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Etude de capacités en couches minces à base d'oxydes métalliques ...

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tel-00141132, version 1 - 11 Apr 2007<br />

Chapitre 2 : Elaboration <strong>de</strong> films <strong>minces</strong> <strong>de</strong> STO et BTO<br />

[15] P.Y. Lesaicherre, H. Yamaguchi, Y. Miyasaka, H. Watanabe, H. Ono, M. Yoshida,<br />

SrTiO3 thin films by MOCVD for 1Gbit DRAM application, Integrated Ferroelectrics, 1995,<br />

vol8, p201-225.<br />

[16] A. Tsuzuki, K. Kato, K. Kusumoto, Y. Torii, Sr/Ti ratio <strong>de</strong>p<strong>en</strong><strong>de</strong>nce of the dielectric<br />

properties of SrTiO3 thin films prepared by sol-gel method, Journal of Materials Sci<strong>en</strong>ce<br />

Letters, 1997, vol16, p1652.<br />

[17] J.K. Lee, Y.H. Lee, K.S. Hong, J.W. Jang, Role of internal stress on room-temperature<br />

permittivity of BaTiO3 ceramics and thin films, Journal of Applied Physics, 2004, vol95,<br />

p219-225.<br />

[18] L.J. Sinnamon, R.M. Bowman, J.M. Gregg, Investigation of <strong>de</strong>ad-layer thickness in<br />

SrRuO3/Ba0.5Sr0.5TiO3/Au thin-film capacitors, Applied Physics letters, 2001, vol 78 n°12<br />

p1724-1726.<br />

[19] B.T. Lee, C.S. Hwang, Influ<strong>en</strong>ces of interfacial intrinsic low-dielectric layers on the<br />

dielectric properties of sputtered (Ba,Sr)TiO3 thin films, Applied Physics letters, 2000, vol<br />

77 n°1 p124-126.<br />

[20] K. Natori, D. Otani, N. Sano, Thickness <strong>de</strong>p<strong>en</strong><strong>de</strong>nce of the effective dielectric constant in<br />

a thin film capacitor, Applied Physics letters, 1998, vol 73 n°5 p632-634.<br />

[21] K. Uchino, Electrostrictive materials, Vibration Encyclopedia, Aca<strong>de</strong>mic Press<br />

[22] T. Schimizu, The effect of strain on the permittivity of SrTiO3 from first-principles study,<br />

Solid State Communications, 1997, vol 102, n°7, p523-527.<br />

[23] G.F. Huang, S. Berger, Combined effect of thickness and stress on ferroelectric behavior<br />

of thin BaTiO3 films, Journal of Applied Physics, 2003, vol 93, n°5, p2855-2860.<br />

[24] H.S. Wang, Y.W. Liu, K. Ma, Z.Q. P<strong>en</strong>g, D.F. Cui, H.B. Lu, Y.L. Zhou, Z.H. Ch<strong>en</strong>, L.<br />

Li, G.Z. Yang, Structural and ferroelectric properties of BaTiO3/Yba2Cu3O7 heterostructures<br />

prepared by laser molecular beam epitaxy, Physica C, 1997, vol 282-287, p699-700.<br />

[25] H.Y. Lee, C.H. Hsu, Y.W. Hsieh, Y.H. Ch<strong>en</strong>, Y.C. Liang, T.B. Wu, L.J. Chou,<br />

Preparation of heteroepitaxial LaNiO3 thin films on a SrTiO3 substrate for growing an<br />

artificial superlattice with RF sputtering, Materials Chemistry and Physics, 2005, article in<br />

press.<br />

[26] L. Li, Ferroelectric/superconductor heterostructures, Materials Sci<strong>en</strong>ce and<br />

Engineering, 2000, vol 29, p153-181.<br />

[27] J. Legrand, S. Lhostis, Y. Chang, L. Militaru, C. Lamard, A. Sibai, L. Auvray, M.<br />

Audier, J.P. Sénateur, C. Dubourdieu, F. Ducroquet, Electrical characterization of SrTiO3<br />

thin films <strong>de</strong>posited on Si(001) substrate by liquid injection MOCVD, Microelectronic<br />

Engineering, 2004, vol72, p310-314.<br />

81

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