Ion Implantation and Synthesis of Materials - Studium

Michael Nastasi, PhDLaboratory Fellow and Team LeaderIon-Solid Interaction and Interface Engineering TeamLos Alamos National Laboratory, MS-K771Los Alamos NM 87545, USAE-mail: nasty@lanl.govJamesW.Mayer,PhDCenter for Solid State ScienceArizona State UniversityTempe, AZ, 85287-1704, USAE-mail: james.mayer@asu.eduLibraryofCongressControlNumber:2006930120ISBN-10 3-540-23674-0 Springer Berlin Heidelberg New YorkISBN-13 978-3-540-23674-0 Springer Berlin Heidelberg New YorkThis work is subject to copyright. All rights are reserved, whether the whole or part of the materialis concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting,reproduction on microfilm or in any other way, and storage in data banks. Duplication ofthis publication or parts thereof is permitted only under the provisions of the German Copyright Lawof September 9, 1965, in its current version, and permission for use must always be obtained fromSpringer. Violations are liable to prosecution under the German Copyright Law.Springer is a part of Springer Science+Business Media.springer.com© Springer-Verlag Berlin Heidelberg 2006The use of general descriptive names, registered names, trademarks, etc. in this publication does notimply, even in the absence of a specific statement, that such names are exempt from the relevant protectivelaws and regulations and therefore free for general use.Typesetting by the Authors and SPiCover design: design & production GmbH, HeidelbergPrinted on acid-free paper SPIN 10864147 57/3100/SPi 543210