PCT/2002/18 - World Intellectual Property Organization

18/2002
8810 PCT Gazette - Section I - Gazette du PCT 2 May/mai 2002
[DE/DE]; Reinickestrasse 8, 14612 Falkensee
(DE).
(74) LEONHARD OLGEMOELLER
FRICKE et al. / etc.; Postfach 10 09 57,
80083 Muenchen (DE).
(81) JP KR SG US.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
Published / Publiée :(c)
(51) 7 H01L 21/00
(11) WO 02/35583 (13) A1
(21) PCT/EP01/11355
(22) 1 Oct/oct 2001 (01.10.2001)
(25) en (26) en
(30) 00 123 165.3 25 Oct/oct 2000 EP
(25.10.2000)
(43) 2 May/mai 2002 (02.05.2002)
(54) ARRANGEMENT FOR TRANSPORT-
ING A SEMICONDUCTOR WAFER
CARRIER
DISPOSITIF DE TRANSPORT D’UN
SUPPORT DE PLAQUETTE A
SEMI-CONDUCTEUR
(71) INFINEON TECHNOLOGIES SC300
GMBH & CO. KG [DE/DE]; Königsbrücker
Strasse 180, 01099 Dresden (DE).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) PEITER, Martin [DE/DE]; Schanzenstrasse
17, 01097 Dresden (DE).
(74) EPPING HERMANN & FISCHER; Ridlerstrasse
55, 80339 Munich (DE).
(81) JP KR SG US.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
Published / Publiée :(c)
(51) 7 H01L 21/00
(11) WO 02/35584 (13) A1
(21) PCT/IB01/01990
(22) 24 Oct/oct 2001 (24.10.2001)
(25) en (26) en
(30) 00/13592 24 Oct/oct 2000 FR
(24.10.2000)
(43) 2 May/mai 2002 (02.05.2002)
(54) METHOD FOR PROCESSING A
WAFER OF INTEGRATED CIRCUITS
PROCEDE DE TRAITEMENT D’UNE
PLAQUETTE DE CIRCUITS INTEGRES
(71) SCHLUMBERGER SYSTEMES [FR/FR];
50, avenue Jean Jaurès, F-92120 Montrouge
(FR).
(for all designated States except / pour tous
les États désignés sauf US)
(71) SCHLUMBERGER MALCO, INC.
[US/US]; 9800 Reistertown, Owing Mills,
MD 21117 (US).
(only for / seulement pour MC)
(72, 75) ZALESKI, Olivier [FR/FR]; 25, rue
Aristide Briand, F-45240 La Ferté-Saint-
Aubin (FR).
(74) SCHLUMBERGER SYSTEMES; c/o Vincent
Yquel, 50, avenue Jean Jaurès, F-92120
Montrouge (FR).
(81) CN JP US.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
Published / Publiée :(c)
(51) 7 H01L 21/00, B24C 1/04
(11) WO 02/35585 (13) A1
(21) PCT/US01/21948
(22) 12 Jul/juil 2001 (12.07.2001)
(25) en (26) en
(30) 09/693,347 20 Oct/oct 2000 US
(20.10.2000)
(30) 09/874,950 5 Jun/juin 2001 US
(05.06.2001)
(43) 2 May/mai 2002 (02.05.2002)
(54) APPARATUS AND METHOD TO DICE
INTEGRATED CIRCUITS FROM A
WAFER USING A PRESSURIZED JET
APPAREIL ET PROCEDE PERMET-
TANT DE DECOUPER EN DES DES
CIRCUITS INTEGRES A PARTIR
D’UNE PLAQUETTE AU MOYEN
D’UN JET SOUS PRESSION
(71) LIGHTWAVE MICROSYSTEMS, INC.
[US/US]; 2911 Zanker Road, San Jose, CA
95134 (US).
(72) COLE, Robert; 3080 Three Springs Road,
Mt. Hamilton, CA 95140 (US). QUIRKE,
David, James; 3604 Reinoso Court, San Jose,
CA 95136 (US). CALKINS, Chris, P.; 5486
Don Juan Circle, San Jose, CA 95123 (US).
(74) TUROCY, GREG, AMIN & TUROCY,
LLP; 1900 East 9th Street, 24th floor, Cleveland,
OH 44114 (US).
(81) AL AM AT AU AZ BA BB BG BR BY CA
CH CN CU CZ DE DK EE ES FI GB GD GE
GH GM HR HU ID IL IN IS JP KE KG KP
KR KZ LC LK LR LS LT LU LV MD MG
MK MN MW MX NO NZ PL PT RO RU SD
SE SG SI SK SL TJ TM TR TT UA UG UZ
VN YU ZW.
