Ion Implantation and Synthesis of Materials - Studium

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246 Table <strong>of</strong> the elementselement atomicnumber(Z)isotopicmass(amu)relativeabundance108.9048 48.16atomic weight(amu)atomicdensity(atoms cm −3 )massdensity(g cm −3 )Cd 48 105.9065 1.25 112.411 4.63 × 10 22 8.65107.9042 0.89109.9030 12.49110.9042 12.80111.9028 24.13112.9044 12.22113.9034 28.73115.9048 7.49In 49 112.9041 4.3 114.82 3.83 × 10 22 7.31114.9039 95.7Sn 50 111.9048 1.113.9028 0.7 118.71 3.70 × 10 22 7.30114.9033 0.4115.9017 14.7116.9030 7.7117.6016 24.3118.9033 8.6119.9022 32.4121.9034 4.6
Appendix A 247element atomicnumber(Z)isotopicmass(amu)123.9053 5.6relativeabundanceatomic weight(amu)atomicdensity(atoms cm −3 )massdensity(g cm −3 )Sb 51 120.9038 57.3 121.75 3.30 × 10 22 6.68122.9042 42.7Te 52 119.9041 0.096 127.6 2.94 × 10 22 6.24121.9031 2.6122.9043 0.908123.9028 4.816124.9044 7.14125.9033 18.95127.9045 31.69129.9062 33.8I 53 126.9045 100 126.90447 2.33 × 10 22 4.92Xe 54 123.9061 0.10 131.29 2.70 × 10 22 5.89125.9043 0.09127.9035 1.91128.9048 26.40129.9035 4.10130.9051 21.20131.9041 26.90133.9054 10.40
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M. Nastasi J.W. MayerIon Implantati
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To our loved ones
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xContents4 Cross-Section ..........
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Contentsxiii14.3.2 Punch-Through St
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2 1 General Features and Fundamenta
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10 1 General Features and Fundament
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12 2 Particle InteractionsThe restr
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142 Particle Interactions(a)V(r)r 0
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162 Particle InteractionsHowever, a
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182 Particle Interactionswhere the
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202 Particle Interactionsa0.8853a0L
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3 Dynamics of Binary Elastic Collis
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3.3 Kinematics of Elastic Collision
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3.4 Center-of-Mass Coordinates 27Fi
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3.4 Center-of-Mass Coordinates 29an
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3.5 Motion under a Central Force 31
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3.5 Motion under a Central Force 33
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Problems 35The reduced energy for 1
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4 Cross-Section4.1 IntroductionIn C
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4.2 Scattering Cross-Section 39unit
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4.2 Scattering Cross-Section 41Rdθ
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4.3 Energy-Transfer Cross-Section 4
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4.4 Approximation to the Energy-Tra
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Problems 47ReferencesNastasi, M., M
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5 Ion Stopping5.1 IntroductionWhen
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5.3 Nuclear Stopping 51MeV mg −1
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5.3 Nuclear Stopping 531−m1−2mC
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5.4 ZBL Nuclear Stopping Cross-Sect
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5.5 Electronic Stopping 575.5.1 Hig
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5.5 Electronic Stopping 59Table 5.1
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Problems 61Problems5.1 Calculate th
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64 6 Ion Range and Range Distributi
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78 7 Displacements and Radiation Da
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94 8 Channeling1.00.8Non-aligned Im
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96 8 ChannelingMeV ION BEAMSUBSTITU
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98 8 ChannelingThe channeling effec
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100 8 Channeling4.0Silicon2.0P (mic
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102 8 ChannelingdσσD( ψc) = ∫
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104 8 ChannelingDechanneled fractio
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106 8 ChannelingProblems8.1 Calcula
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108 9 Doping, Diffusion and Defects
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128 10 Crystallization and Regrowth
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144 11 Si Slicing and Layer Transfe
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160 12 Surface Erosion During Impla
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180 13 Ion-Induced Atomic Intermixi
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194 14 Application of Ion Implantat
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Page 249 and 250: Appendix ATable of the Elementselem
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Page 265 and 266: Appendix BPhysical constants, conve
Page 267 and 268: IndexAlpha particle 8amorphization
Page 269 and 270: Index 259differential cross-section
Page 271 and 272: Index 261layer transfer 143Lennard-
Page 273: Index 263thermodynamiceffect ion be
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