Ion Implantation and Synthesis of Materials - Studium

Problems 35The reduced energy for 1 MeV He ions is−21.5×103ε = = 0.34 × 10 .−54.6 × 10 nmThis large value of ε is consistent with the very small value of the collisiondiameter. For calculation purposes, (3.30) can be simplified and rewritten as0.0326 E(eV)ε =ZZ Z Z1/2 1/2( + )1 2 1 22/3MM2+ M1 2.(3.31)ReferencesFrench, A.P.: Newtonian Mechanics. W.W. Norton, New York (1971)Nastasi, M., Mayer, J.W., Hirvonen, J.K.: Ion–Solid Interactions: Fundamentals andApplications, chap. 3. Cambridge University Press, Cambridge (1996)Sigmund, P.: Collision theory of displacement damage, ion ranges and sputtering. Rev.Roum. Phys. 17, pp. 823, 969 and 1079 (1972)Suggested ReadingFeldman, L.C., Mayer, J.W.: Fundamentals of Surface and Thin Film Analyses. North-Holland, New York (1986)Goldstein, H.: Classical Mechanics. Addison-Wesley, Reading, MA (1959)Johnson, R.E.: Introduction to Atomic and Molecular Collisions. Plenum Press, New York(1982)Olander, D.R.: Fundamental Aspects of Nuclear Reactor Fuel Elements, chap. 17. NationalTechnical Information Service, Springfield, VA (1976)Thompson, M.W.: Defects and Radiation Damage in Metals. Cambridge University Press,Cambridge (1969)Torrens, I.M.: Interatomic Potentials. Academic, New York (1972)Symon, K.R.: Mechanics. Addison-Wesley, Reading, MA (1953)Ziegler, J.F., Biersack, J.P., Littmark, U.: The Stopping and Range of Ions in Solids.Pergamon Press, New York (1985)Problems3.1Derive the expression for the laboratory energy of the recoil nucleus.