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(12) PATENT APPLICATION PUBLICATION
(19) INDIA (21) Application No.: 1237/MUM/2004 A
(22) Date of filing of Application: 17/11/2004 (43) Publication Date: 09/06/2006
(54) Title of the invention: POWER COUPLING FOR HIGH-POWER SPUTTERING
(51) International classification : C23C 14/34,
H01J 37/34,
C23C 14/34
(31) Priority Document No : 10/820,896
(32) Priority Date : 08/04/2004
(33) Name of priority country : U.S.A.
(86) International Application No : NIL
and Filing Date : NIL
(87) International Publication No : NIL
(61) Patent of addition to :
Application No
NIL
(62)
Filed on : N.A.
Divisional to Application No : NIL
Filed on : N.A.
(71) Name of Applicant:
1. APPLIED FILMS
CORPORATION
2. APPLIED FILMS GMBH &
CO.KG.
Address of the Applicant:
1. 9586 I-25 FRONTAGE ROAD,
LONGMONT, COLORADO 80504,
U.S.A.
2. SIEMENSSTRASSE 100 D-63755
ALZENAU, GERMANY.
(72) Name of the Inventor:
1. NEWCOMB RICHARD
2. GEISLER MICHAEL
Filed U/S 5(2) before The Patents
(Amendment) Act, 2005: NO
(57) Abstract: A system method for coating a substrate is described. One embodiment includes a high-power
sputtering system with a power coupler configured to deliver power to a rotatable target. The power coupler is
positioned in a vacuum chamber or between the bearings and the rotatable target outside the vacuum chamber to
limit the current that flows through the bearing.
Drawing: 11 Sheets.
Total Pages: 25.
Fig. Nil
The Patent Office Journal 09/06/2006 10908