European Patent Bulletin 2012/36 - European Patent Office

(H01L) I.1(1)
MOORE, Michael, J., Corning, New York
14830, US
(74) Greene, Simon Kenneth, Elkington and Fife
LLP 8 Pembroke Road, Sevenoaks Kent
TN13 1XR, GB
H01L 21/304 → (51) B24D 3/28
(51) H01L 21/306 (11) 2 494 589 A2*
(25) En (26) En
(21) 10769128.9 (22) 15.10.2010
(84) AL AT BE BG CH CY CZ DE DK EE ES FI FR
GB GR HR HU IE IS IT LI LT LU LV MC MK
MT NL NO PL PT RO RS SE SI SK SM TR
BA ME
(86) US 2010/052856 15.10.2010
(87) WO 2011/053470 2011/18 05.05.2011
(88) 23.02.2012
(30) 30.10.2009 US 609692
(54) SELEKTIVES SILIZIUMÄTZVERFAHREN
SELECTIVE SILICON ETCH PROCESS
PROCÉDÉ DE GRAVURE SÉLECTIVE DE
SILICIUM
(71) Sachem, Inc., 821 East Woodward, Austin,
TX 78704, US
(72) COLLINS, Sian, Austin, Texas 78759, US
WOJTCZAK, William A., Austin, Texas
78737, US
(74) 2K Patentanwälte Blasberg Kewitz & Reichel,
Partnerschaft Corneliusstraße 18, 60325
Frankfurt a. M., DE
H01L 21/314 → (51) C23C 16/54
H01L 21/336 → (51) H01L 29/78
H01L 21/336 → (51) H01L 29/786
(51) H01L 21/60 (11) 2 494 590 A2*
H01L 21/28
(25) En (26) En
(21) 10827586.8 (22) 29.10.2010
(84) AL AT BE BG CH CY CZ DE DK EE ES FI FR
GB GR HR HU IE IS IT LI LT LU LV MC MK
MT NL NO PL PT RO RS SE SI SK SM TR
(86) US 2010/054877 29.10.2010
(87) WO 2011/053880 2011/18 05.05.2011
(88) 04.08.2011
(30) 30.10.2009 US 610148
(54) HALBLEITERBAUELEMENT
SEMICONDUCTOR DEVICE
DISPOSITIF À SEMICONDUCTEUR
(71) Vishay-Siliconix, 2201 Laurelwood Road,
Santa Clara, CA 95054, US
(72) PATTANAYAK, Deva, Saratoga California
95070, US
OWYANG, King, Atherton California 94027,
US
KASEM, Mohammed, Santa Clara California
95050, US
TERRILL, Kyle, Santa Clara California 95050,
US
KATRARO, Reuven, 75324 Rishon Lezion, IL
CHEN, Kuo-In, Los Altos California 94024,
US
CHOI, Calvin, San Jose California 95134, US
CHEN, Qufei, San Jose California 95129, US
LUI, Kam Hong, Santa Clara California
95051, US
XU, Robert, Fremont California 94539, US
WONG, Ronald, Millbrae California 94030,
US
(74) Richards, John, Ladas & Parry LLP Dachauerstrasse
37, 80335 München, DE
(51) H01L 21/67 (11) 2 494 591 A1*
(25) De (26) De
(21) 09765024.6 (22) 27.11.2009
Europäisches Patentblatt
European Patent Bulletin
Bulletin européen des brevets
(84) AT BE BG CH CY CZ DE DK EE ES FI FR GB
GR HR HU IE IS IT LI LT LU LV MC MK MT
NL NO PL PT RO SE SI SK SM TR
(86) EP 2009/008455 27.11.2009
(87) WO 2011/050829 2011/18 05.05.2011
(30) 29.10.2009 DE 102009051173
(54) MODUL FÜR MODULAR AUFGEBAUTE
REINRAUMANLAGEN
MODULE FOR MODULARLY
CONSTRUCTED CLEAN-ROOM
FACILITIES
INSTALLATION DE CONSTRUCTION
MODULAIRE POUR SALLE BLANCHE
(71) Hügler, Klaus, Kirchbergstrasse 1, 73630
Remshalden, DE
(72) Hügler, Klaus, 73630 Remshalden, DE
(74) Wittner, Walter, Meissner, Bolte & Partner
Patentanwälte Am Ochsenberg 16, 73614
Schorndorf, DE
(51) H01L 21/683 (11) 2 494 592 A1*
H01L 21/687
(25) En (26) En
(21) 10781538.3 (22) 01.11.2010
(84) AL AT BE BG CH CY CZ DE DK EE ES FI FR
GB GR HR HU IE IS IT LI LT LU LV MC MK
MT NL NO PL PT RO RS SE SI SK SM TR
(86) NL 2010/050727 01.11.2010
(87) WO 2011/053145 2011/18 05.05.2011
(30) 30.10.2009 EP 09174710
(54) VERFAHREN ZUR HERSTELLUNG EINER
STÜTZSTRUKTUR
METHOD OF MAKING A SUPPORT
STRUCTURE
PROCÉDÉ DE RÉALISATION D'UNE
STRUCTURE DE SUPPORT
(71) Nederlandse Organisatie voor toegepastnatuurwetenschappelijk
onderzoek TNO,
Schoemakerstraat 97, 2628 VK Delft, NL
(72) KOSTER, Norbertus Benedictus, NL-2627 AD
Delft, NL
MEIJERINK, Marcus Gerhardus Hendrikus,
NL-2525 ZZ Den Haag, NL
TE SLIGTE, Edwin, NL-5644 ES Eindhoven,
NL
(74) Jansen, Cornelis Marinus, et al, VEREEN-
IGDE Johan de Wittlaan 7, 2517 JR Den
Haag, NL
H01L 21/687 → (51) H01L 21/683
(51) H01L 21/762 (11) 2 494 593 A1*
(25) En (26) En
(21) 10762645.9 (22) 30.09.2010
(84) AL AT BE BG CH CY CZ DE DK EE ES FI FR
GB GR HR HU IE IS IT LI LT LU LV MC MK
MT NL NO PL PT RO SE SI SK SM TR
(86) EP 2010/064604 30.09.2010
(87) WO 2011/051078 2011/18 05.05.2011
(30) 30.10.2009 FR 0957662
(54) VERFAHREN ZUR STEUERUNG DER BE-
LASTUNGSVERTEILUNG AUF EINER SOI-
STRUKTUR UND ZUGEHÖRIGE STRUK-
TUR
METHOD FOR CONTROLLING THE
DISTRIBUTION OF STRESSES IN A SEMI-
CONDUCTOR-ON-INSULATOR TYPE
STRUCTURE AND CORRESPONDING
STRUCTURE.
