tel-00141132, version 1 - 11 Apr 2007 Chapitre 2 : Elaboration <strong>de</strong> films <strong>minces</strong> <strong>de</strong> STO et BTO Bibliographie [1] F. Jona, G. Shirane, Ferroelectric crystals, 1962, Ed. Pergamon Press, Oxford. [2] A.A. Sir<strong>en</strong>ko, I.A. Akimov, C. Bernhard, A.M. Clark, J.H. Hao, W. Si, X.X. Xi, Lattice dynamical properties of SrTiO3 thin films, AIP Confer<strong>en</strong>ce Proceedings, 2000, vol35, n°1, p201-217. [3] K.A. Müller, H. Burkard, SrTiO3 : An intrinsic quantum paraelectric below 4 K, Physical Review B, 1979, vol19, n°7, p3593-3602. [4] J.G. Bednorz, K.A. Müller, Sr1-xCaxTiO3 : An XY quantum ferroelectric with transition to randomness, Physical review Letters, 1984, vol52, n°25, p2289-2292. [5] H. Uwe, T. Sakudo, Stress-induced ferroelectricity and soft phonon mo<strong>de</strong>s in SrTiO3, Physical Review B, 1976, vol13, n°1, p271-286. [6] F.W. Lytle, X-Ray diffractometry of low-temperature phase transformations in strontium titanate, Journal of Applied Physics, 1964, vol35, n°7, p2212-2215. [7] M.E. Lines, A.M. Glass, Principles and application of ferroelectrics and related materials, 1977, Ed. Clar<strong>en</strong>don Press, Oxford. [8] R. Waser, O. Lohse, Electrical characterization of ferroelectric, paraelectric, and superparaelectric thin films, Integrated Ferroelectrics, 1998, vol21, p27-40. [9] R. Waser, Dielectric analysis of integrated ceramic thin film capacitors, Integrated Ferroelectrics, 1997, vol15, p39-51. [10] K. Uchino, E. Sadanaga, T. Hirose, Dep<strong>en</strong><strong>de</strong>nce of the crystal structure on particle size in barium titanate, Journal of the American Ceramic Society, 1989, vol72 n°8, p1555- 1558. [11] B. Li, X. Wang, L. Li, H. Zhou, X. Liu, X. Han, Y. Zhang, X. Qi, X. D<strong>en</strong>g, Dielectric properties of fine-grained BaTiO3 prepared by spark-plasma-sintering, Materials Chemistry and Physics, 2004, vol83, p23-28. [12] G. Arlt, D. H<strong>en</strong>nings, G. <strong>de</strong> With, Dielectric properties of fine-grained barium titanate ceramics, Journal of Applied Physics, 1985, vol58 n°4, p16119-1625. [13] H. Yamaguchi, P.Y. Lesaicherre, T. Sakuma, Y. Miyasaka, A. Ishitani, M. Yoshida, Structural and electrical characterization of SrTiO3 thin films prepared by metal organic chemical vapor <strong>de</strong>position, Japanese Journal of Applied Physics, 1993, vol32, p4069-4073. [14] T. Hirano, M. Taga, T. Kobayashi, Effect of nonstoichiometry on dielectric properties of strontium titanate thin films grown by ArF excimer laser ablation, Japanese Journal of Applied Physics, 1993, vol32, pL1760-L1763. 80
tel-00141132, version 1 - 11 Apr 2007 Chapitre 2 : Elaboration <strong>de</strong> films <strong>minces</strong> <strong>de</strong> STO et BTO [15] P.Y. Lesaicherre, H. Yamaguchi, Y. Miyasaka, H. Watanabe, H. Ono, M. Yoshida, SrTiO3 thin films by MOCVD for 1Gbit DRAM application, Integrated Ferroelectrics, 1995, vol8, p201-225. [16] A. Tsuzuki, K. Kato, K. Kusumoto, Y. Torii, Sr/Ti ratio <strong>de</strong>p<strong>en</strong><strong>de</strong>nce of the dielectric properties of SrTiO3 thin films prepared by sol-gel method, Journal of Materials