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Semiconductor Equipment - Berenberg Bank

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ASML Holding NV<br />

Technology Hardware<br />

Key risks<br />

1. EUV feasibility: If ASML and Cymer fail to improve EUV light power to the<br />

required 105-watt level before mid-2014, we believe its share price will be<br />

negatively affected.<br />

In our opinion, ASML/Cymer is the only player with the capability to deliver<br />

EUV tools with the required throughput level. The Cymer acquisition further<br />

increased the likelihood of ASML achieving the 105-watt target by mid-2014.<br />

Management retained its 105-watt light source power target in Q2 and<br />

indicated that it expected to achieve 80 watts by September/October 2013.<br />

2. <strong>Semiconductor</strong> spending pause: ASML’s future success depends on how<br />

aggressive chip-makers shrink and on demand for leading-edge chips. The<br />

consumer electronics devices market has been driving demand for smaller<br />

chips in the past few years, so any slowdown in this market will affect spend.<br />

In our opinion, the consumer electronics market is unlikely to slow down in<br />

next few years due to strong demand from developing countries; however, we<br />

do expect intensified competition. Intel, Samsung, Apple and fabless players<br />

are likely to use leading-edge chip technology as a differentiation factor.<br />

Therefore the chance of chip-makers pausing investment in leading technology<br />

is very low.<br />

3. Alternative technology: EUV is now seen as the most credible method to<br />

achieve further shrinkage; however, development of other technologies such as<br />

E Beam and DSA (directed self assembly) are still ongoing.<br />

In our opinion, alternative solutions like E BEAM, DSA are unlikely to replace<br />

EUV as the cost-effective solution for printing leading-edge node. E<br />

Beam/multi-beam is currently suffering significant throughput limitations. The<br />

throughput for a single machine is less than 1wph. DSA is a method of using<br />

block copolymer material to generate a repeatable pattern. As per Gartner data,<br />

DSA has the potential to significantly reduce lithography costs, as only single<br />

patterning is needed. It may potentially be used for 14nm, but the associated<br />

cost is prohibitive.<br />

48

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