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Semiconductor Equipment - Berenberg Bank

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ASM International NV<br />

Small/Mid-Cap: Technology Hardware<br />

3) the ramp-up in 3D NAND may drive PE CVD tool demand.<br />

Figure 3: Deposition market share<br />

100.0%<br />

90.0%<br />

80.0%<br />

70.0%<br />

60.0%<br />

50.0%<br />

40.0%<br />

30.0%<br />

20.0%<br />

10.0%<br />

0.0%<br />

2012 2011 2010 2009 2008<br />

AMAT TEL LAM/Novellus Hitachi ASMI Veeco Aixtron<br />

Source: Gartner data<br />

ALD will grow as HKMG adoption increases<br />

ASMI generates 70% of its front-end revenue from ALD equipment sales. We<br />

expect robust ALD growth due to the increased adoption of the HKMG process.<br />

The HKMG process is currently only used in some 28nm solutions but it will<br />

become mandatory for 20nm and smaller nodes, as it increases the transistor<br />

capacitance and allow chips to function with reduced power needs. The ALD<br />

process enables chip-makers to form thin films atom by atom, which enables the<br />

precise chip-manufacturing process required by advanced nodes. It offers better<br />

uniformity, surface roughness and thickness control than other solutions.<br />

Currently, Intel, TSMC and Samsung have adopted HKMG for some products.<br />

Globalfoundries has limited HKMG for 28nm, and UMC is due to ramp up<br />

HKMG 28nm in 2014 at the earliest. We expect that HKMG will be used by more<br />

logic/foundries as they scale down to 20nm and below. At the same time, HKMG<br />

layers will increase with shrinkage.<br />

We expect the ALD market to grow by a CAGR of 20% pa in next three years,<br />

versus the total deposition market grow which will grow by 6% during the same<br />

period according to Gartner’s estimates.<br />

Figure 4: ALD growth versus total deposition market<br />

$mn<br />

9,000<br />

8,000<br />

7,000<br />

6,000<br />

5,000<br />

4,000<br />

3,000<br />

2,000<br />

1,000<br />

0<br />

2009 2010 2011 2012 2013E 2014E 2015E 2016E 2017E<br />

ALD Deposition ALD/deposition<br />

12.0%<br />

10.0%<br />

8.0%<br />

6.0%<br />

4.0%<br />

2.0%<br />

0.0%<br />

Source: Gartner data, <strong>Berenberg</strong> estimates<br />

57

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