Sci<strong>en</strong>ce Letters, 1997, vol16, p1652. [17] J.K. Lee, Y.H. Lee, K.S. Hong, J.W. Jang, Role of internal stress on room-temperature permittivity of BaTiO3 ceramics and thin films, Journal of Applied Physics, 2004, vol95, p219-225. [18] L.J. Sinnamon, R.M. Bowman, J.M. Gregg, Investigation of <strong>de</strong>ad-layer thickness in SrRuO3/Ba0.5Sr0.5TiO3/Au thin-film capacitors, Applied Physics letters, 2001, vol 78 n°12 p1724-1726. [19] B.T. Lee, C.S. Hwang, Influ<strong>en</strong>ces of interfacial intrinsic low-dielectric layers on the dielectric properties of sputtered (Ba,Sr)TiO3 thin films, Applied Physics letters, 2000, vol 77 n°1 p124-126. [20] K. Natori, D. Otani, N. Sano, Thickness <strong>de</strong>p<strong>en</strong><strong>de</strong>nce of the effective dielectric constant in a thin film capacitor, Applied Physics letters, 1998, vol 73 n°5 p632-634. [21] K. Uchino, Electrostrictive materials, Vibration Encyclopedia, Aca<strong>de</strong>mic Press [22] T. Schimizu, The effect of strain on the permittivity of SrTiO3 from first-principles study, Solid State Communications, 1997, vol 102, n°7, p523-527. [23] G.F. Huang, S. Berger, Combined effect of thickness and stress on ferroelectric behavior of thin BaTiO3 films, Journal of Applied Physics, 2003, vol 93, n°5, p2855-2860. [24] H.S. Wang, Y.W. Liu, K. Ma, Z.Q. P<strong>en</strong>g, D.F. Cui, H.B. Lu, Y.L. Zhou, Z.H. Ch<strong>en</strong>, L. Li, G.Z. Yang, Structural and ferroelectric properties of BaTiO3/Yba2Cu3O7 heterostructures prepared by laser molecular beam epitaxy, Physica C, 1997, vol 282-287, p699-700. [25] H.Y. Lee, C.H. Hsu, Y.W. Hsieh, Y.H. Ch<strong>en</strong>, Y.C. Liang, T.B. Wu, L.J. Chou, Preparation of heteroepitaxial LaNiO3 thin films on a SrTiO3 substrate for growing an artificial superlattice with RF sputtering, Materials Chemistry and Physics, 2005, article in press. [26] L. Li, Ferroelectric/superconductor heterostructures, Materials Sci<strong>en</strong>ce and Engineering, 2000, vol 29, p153-181. [27] J. Legrand, S. Lhostis, Y. Chang, L. Militaru, C. Lamard, A. Sibai, L. Auvray, M. Audier, J.P. Sénateur, C. Dubourdieu, F. Ducroquet, Electrical characterization of SrTiO3 thin films <strong>de</strong>posited on Si(001) substrate by liquid injection MOCVD, Microelectronic Engineering, 2004, vol72, p310-314. 81
- Page 1 and 2:
tel-00141132, version 1 - 11 Apr 20
- Page 3 and 4:
tel-00141132, version 1 - 11 Apr 20
- Page 5 and 6:
tel-00141132, version 1 - 11 Apr 20
- Page 7 and 8:
tel-00141132, version 1 - 11 Apr 20
- Page 9 and 10:
tel-00141132, version 1 - 11 Apr 20
- Page 11 and 12:
tel-00141132, version 1 - 11 Apr 20
- Page 13 and 14:
tel-00141132, version 1 - 11 Apr 20
- Page 15 and 16:
tel-00141132, version 1 - 11 Apr 20
- Page 17 and 18:
tel-00141132, version 1 - 11 Apr 20
- Page 19 and 20:
tel-00141132, version 1 - 11 Apr 20
- Page 21 and 22:
tel-00141132, version 1 - 11 Apr 20
- Page 23 and 24:
tel-00141132, version 1 - 11 Apr 20
- Page 25 and 26:
tel-00141132, version 1 - 11 Apr 20
- Page 27 and 28:
tel-00141132, version 1 - 11 Apr 20
- Page 29 and 30:
tel-00141132, version 1 - 11 Apr 20
- Page 31 and 32:
tel-00141132, version 1 - 11 Apr 20
