Ion Implantation and Synthesis of Materials - Studium

Problems 61Problems5.1 Calculate the velocity, v, the Thomas-Fermi (Firsov) screening length, a TF ,the universal screening length, a U , and the reduced energy, ε, for 1, 10,and 100 keV B ions (Z 1 = 5, M 1 = 11) incident on Si (Z 2 = 14, M 2 = 28)and the reduced ε, for 1, 10, and 100 keV B ions (Z 1 = 5, M 1 = 11) incidenton Si (Z 2 = 14, M 2 = 28).5.2 Show that, for a proton of velocity v in a direct head-on collision with anelectron, the maximum change in velocity of the electron is 2v. What isthe change in velocity of the target proton for a head-on collision with anincident proton?5.3 Calculate the nuclear stopping cross-section, (5.7), and dE/dx| n for Cu inNi for ε = 0.1 and 1.5.4 Calculate the ZBL nuclear stopping cross-section, (5.13) for Ar in Cu forε = 0.1 and 1.5.5 In the electronic stopping high-velocity regime, what is the value ofdE/dx| e for 10 MeV Ar in Cu? Use (5.17).5.6 Calculate the electronic energy-loss factor, dE/dx| e , for 1 keV Ar incidenton Cu using (5.17).