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3D Time-of-flight distance measurement with custom - Universität ...

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DEMODULATION PIXELS IN CMOS/CCD 149<br />

dump diffusion<br />

dump gate<br />

storage 0°<br />

Mod0°<br />

PGM<br />

Mod180°<br />

storage 180°<br />

CCDsep<br />

storage 90°<br />

Mod90°<br />

PGM<br />

Mod270°<br />

storage 270°<br />

OUT gate<br />

sense diffusion<br />

Light sensitive<br />

(detection and demodulation)<br />

adressable<br />

in-pixel APS<br />

readout circuitry<br />

0°/180°<br />

90°/270°<br />

(a)<br />

Opaque (storage)<br />

sense diffusion<br />

OUTG 0°<br />

storage 0°<br />

Mod0°<br />

PGM<br />

Mod180°<br />

storage 180°<br />

OUTG 180°<br />

sense diffusion<br />

adressable in-pixel<br />

APS readout circuitry<br />

sense diffusion<br />

OUTG 90°<br />

storage 90°<br />

Mod90°<br />

PGM<br />

Mod270°<br />

storage 270°<br />

OUTG 270°<br />

sense diffusion<br />

adressable<br />

in-pixel APS<br />

readout circuitry<br />

0°/180°<br />

90°/270°<br />

Figure 5.27 Realization <strong>of</strong> the two-photosite pixel (a) <strong>with</strong> one and (b) <strong>with</strong> two<br />

readout stages per pixel.<br />

Figure 5.27 shows two possible realizations, <strong>with</strong> either one readout stage for all<br />

four sampling points or <strong>with</strong> two readout stages per pixel. For (b) two diffusions are<br />

short-circuited to one sense diffusion node, which can be accessed from two sides.<br />

This enables the readout <strong>of</strong> two sampling points per readout stage <strong>with</strong>out moving<br />

the sampled values through the light sensitive CCD gates. The drawback that the<br />

sense diffusion will have a larger capacitance (less than a factor two) and hence a<br />

worse conversion factor (voltage increase per electron) can be tolerated. It is<br />

important to mention that fixed-pattern noise due to the use <strong>of</strong> two readout stages<br />

per pixel is not a problem. This is because the balanced-mode sampling points are<br />

subtracted from each other in the phase algorithm (c.f. Equation 2.17). Fixed<br />

pattern noise mainly adds an <strong>of</strong>fset component to the pixel values. This <strong>of</strong>fset<br />

disappears after the subtraction, leading to pair-wise <strong>of</strong>fset-free charge integration.<br />

Due to the highly parallel, simple architecture, optical microstructures can be easily<br />

realized, produced and assembled, fulfilling the task <strong>of</strong> averaging the received light<br />

on each pixel and equally distributing the averaged light onto the two light sensitive<br />

areas. This results in two optically identical photo sites per pixel and makes it<br />

(b)

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