Superconducting Technology Assessment - nitrd

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Lynn A. Abelson received the B.S. degree in geology
from University of California, Berkeley, in
1981 and the M.S. and Ph.D. degrees in geology
from the California Institute of Technology,
Pasadena, CA, in 1984 and 1988, respectively.
She was at the Xerox Microelectronics Center,
El Segundo, CA, working in CMOS process
integration. She has been Manager of Northrop
Grumman Space Technology’s (formerly TRW)
superconductor electronics integrated circuit
fabrication effort for more than 12 years.
Her research interests include integrated circuit fabrication, statistical
process control, and manufacturing technology. She holds four patents in
TRW’s niobium and niobium nitride process technology and has over 25
publications.
George L. Kerber received the B.S. and M.S. degrees
in physics from California State University,
Fresno, in 1972 and 1973, respectively, and the
Master of Engineering degree from the University
of California, Berkeley, in 1975.
From 1975 to 1982, he worked at the Naval
Ocean Systems Center, San Diego, CA, on the
fabrication of various thin-film devices including
surface acoustic wave filters and variable thickness
microbridges for superconducting quantum
interference device (SQUID) magnetometers.
From 1983 to 1987, he worked for a startup company in San Diego, where
he was responsible for the development of sensors and instrumentation for
production oil well logging and drilling tools. In 1987, he joined Hughes
Aircraft Company, Carlsbad, CA to work on niobium nitride integrated
circuit fabrication, and from 1990 to 1994, he was responsible for process
integration of several CMOS and biCMOS technologies. From 1994 to
2004, he worked at Northrop Grumman Space Technology (formerly
TRW), Redondo Beach, CA, and was responsible for the development and
process integration of niobium nitride and niobium-based superconductor
integrated circuits. He is currently a Consultant, San Diego, CA. He has 14
patents and more than 25 publications.
ABELSON AND KERBER: SUPERCONDUCTOR INTEGRATED CIRCUIT FABRICATION TECHNOLOGY 1533