- Page 33 and 34: tel-00141132, version 1 - 11 Apr 20
- Page 35 and 36: tel-00141132, version 1 - 11 Apr 20
- Page 37 and 38: tel-00141132, version 1 - 11 Apr 20
- Page 39 and 40: tel-00141132, version 1 - 11 Apr 20
- Page 41 and 42: tel-00141132, version 1 - 11 Apr 20
- Page 43 and 44: tel-00141132, version 1 - 11 Apr 20
- Page 45 and 46: tel-00141132, version 1 - 11 Apr 20
- Page 47 and 48: tel-00141132, version 1 - 11 Apr 20
- Page 49 and 50: tel-00141132, version 1 - 11 Apr 20
- Page 51 and 52: tel-00141132, version 1 - 11 Apr 20
- Page 53 and 54: tel-00141132, version 1 - 11 Apr 20
- Page 55 and 56: tel-00141132, version 1 - 11 Apr 20
- Page 57 and 58: tel-00141132, version 1 - 11 Apr 20
- Page 59 and 60: tel-00141132, version 1 - 11 Apr 20
- Page 61 and 62: tel-00141132, version 1 - 11 Apr 20
- Page 63 and 64: tel-00141132, version 1 - 11 Apr 20
- Page 65 and 66: tel-00141132, version 1 - 11 Apr 20
- Page 67 and 68: tel-00141132, version 1 - 11 Apr 20
- Page 69 and 70: tel-00141132, version 1 - 11 Apr 20
- Page 71 and 72: tel-00141132, version 1 - 11 Apr 20
- Page 73 and 74: tel-00141132, version 1 - 11 Apr 20
- Page 75 and 76: tel-00141132, version 1 - 11 Apr 20
- Page 77 and 78: tel-00141132, version 1 - 11 Apr 20
- Page 79 and 80: tel-00141132, version 1 - 11 Apr 20
- Page 81 and 82: tel-00141132, version 1 - 11 Apr 20
- Page 83: tel-00141132, version 1 - 11 Apr 20
- Page 87 and 88: tel-00141132, version 1 - 11 Apr 20
- Page 89 and 90: tel-00141132, version 1 - 11 Apr 20
- Page 91 and 92: tel-00141132, version 1 - 11 Apr 20
- Page 93 and 94: tel-00141132, version 1 - 11 Apr 20
- Page 95 and 96: tel-00141132, version 1 - 11 Apr 20
- Page 97 and 98: tel-00141132, version 1 - 11 Apr 20
- Page 99 and 100: tel-00141132, version 1 - 11 Apr 20
- Page 101 and 102: tel-00141132, version 1 - 11 Apr 20
- Page 103 and 104: tel-00141132, version 1 - 11 Apr 20
- Page 105 and 106: tel-00141132, version 1 - 11 Apr 20
- Page 107 and 108: tel-00141132, version 1 - 11 Apr 20
- Page 109 and 110: tel-00141132, version 1 - 11 Apr 20
- Page 111 and 112: tel-00141132, version 1 - 11 Apr 20
- Page 113 and 114: tel-00141132, version 1 - 11 Apr 20
- Page 115 and 116: tel-00141132, version 1 - 11 Apr 20
- Page 117 and 118: tel-00141132, version 1 - 11 Apr 20
- Page 119 and 120: tel-00141132, version 1 - 11 Apr 20
- Page 121 and 122: tel-00141132, version 1 - 11 Apr 20
- Page 123 and 124: tel-00141132, version 1 - 11 Apr 20
- Page 125 and 126: tel-00141132, version 1 - 11 Apr 20
- Page 127 and 128: tel-00141132, version 1 - 11 Apr 20
- Page 129 and 130: tel-00141132, version 1 - 11 Apr 20
- Page 131 and 132: tel-00141132, version 1 - 11 Apr 20
- Page 133 and 134: tel-00141132, version 1 - 11 Apr 20
- Page 135 and 136:
tel-00141132, version 1 - 11 Apr 20
- Page 137 and 138:
tel-00141132, version 1 - 11 Apr 20
- Page 139 and 140:
tel-00141132, version 1 - 11 Apr 20
- Page 141 and 142:
tel-00141132, version 1 - 11 Apr 20
- Page 143 and 144:
tel-00141132, version 1 - 11 Apr 20
- Page 145 and 146:
tel-00141132, version 1 - 11 Apr 20
- Page 147 and 148:
tel-00141132, version 1 - 11 Apr 20
- Page 149 and 150:
tel-00141132, version 1 - 11 Apr 20
- Page 151 and 152:
tel-00141132, version 1 - 11 Apr 20
- Page 153 and 154:
