living in a t
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centimeter accuracy. With the singl
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X Eine elegantere Methode zur Entfe
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INTRODUCTION 1 1. Introduction One
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INTRODUCTION 3 light source observe
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INTRODUCTION 5 Propagation time, ho
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INTRODUCTION 7 Chapter 3 gives a sh
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OPTICAL TOF RANGE MEASUREMENT 9 2.
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OPTICAL TOF RANGE MEASUREMENT 13 pr
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OPTICAL TOF RANGE MEASUREMENT 15 hi
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OPTICAL TOF RANGE MEASUREMENT 17 Pu
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OPTICAL TOF RANGE MEASUREMENT 19 Ad
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OPTICAL TOF RANGE MEASUREMENT 21 pr
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OPTICAL TOF RANGE MEASUREMENT 23 wh
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OPTICAL TOF RANGE MEASUREMENT 25 δ
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OPTICAL TOF RANGE MEASUREMENT 27 c(
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OPTICAL TOF RANGE MEASUREMENT 29 A
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OPTICAL TOF RANGE MEASUREMENT 31 ph
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OPTICAL TOF RANGE MEASUREMENT 33 Ts
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OPTICAL TOF RANGE MEASUREMENT 35 f1
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OPTICAL TOF RANGE MEASUREMENT 37 an
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OPTICAL TOF RANGE MEASUREMENT 39 in
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OPTICAL TOF RANGE MEASUREMENT 41 Ss
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OPTICAL TOF RANGE MEASUREMENT 43 Fr
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OPTICAL TOF RANGE MEASUREMENT 45 1
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50 CHAPTER 3 the smearing effect, r
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52 CHAPTER 3 3.1 Silicon properties
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54 CHAPTER 3 (a) Figure 3.3 Optical
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56 CHAPTER 3 Quantum efficiency in
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58 CHAPTER 3 The different operatio
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60 CHAPTER 3 (a) (b) Depletion widt
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62 CHAPTER 3 Very special processes
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64 CHAPTER 3 1 kT Dn = ⋅ vth ⋅
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66 CHAPTER 3 The proportionality fa
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68 CHAPTER 3 difference of only 1 V
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70 CHAPTER 3 Flicker noise is cause
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72 CHAPTER 3 A s = sf ⋅ q C ⎡ V
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74 CHAPTER 3 amount of the charge p
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76 CHAPTER 3 substrate (Equation 3.
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78 CHAPTER 3 charge carriers the CT
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80 CHAPTER 3 without causing short
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82 CHAPTER 3 Over an address decode
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84 CHAPTER 3 Orbit’s 2.0µm CMOS/
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86 CHAPTER 4 Figure 4.1 P lens Lamb
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88 CHAPTER 4 Required optical power
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90 CHAPTER 4 4.2 Noise limitation o
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92 CHAPTER 4 number of pseudo-backg
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94 CHAPTER 4 Cmod = 1 QE(λ) = 0.65
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96 CHAPTER 4 Range accuracy (std) i
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DEMODULATION PIXELS IN CMOS/CCD 99
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Page 152 and 153: DEMODULATION PIXELS IN CMOS/CCD 135
Page 168 and 169: IMAGING TOF RANGE CAMERAS 151 6. Im
Page 170 and 171: IMAGING TOF RANGE CAMERAS 153 contr
Page 172 and 173: IMAGING TOF RANGE CAMERAS 155 6.1.2
Page 174 and 175: IMAGING TOF RANGE CAMERAS 157 gate
Page 176 and 177: IMAGING TOF RANGE CAMERAS 159 6.2 2
Page 178 and 179: IMAGING TOF RANGE CAMERAS 161 n+ di
Page 180 and 181: IMAGING TOF RANGE CAMERAS 163 pixel
Page 182 and 183: IMAGING TOF RANGE CAMERAS 165 Power
Page 184 and 185: IMAGING TOF RANGE CAMERAS 167 Delay
Page 186 and 187: IMAGING TOF RANGE CAMERAS 169 6.3 3
Page 188 and 189: IMAGING TOF RANGE CAMERAS 171 Gate
Page 190 and 191: IMAGING TOF RANGE CAMERAS 173 Bound
Page 192 and 193: IMAGING TOF RANGE CAMERAS 175 Figur
Page 194 and 195: IMAGING TOF RANGE CAMERAS 177 Final
Page 196 and 197: IMAGING TOF RANGE CAMERAS 179 #5 #6
Page 198 and 199: SUMMARY AND PERSPECTIVE 181 7. Summ
Page 200 and 201: SUMMARY AND PERSPECTIVE 183 into th
Page 202: SUMMARY AND PERSPECTIVE 185 or phas
Page 207 and 208: 190 CHAPTER 8 Spectral luminous int
Page 209 and 210: 192 CHAPTER 8 MCD03S: Conditions SC
Page 211 and 212: 194 CHAPTER 8 MCD06S: Measurement c
Page 213 and 214: 196 [BRK] Brockhaus, “Naturwissen
Page 215 and 216: 198 [KAI] I. Kaisto, et al., “Opt
Page 217 and 218: 200 [SP1] T. Spirig et al., “The
Page 220 and 221: ACKNOWLEDGMENTS 203 Acknowledgments
Page 222: 206 Publication list 1. R. Lange, P
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