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Radio Frequency Integrated Circuit Design - Webs

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104 <strong>Radio</strong> <strong>Frequency</strong> <strong>Integrated</strong> <strong>Circuit</strong> <strong>Design</strong><br />

Figure 5.5 Diffusion resistors: (a) diffusion resistor without well isolation (n doping); and (b)<br />

diffusion resistor with well isolation (p doping).<br />

lines is deliberate, the oxide between the two lines is thinned to increase the<br />

capacitance per unit area. This type of capacitor is called a metal-insulator-metal<br />

capacitor (MIM cap). More capacitance per unit area saves chip space. The<br />

capacitance between any two parallel-plate capacitors is given by (5.5), as discussed<br />

previously. Since this expression holds for a wide range of applied voltages,<br />

these types of capacitors are extremely linear. However, if there is too much<br />

buildup of charge between the plates, they can actually break down and conduct.<br />

This is of particular concern during the processing of wafers; thus there are<br />

often rules (called antenna rules) governing how much metal can be connected<br />

directly to the capacitors.<br />

Capacitors can also be made from two layers of poly silicon separated by<br />

a layer of dielectric. However, since poly silicon is closer to the substrate, they<br />

will therefore have more bottom-plate capacitance. A simple model for an<br />

integrated capacitor is shown in Figure 5.6.<br />

5.9 Applications of On-Chip Spiral Inductors and<br />

Transformers<br />

The use of the inductor is illustrated in Figure 5.7, in which three inductors<br />

are shown in a circuit that is connected to a supply of value VCC . A similar

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