Ion Implantation and Synthesis of Materials - Studium

xContents4 Cross-Section ............................................................................................... 374.1 Introduction ............................................................................................ 374.2 Scattering Cross-Section ........................................................................ 374.3 Energy-Transfer Cross-Section.............................................................. 424.4 Approximation to the Energy-Transfer Cross-Section .......................... 45References.............................................................................................. 47Suggested Reading................................................................................. 47Problems................................................................................................. 475 Ion Stopping ................................................................................................. 495.1 Introduction ............................................................................................ 495.2 The Energy-Loss Process....................................................................... 505.3 Nuclear Stopping.................................................................................... 515.4 ZBL Nuclear Stopping Cross-Section.................................................... 545.5 Electronic Stopping................................................................................ 565.5.1 High-Energy Electronic Energy Loss........................................... 575.5.2 Low-Energy Electronic Energy Loss............................................ 585.6 Stopping Calculations Using SRIM....................................................... 60References.............................................................................................. 60Suggested Reading................................................................................. 60Problems................................................................................................. 616 Ion Range and Range Distribution............................................................... 636.1 Range Concepts...................................................................................... 636.2 Range Distributions................................................................................ 656.3 Calculations............................................................................................ 676.3.1 Range Approximations ................................................................. 676.3.2 Projected Range ............................................................................ 686.3.3 Range Straggling........................................................................... 706.3.4 Polyatomic Targets ....................................................................... 716.4 Range Distributions from SRIM ............................................................ 72References.............................................................................................. 74Suggested Reading................................................................................. 75Problems................................................................................................. 757 Displacements and Radiation Damage......................................................... 777.1 Introduction ............................................................................................ 777.2 Radiation Damage and Displacement Energy ....................................... 777.3 Displacements Produced by a Primary Knock-on ................................. 797.4 Primary Knock-on Atom Damage Energy............................................. 827.5 Ion Damage Energy................................................................................ 837.6 Damage Production Rate and DPA........................................................ 857.7 Replacement Collision Sequences ......................................................... 867.8 Spikes ..................................................................................................... 867.8.1 Mean Free Path and the Displacement Spike ............................... 867.8.2 Thermal Spike............................................................................... 87