tel-00141132, version 1 - 11 Apr 20
- Page 155 and 156:
tel-00141132, version 1 - 11 Apr 20
- Page 157 and 158:
tel-00141132, version 1 - 11 Apr 20
- Page 159 and 160:
tel-00141132, version 1 - 11 Apr 20
- Page 161 and 162:
tel-00141132, version 1 - 11 Apr 20
- Page 163 and 164:
tel-00141132, version 1 - 11 Apr 20
- Page 165 and 166:
tel-00141132, version 1 - 11 Apr 20
- Page 167 and 168:
tel-00141132, version 1 - 11 Apr 20
- Page 169 and 170:
tel-00141132, version 1 - 11 Apr 20
- Page 171 and 172:
tel-00141132, version 1 - 11 Apr 20
- Page 173 and 174:
tel-00141132, version 1 - 11 Apr 20
- Page 175 and 176:
tel-00141132, version 1 - 11 Apr 20
- Page 177 and 178:
tel-00141132, version 1 - 11 Apr 20
- Page 179 and 180:
tel-00141132, version 1 - 11 Apr 20
- Page 181 and 182:
tel-00141132, version 1 - 11 Apr 20
- Page 183 and 184:
tel-00141132, version 1 - 11 Apr 20
- Page 185 and 186:
tel-00141132, version 1 - 11 Apr 20
- Page 187 and 188:
tel-00141132, version 1 - 11 Apr 20
- Page 189 and 190:
tel-00141132, version 1 - 11 Apr 20
- Page 191 and 192:
tel-00141132, version 1 - 11 Apr 20
- Page 193 and 194:
tel-00141132, version 1 - 11 Apr 20
- Page 195 and 196:
tel-00141132, version 1 - 11 Apr 20
- Page 197 and 198:
tel-00141132, version 1 - 11 Apr 20
- Page 199 and 200:
tel-00141132, version 1 - 11 Apr 20
- Page 201 and 202:
tel-00141132, version 1 - 11 Apr 20
- Page 203 and 204:
tel-00141132, version 1 - 11 Apr 20
- Page 205 and 206:
tel-00141132, version 1 - 11 Apr 20
- Page 207 and 208:
tel-00141132, version 1 - 11 Apr 20
- Page 209 and 210:
tel-00141132, version 1 - 11 Apr 20
- Page 211 and 212:
tel-00141132, version 1 - 11 Apr 20
- Page 213 and 214:
tel-00141132, version 1 - 11 Apr 20
- Page 215 and 216:
tel-00141132, version 1 - 11 Apr 20
- Page 217 and 218:
tel-00141132, version 1 - 11 Apr 20
- Page 219 and 220:
tel-00141132, version 1 - 11 Apr 20
- Page 221 and 222:
tel-00141132, version 1 - 11 Apr 20
- Page 223 and 224:
tel-00141132, version 1 - 11 Apr 20
- Page 225 and 226:
tel-00141132, version 1 - 11 Apr 20
- Page 227 and 228:
tel-00141132, version 1 - 11 Apr 20
- Page 229 and 230:
tel-00141132, version 1 - 11 Apr 20
- Page 231 and 232:
tel-00141132, version 1 - 11 Apr 20
- Page 233 and 234:
tel-00141132, version 1 - 11 Apr 20
- Page 235 and 236:
tel-00141132, version 1 - 11 Apr 20
- Page 237 and 238:
tel-00141132, version 1 - 11 Apr 20
- Page 239 and 240:
tel-00141132, version 1 - 11 Apr 20
- Page 241 and 242:
tel-00141132, version 1 - 11 Apr 20
- Page 243 and 244:
tel-00141132, version 1 - 11 Apr 20
- Page 245 and 246:
tel-00141132, version 1 - 11 Apr 20
- Page 247 and 248:
tel-00141132, version 1 - 11 Apr 20
- Page 249 and 250:
tel-00141132, version 1 - 11 Apr 20
- Page 251 and 252:
tel-00141132, version 1 - 11 Apr 20
- Page 253 and 254:
tel-00141132, version 1 - 11 Apr 20
- Page 255 and 256:
tel-00141132, version 1 - 11 Apr 20
- Page 257 and 258:
tel-00141132, version 1 - 11 Apr 20
- Page 259 and 260:
tel-00141132, version 1 - 11 Apr 20
- Page 261 and 262:
tel-00141132, version 1 - 11 Apr 20
- Page 263 and 264:
tel-00141132, version 1 - 11 Apr 20
- Page 265 and 266:
tel-00141132, version 1 - 11 Apr 20
- Page 267:
tel-00141132, version 1 - 11 Apr 20