Research Directory of the Brandenburg University of Applied Sciences

a)
b)
c)
Characterization of
Miniaturized Infrared Emitters
New micro-machined thermal infrared
emitters in TO-39 housing with protective
cap, reflector, or IR transparent window are
available for compact IR spectroscopy
applications and non-dispersive infrared
gas analysis (NDIR) [5]. Typical emitter
areas are in the range of some mm 2 . Fig.
3.19 depicts two types of miniaturized IR
emitters. The miniaturized emitters consist
of a resistive heating element on top of a thin insulating
membrane suspended by a micro-machined silicon
substrate. Due to the low thermal mass of the
Emitter type 1 Emitter type 2
Fig. 3.19: Visible microscope images of two types of miniaturized emitters
Type 1, left: Maximum temperature 450°C, emitter area 2.1 x 1.8 mm2
Type 2, right: Maximum temperature 750°C, emitter area 2.8 x 1.8 mm2
Wissenschaftliche Beiträge – Fachbereich Technik
Scientific Articles – Department of Engineering
MEMS structure (heated membrane with a thickness in
the μm-range) these emitters exhibit a time constant in
the ms-range. The maximum emitter temperature
Fig. 3.20: Stationary spatial radiance distribution at the emitter surfaces (type 1 left, type 2 right)
Top: a) Thermal images of the emitter surface (stationary temperature distribution) without (left) and with applied voltage (right)
Middle: b) 2D-plot of the measured raw data signal distribution on the emitter surface with applied voltage
Bottom: c) Line profile of the measured raw data for applied voltage
Forschungsbericht Research Report 2007 – 2010 85