Ion Implantation and Synthesis of Materials - Studium

72 6 Ion Range and Range Distribution6.4 Range Distributions from SRIMThe stopping and range of ions in matter can be calculated in a comprehensivecomputer program, entitled SRIM, which is co-authored by Ziegler and Biersack(http://www.srim.org/). Stopping/range tables obtained from analytical calculationsand Monte Carlo calculations of the transport and range of ions in matter(TRIM) are all given. Background information, instructions, tutorials, and legalnotices are included.As an example, Fig. 6.5 gives the SRIM output for analytically derived valuesfor an As ion implanted into Si at an implant energy of 50 keV. The output lists ionenergy, dE/dx| e (14.28 eV Å −1 ), dE/dx| n (121.6 eV Å −1 ), projected range (388 Å),longitudinal straggling (124 Å), and lateral straggling (96 Å). Only one ion energywas chosen in this case, and a complete range of energies also could have beentabulated.Fig. 6.5. SRIM output for analytical-derived values for an As ion implanted into Si at animplant energy of 50 keV