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Semiconductor Equipment - Berenberg Bank

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Suess Microtec AG<br />

Small/Mid-Cap: Technology Hardware<br />

demand could amount to around seven new tools for 2014 and 2015 (one each for<br />

the top three packaging houses ASE, Amkor and SPIL, one for IBM, one for<br />

Toshiba/Sandisk, one for Hynix and one for TSMC), which is five more than our<br />

current estimate for 2014 and 2015 combined. The maximum revenue upside is 9%<br />

and 8% for 2014 and 2015 respectively, and operating profit upside is 42% and<br />

18% respectively, as the bonder segment is likely to reach break even.<br />

The bonder division has been loss-making in the past, and has wiped out half of<br />

the group’s operating profit for the past three years. The company has indicated<br />

that revenue of €30m-40m is required to break even. In our forecast, we expect the<br />

division’s revenue to reach €29m by 2015, and the operating loss will narrow<br />

significantly from €12m in 2012 to €5.4m, driven by higher revenue levels and<br />

future cost savings from improved efficiency (€2m-€3m/year).<br />

SUSS supplies wafer bonders, coater/developers, mask aligners and exposure<br />

equipment used in the 3D integration process. It shares the market with EV Group<br />

and has a leading market share in the temporary bonders market. If 3D bonding<br />

gains traction with other IDMs over the next two years, and becomes one of the<br />

mainstream solutions in 2016/2017, we may see the risk of other big front-end<br />

players such as AMAT and TEL joining the market.<br />

EUV photomask cleaning – potential upside<br />

EUV equipment is currently viewed as the only credible path for shrinking chip<br />

size without significantly increasing the cost. Currently, the mainstream chipmakers<br />

use ArFi tools for manufacturing leading-edge chips. We expect EUV tools<br />

to be shipped in volume in 2015/2016, with annual shipments of 24 and 50<br />

respectively (see Figure 3 below).<br />

Figure 3: EUV shipment ramp-up<br />

Unit mn<br />

250<br />

Shipment by Technology<br />

200<br />

150<br />

100<br />

50<br />

0<br />

2011 2012 2013E 2014E 2015E 2016E<br />

I-Line KrF ArF Dry ArF Immersion EUV<br />

Source: Company data, <strong>Berenberg</strong> estimates<br />

Currently, photomasks are cleaned after 5,000 lithography exposures, but it is<br />

unclear how regularly EUV photomasks should be cleaned. In our opinion, the<br />

photomask division will at least maintain its current €20m-40m run-rate for the<br />

foreseeable future, although a more frequent cleaning requirement – if decided –<br />

would provide further upside.<br />

SUSS holds a 100% share of the EUV photomask cleaning equipment market. The<br />

market size is relatively small (currently €50m-60m), hence the big equipment<br />

78

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