(84) AP (GH GM KE LS MW MZ SD SL SZ TZ
UG ZW); EA (AM AZ BY KG KZ MD RU
TJ TM); EP (AT BE CH CY DE DK ES FI
FR GB GR IE IT LU MC NL PT SE TR); OA
(BF BJ CF CG CI CM GA GN GW ML MR
NE SN TD TG).
Published / Publiée :(c)
(51) 7 H01L 21/00
(11) WO 02/35586
(21) PCT/US01/49437
(13) A2
(22) 23 Oct/oct 2001 (23.10.2001)
(25) en (26) en
(30) 09/695,577 23 Oct/oct 2000
(23.10.2000)
US
(30) 09/803,080 8 Mar/mar 2001
(08.03.2001)
US
(43) 2 May/mai 2002 (02.05.2002)
(54) MONITORING SUBSTRATE PRO-
CESSING USING REFLECTED RADI-
ATION
SURVEILLANCE DU TRAITEMENT
DE SUBSTRATS PAR LE RAYONNE-
MENT REFLECHI
(71) APPLIED MATERIALS, INC. [US/US];
P.O. Box 450A, Santa Clara, CA 95052 (US).
(72) SUI, Zhifeng; 41706 Covington Drive, Fremont,
CA 94539 (US). SHAN, Hongqing;
1369 South Stelling Road, Cupertino, CA
95014 (US). JOHANSSON, Nils; 16450
Kennedy Road, Los Gatos, CA 95032 (US).
NOORBAKHSH, Hamid; 40327 Canyon
Heights Drive, Fremont, CA 94539 (US).
GUAN, Yu; 849 Windsor Hills Circle, San
Jose, CA 95123 (US). FRUM, Coriolan;
20870 Panorama Drive, Los Gatos, CA
95033 (US). YUAN, Jie; 1533 Prosperity
Court, San Jose, CA 95131 (US). HSIEH,
Chang-Lin; 1071 Regency Knoll Drive, San
Jose, CA 95129 (US).
(74) BERNADICOU, Michael, A. et al. / etc.;
Blakely, Sokoloff, Taylor & Zafman LLP,
17th floor, 12400 Wilshire Boulevard, Los
Angeles, CA 90025 (US).
(81) CN JP KR SG.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
(51) 7 H01L 21/02
(11) WO 02/35587
(21) PCT/JP01/09269
(13) A1
(22) 23 Oct/oct 2001 (23.10.2001)
(25) ja (26) ja
(30) 2000-323215 23 Oct/oct 2000
(23.10.2000)
JP
(30) 2001-259174 29 Aug/août 2001
(29.08.2001)
JP
(43) 2 May/mai 2002 (02.05.2002)
(54) METHOD OF PRODUCING SEMICON-
DUCTOR DEVICE AND PROCESSING
CONDITIONS SETTING DEVICE
PROCEDE DE FABRICATION D’UN
DISPOSITIF A SEMI-CONDUCTEURS
ET DISPOSITIF DE CONTROLE DES
PARAMETRES DE TRAITEMENT
(71) SONY CORPORATION [JP/JP]; 7-35, Kitashinagawa
6-chome, Shinagawa-ku, Tokyo
141-0001 (JP).
(for all designated States except / pour tous
les États désignés sauf US)
(72, 75) HIRAI, Toshiya [JP/JP]; c/o SONY
CORPORATION, 7-35, Kitashinagawa
6-chome, Shinagawa-ku, Tokyo 141-0001
(JP). YOKOO, Noboru [JP/JP]; c/o
SONY SEMICONDUCTOR KYUSHU
CORPORATION NAGASAKI TEC,
1883-43, Tsukuba-cho, Isahaya-shi, Nagasaki
854-0065 (JP). MAKITA, Masahiro
[JP/JP]; c/o SONY CORPORATION, 7-35,
Kitashinagawa 6-chome, Shinagawa-ku,
Tokyo 141-0001 (JP). HAYAKAWA,
Hideaki [JP/JP]; c/o SONY CORPO-
RATION, 7-35, Kitashinagawa 6-chome,
Shinagawa-ku, Tokyo 141-0001 (JP). YA-
MAMICHI, Yasuaki [JP/JP]; c/o SONY
SEMICONDUCTOR KYUSHU COR-
PORATION NAGASAKI TEC, 1883-43,
Tsukuba-cho, Isahaya-shi, Nagasaki
854-0065 (JP). SAKAMOTO, Akihisa
[JP/JP]; c/o SONY SEMICONDUCTOR
KYUSHU CORPORATION NAGASAKI
TEC, 1883-43, Tsukuba-cho, Isahaya-shi,
Nagasaki 854-0065 (JP).
(74) FUJISHIMA, Youichiro; 2F, Oodai Building,
9-5, Shinku 1-chome, Shinjuku-ku,
Tokyo 160-0022 (JP).
(81) KR US.