Etude de capacités en couches minces à base d'oxydes métalliques ...

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tel-00141132, version 1 - 11 Apr 2007 Annexes BTO Annexe 2 : Conditions expérimentales de dépôt de STO et BTO Facteurs Expériences STO Expériences T (°C) VIAD (V) IIAD (mA) VCP (V) ICP (mA) Débit O2 (sccm) Durée dépôt Référence dépôt 1 25 200 40 1200 140 0 1h DBTO-211 2 25 400 20 1200 140 50 1h DBTO-212 3 25 400 20 1400 70 0 1h DBTO-213 4 25 200 40 1400 70 50 1h DBTO-214 5 87,5 300 30 1300 105 25 1h DBTO-215 6 150 400 40 1200 70 0 1h DBTO-216 7 150 200 20 1200 70 50 1h DBTO-217 8 87,5 300 30 1300 105 25 1h DBTO-218 9 150 200 20 1400 140 0 1h DBTO-219 10 150 400 40 1400 140 50 1h DBTO-220 11 87,5 300 30 1300 105 25 1h DBTO-221 Facteurs T (°C) VCP (V) ICP (mA) Débit O2 (sccm) Durée dépôt Référence dépôt 1 87,5 1460 115 25 28min35s DSTO-311 2 87,5 1460 115 25 28min35s DSTO-312 3 25 1800 160 0 18min30s DSTO-313 4 150 1800 70 0 43min45s DSTO-314 5 25 1800 70 50 43min45s DSTO-315 6 150 1800 160 50 18min30s DSTO-316 7 87,5 1460 115 25 28min35s DSTO-317 8 25 1125 70 0 37min30s DSTO-318 9 150 1125 160 0 16min30s DSTO-319 10 25 1125 160 50 16min30s DSTO-320 11 150 1125 70 50 37min30s DSTO-321 12 87,5 1460 115 25 28min35s DSTO-322 13 87,5 1460 115 25 28min35s DSTO-323 250
tel-00141132, version 1 - 11 Apr 2007 Annexes Annexe 3 : Fiches JCPDS Fiche JCPDS-ICDD du titanate de strontium en phase cubique : Fiche JCPDS-ICDD du titanate de baryum dans la phase quadratique : 251
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