Etude de capacités en couches minces à base d'oxydes métalliques ...

tel-00141132, version 1 - 11 Apr 2007
Chapitre 3 : Etude de capacités MIM à base de STO et BTO
[15] X. Fu, J. Li, Z. Song, X. Zhu, C. Lin, Preparation of highly (100)-oriented PLCT thin
films on Pt/Ti/SiO2/Si substrates by a simple sol–gel process, Materials Letters, 2000, vol
44, n°2, p70-74.
[16] K. Sumi, H. Qiu, H. Kamei, S. Moriya, M. Murai, M. Shimada, T. Nishiwaki, K. Takei,
S. Miyashita, M. Hashimoto, Thickness dependence of structural and ferroelectric properties
of sol-gel Pb(Zr0.56Ti0.44)0.90(Mg1/3Nb2/3)0.10O3 films, Thin Solid Films, 1998, vol 330, n°2,
p183-189.
[17] J. Kim, L. Kim, D. Jung, Y. S. Kim, I. W. Kim, Thickness dependent dielectric property
of BaTiO3/SrTiO3 artificial lattice, Japanese Journal of Applied Physics, 2003, vol42,
p5901-5903.
[18] J. K. Lee, Y. H. Lee, K. S. Hong, J. W. Jang, Role of internal stress on room temperature
permittivity of BaTiO3 ceramics and thin films, Journal of Applied Physics, 2004, vol95,
n°1, p219-225.
[19] T. Schimizu, The effect of strain on the permittivity of SrTiO3 from first-principles study,
Solid State Communications, 1997, vol 102, n°7, p523-527.
134