Ion Implantation and Synthesis of Materials - Studium

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240 Table <strong>of</strong> the elementselement atomicnumber(Z)isotopicmass(amu)relativeabundance16.9991 0.03817.9992 0.2atomic weight(amu)atomicdensity(atoms cm −3 )massdensity(g cm −3 )F 9 18.9984 100 18.9984032 5.38 × 10 22 1.696Ne 10 19.9924 90.51 20.1797 2.69 × 10 22 0.90120.9938 0.2721.9914 9.22Na 11 22.9898 100 22.989768 2.54 × 10 22 0.97Mg 12 23.9850 78.99 24.305 4.31 × 10 22 1.7424.9858 10.25.9826 11.01Al 13 26.9815 100 26.981539 6.03 × 10 22 2.70Si 14 27.9769 92.23 28.0855 5.00 × 10 22 2.3328.9765 4.6729.9738 3.1P 15 30.9738 100 30.973762 3.54 × 10 22 1.82S 16 31.9721 95.02 32.066 3.89 × 10 22 2.0732.9715 0.7533.9679 4.2135.9671 0.0236.9659 24.23
Appendix A 241elementatomicnumber(Z)isotopicmass(amu)relativeabundanceatomic weight(amu)atomicdensity(atoms cm −3 )massdensity(g cm −3 )Ar 18 35.9675 0.337 39.948 2.69 × 10 22 1.78437.9627 0.06339.9624 99.6K 19 38.9637 93.2581 39.0983 1.32 × 10 22 0.8640 0.011740.9618 6.7302Ca 20 39.9626 96.941 40.078 2.33 × 10 22 1.5541.9586 0.64742.9588 0.13543.9555 2.08645.9537 0.00447.9525 0.187Sc 21 44.9559 100 44.95591 4.02 × 10 22 3.0Ti 22 45.9526 8.0 47.88 5.66 × 10 22 4.5046.9518 7.347.9479 73.848.9479 5.549.9448 5.4V 23 49.9472 0.25 50.9415 6.86 × 10 22 5.850.9440 99.75
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M. Nastasi J.W. MayerIon Implantati
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To our loved ones
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xContents4 Cross-Section ..........
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Contentsxiii14.3.2 Punch-Through St
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2 1 General Features and Fundamenta
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10 1 General Features and Fundament
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12 2 Particle InteractionsThe restr
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142 Particle Interactions(a)V(r)r 0
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162 Particle InteractionsHowever, a
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182 Particle Interactionswhere the
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202 Particle Interactionsa0.8853a0L
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3 Dynamics of Binary Elastic Collis
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3.3 Kinematics of Elastic Collision
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3.4 Center-of-Mass Coordinates 27Fi
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3.4 Center-of-Mass Coordinates 29an
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3.5 Motion under a Central Force 31
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3.5 Motion under a Central Force 33
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Problems 35The reduced energy for 1
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4 Cross-Section4.1 IntroductionIn C
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4.2 Scattering Cross-Section 39unit
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4.2 Scattering Cross-Section 41Rdθ
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4.3 Energy-Transfer Cross-Section 4
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4.4 Approximation to the Energy-Tra
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Problems 47ReferencesNastasi, M., M
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5 Ion Stopping5.1 IntroductionWhen
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5.3 Nuclear Stopping 51MeV mg −1
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5.3 Nuclear Stopping 531−m1−2mC
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5.4 ZBL Nuclear Stopping Cross-Sect
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5.5 Electronic Stopping 575.5.1 Hig
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5.5 Electronic Stopping 59Table 5.1
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Problems 61Problems5.1 Calculate th
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64 6 Ion Range and Range Distributi
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78 7 Displacements and Radiation Da
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94 8 Channeling1.00.8Non-aligned Im
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96 8 ChannelingMeV ION BEAMSUBSTITU
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98 8 ChannelingThe channeling effec
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100 8 Channeling4.0Silicon2.0P (mic
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102 8 ChannelingdσσD( ψc) = ∫
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104 8 ChannelingDechanneled fractio
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106 8 ChannelingProblems8.1 Calcula
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108 9 Doping, Diffusion and Defects
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128 10 Crystallization and Regrowth
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144 11 Si Slicing and Layer Transfe
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160 12 Surface Erosion During Impla
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180 13 Ion-Induced Atomic Intermixi
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Page 200 and 201: 190 13 Ion-Induced Atomic Intermixi
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Page 247 and 248: References 237No. of implants504540
Page 249: Appendix ATable of the Elementselem
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Page 265 and 266: Appendix BPhysical constants, conve
Page 267 and 268: IndexAlpha particle 8amorphization
Page 269 and 270: Index 259differential cross-section
Page 271 and 272: Index 261layer transfer 143Lennard-
Page 273: Index 263thermodynamiceffect ion be
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