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Superconducting Technology Assessment - nitrd

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Potential for Scaling and Associated Challenges<br />

Figure 3 compares the estimated cell size for standard (1T-1MTJ) MRAM, SMT MRAM using a single minimum-sized<br />

read/program transistor per cell, and NOR Flash. SMT devices have been demonstrated, but integrated SMT MRAM<br />

circuits have not, so that curve assumes technical progress that enables this dense architecture. The solid lines for<br />

the other two technologies indicate the goals and the dashed lines indicate how the cell size might scale if current<br />

known challenges are not completely overcome.<br />

0.1<br />

0.01<br />

-------------------------------------------<br />

Standard<br />

MRAM<br />

SMT MRAM<br />

FLASH<br />

NOR<br />

30 40 50 60 70 80 90<br />

Figure 3. Estimated cell sizes for the two MRAM technologies compared to NOR Flash for IC technology nodes from 90nm to 32nm. Dashed lines<br />

indicate possible limitations to scaling if some materials and magnetic process challenges remain unresolved.<br />

Scaling MRAM to these future technology generations requires continued improvement in controlling the micromagnetics<br />

of these small bits and the MTJ material quality. The challenges are more difficult for SMT MRAM due<br />

to the smaller bit size required to take advantage of the smaller cell, and the need for increased SMT efficiency to<br />

enable switching at lower current densities. These differences will put more stringent requirements on the in<br />

trinsic reliability and on the quality of the tunnel barrier for SMT devices. Since the SMT technology is less mature<br />

than standard MRAM, it also will be necessary to consider multiple device concepts, material stacks, and corresponding<br />

SMT-MRAM architectures, so that optimal solutions can be identified.<br />

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