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Online proceedings - EDA Publishing Association

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7-9 October 2009, Leuven, Belgium<br />

Regarding the study of the impact of moisture absorption<br />

taken up by the package, the same package type has been Temperature (°C)<br />

measured with four different pre-conditions, as shown and<br />

250<br />

described in Table 1. For each condition, 5 samples have<br />

been measured.<br />

200<br />

TABLE I<br />

Overview of Sample Conditions for warpage measurements<br />

Condition<br />

Code<br />

Reference structure with uncontrolled<br />

“REF”<br />

history, as they were lying for more than 1<br />

year lying on the shelf (probably, they took<br />

up some moisture)<br />

Reference structure dried for 3 days at<br />

“DRY”<br />

120°C<br />

Reference structure humidified in a<br />

“WET1”<br />

humidity chamber, for 168h at 85°C and<br />

85% humidity.<br />

Reference structure humidified in a pressure “WET2”<br />

cooker chamber, for 18h at 120°C and 100%<br />

humidity.<br />

B. Measurement setup<br />

The measurements were done with the Topography and<br />

Deformation Measurement (TDM) System from Insidix<br />

[4,5]. The out-of-plane measurements use the principle of<br />

the projection moiré technique to measure the topography as<br />

the difference between a reference horizontal surface and the<br />

measured surface. This reference surface is a calibration tool<br />

that is perfectly flat and homogeneous white and is measured<br />

beforehand. The outcome of one measurement is the out-ofplane<br />

profile, as shown in Fig. 3.<br />

The warpage is then defined as the difference in out-ofplane<br />

displacement between the center and the corner<br />

(not the difference in z-height!).<br />

150<br />

100<br />

50<br />

0<br />

0 5 10 15 20 25<br />

Time (min)<br />

Fig. 4: Temperature profile applied to PBGA sample for the<br />

topography measurement<br />

C. Measurement result for a “DRY” sample<br />

The first experiment presented in this paper is the warpage<br />

profile measurement for a dry sample. Fig. 6 shows the outof-plane<br />

profile for this package at 22°C and at 227°C (=<br />

maximum reflow temperature). At 22°C, the warpage is<br />

almost zero, while at 227°C, the warpage is visibly high.<br />

Z-height (µm)<br />

1800<br />

1600<br />

1400<br />

1200<br />

1000<br />

800<br />

600<br />

400<br />

200<br />

0<br />

227°C<br />

22°C<br />

0 10 20 30 40 50<br />

Distance from one corner (mm)<br />

Fig. 5: Out-of-plane profile (topography) measured by INSIDIX<br />

equipment (along the diagonal).<br />

Fig. 3: Topography measurement of the PBGA package<br />

B. Temperature loading profile<br />

A typical reflow temperature profile has been applied for<br />

this package, with a maximum of 227°C. The heating is<br />

performed by IR camera’s, while the temperature is<br />

measured using a thermo-couple touching the BGA sample.<br />

The warpage has been measured at different temperatures,<br />

both in heating and cooling. The result for this sample is<br />

shown in Fig. 6. At room temperature, there is a small<br />

warpage of about 50 µm (corners bending downwards). This<br />

warpage is almost constant up to 170°C. Above this<br />

temperature, the warpage substantially change and the corner<br />

start to bend downwards. This reason is that the glass<br />

transition for the overmould is reached, resulting in a high<br />

CTE mismatch between the overmould and the BT (while<br />

they are quite well matched below 170°C). As a<br />

consequence, the corners start to warp downwardsn and this<br />

becomes very high at maximum temperature (450µm).<br />

©<strong>EDA</strong> <strong>Publishing</strong>/THERMINIC 2009 114<br />

ISBN: 978-2-35500-010-2

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