PROCÉDÉ DE MAÎTRISE DE LA DISTRI-
BUTION DE CONTRAINTES DANS UNE
STRUCTURE DE TYPE SEMI-CONDUC-
TEUR SUR ISOLANT ET STRUCTURE
CORRESPONDANTE
(71) Soitec, Chemin des Franques, 38190 Bernin,
FR
(72) KERDILES, Sébastien, F-38330 Saint-Ismier,
FR
REYNAUD, Patrick, F-38400 Saint Martin
D'heres, FR
193
Anmeldungen
Applications
Demandes (36/2012) 05.09.2012
(74) Branger, Jean-Yves, et al, Cabinet Regimbeau
Espace Performance Bâtiment K,
35769 Saint-Gregoire-Cedex, FR
H01L 21/822 → (51) H03K 19/096
(51) H01L 21/8234 (11) 2 494 594 A1*
H01L 21/8238 H01L 27/00
H01L 27/06 H01L 27/08
H01L 27/088 H01L 27/092
H01L 29/786 H03K 19/20
(25) En (26) En
(21) 10826485.4 (22) 29.09.2010
(84) AL AT BE BG CH CY CZ DE DK EE ES FI FR
GB GR HR HU IE IS IT LI LT LU LV MC MK
MT NL NO PL PT RO SE SI SK SM TR
(86) JP 2010/067496 29.09.2010
(87) WO 2011/052351 2011/18 05.05.2011
(30) 29.10.2009 JP 2009249328
(54) HALBLEITERBAUELEMENT
SEMICONDUCTOR DEVICE
DISPOSITIF À SEMI-CONDUCTEURS
(71) Semiconductor Energy Laboratory Co. Ltd.,
398 Hase, Atsugi-shi, Kanagawa 243-0036,
JP
(72) YAMAZAKI, Shunpei, Atsugi-shi Kanagawa
243-0036, JP
IMAI, Keitaro, Atsugi-shi Kanagawa 243-
0036, JP
KOYAMA, Jun, Atsugi-shi Kanagawa 243-
0036, JP
(74) Grünecker, Kinkeldey, Stockmair & Schwanhäusser,
Leopoldstrasse 4, 80802 München,
DE
(51) H01L 21/8234 (11) 2 494 595 A1*
H01L 27/08 H01L 27/088
H01L 29/786
(25) En (26) En
(21) 10826520.8 (22) 06.10.2010
(84) AL AT BE BG CH CY CZ DE DK EE ES FI FR
GB GR HR HU IE IS IT LI LT LU LV MC MK
MT NL NO PL PT RO RS SE SI SK SM TR
(86) JP 2010/067999 06.10.2010
(87) WO 2011/052386 2011/18 05.05.2011
(30) 30.10.2009 JP 2009250665
(54) HALBLEITERBAUELEMENT
SEMICONDUCTOR DEVICE
DISPOSITIF SEMI-CONDUCTEUR
(71) Semiconductor Energy Laboratory Co. Ltd.,
398 Hase, Atsugi-shi, Kanagawa 243-0036,
JP
(72) SHIONOIRI, Yutaka, Atsugi-shi Kanagawaken
243-0036, JP
NODA, Kosei, Atsugi-shi Kanagawa-ken 243-
0036, JP
(74) Grünecker, Kinkeldey, Stockmair & Schwanhäusser,
Leopoldstrasse 4, 80802 München,
DE
(51) H01L 21/8234 (11) 2 494 596 A1*
H01L 27/088 H01L 29/786
(25) En (26) En
(21) 10826530.7 (22) 07.10.2010
(84) AL AT BE BG CH CY CZ DE DK EE ES FI FR
GB GR HR HU IE IS IT LI LT LU LV MC MK
MT NL NO PL PT RO RS SE SI SK SM TR
(86) JP 2010/068103 07.10.2010
(87) WO 2011/052396 2011/18 05.05.2011
(30) 29.10.2009 JP 2009249330
22.01.2010 JP 2010012619
(54) HALBLEITERBAUELEMENT
SEMICONDUCTOR DEVICE
DISPOSITIF À SEMI-CONDUCTEURS
(71) Semiconductor Energy Laboratory Co. Ltd.,
398 Hase, Atsugi-shi, Kanagawa 243-0036,
JP
(72) YAMAZAKI, Shunpei, Atsugi-shi Kanagawa
243-0036, JP