Bulletin 2009/07 - European Patent Office
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(C23C) II.1(1)<br />

(51) C23C 14/18 (11) 1 425 431 B1<br />

C23C 14/34 H01L 27/24<br />

(25) En (26) En<br />

(21) 02766168.5 (22) 30.08.2002<br />

(84) AT BE BG CH CY CZ DE DK EE ES FI FR GB<br />

GR IE IT LI LU MC NL PT SE SK TR<br />

(43) 09.06.2004<br />

(86) US 2002/027526 30.08.2002<br />

(87) WO 2003/020998 2003/11 13.03.2003<br />

(30) 30.08.2001 US 943426<br />

(54) • INTEGRIERTES SCHALTUNGSELEMENT<br />

UND HERSTELLUNG MIT METALLDO-<br />

TIERTEN CHALKOGENID-MATERIALIEN<br />

• INTEGRATED CIRCUIT DEVICE AND FAB-<br />

RICATION USING METAL-DOPED CHAL-<br />

COGENIDE MATERIALS<br />

• COMPOSANT DE CIRCUIT INTEGRE ET SA<br />

FABRICATION AU MOYEN DE MATERIAUX<br />

DE CHALCOGENURE A DOPAGE METAL-<br />

LIQUE<br />

(73) Micron Technology, Inc., 8000 South Federal<br />

Way, P.O. Box 6, Boise, ID 837<strong>07</strong>-0006, US<br />

(72) LI, Jiutao, Boise, ID 83716, US<br />

MCTEER, Allen, Meridian, ID 83642, US<br />

(74) Collins, John David, Marks & Clerk 90 Long<br />

Acre, London WC2E 9RA, GB<br />

(60) <strong>07</strong>006928.1 / 1 801 898<br />

C23C 14/24 → (51) C23C 14/56<br />

(51) C23C 14/34 (11) 1 518 599 B1<br />

C23C 14/14 B01J 20/32<br />

B01J 20/02<br />

(25) En (26) En<br />

(21) 04425406.8 (22) 01.06.2004<br />

(84) AT BE BG CH CY CZ DE DK EE ES FI FR GB<br />

GR HU IE IT LI LU MC NL PL PT RO SE SI SK<br />

TR<br />

(43) 30.03.2005<br />

(30) 11.06.2003 IT MI20031178<br />

(54) • Nicht-verdampfbare Getter-Vielschicht-<br />

Abscheidungen erhalten durch kathodische<br />

Abscheidung und Verfahren zu deren Herstellung<br />

• Non-evaporable getter multilayer deposits<br />

obtained by cathodic deposition and process<br />

for their manufacturing<br />

• Dépôts multicouche de getter non evaporable<br />

obtenu par déposition cathodique et<br />

procédé de fabrication<br />

(73) SAES GETTERS S.p.A., Viale Italia, 77,<br />

20020 Lainate (Milano), IT<br />

(72) Conte, Andrea, 20154 Milano MI, IT<br />

Moraja, Marco, 20161 Milano MI, IT<br />

(74) Adorno, Silvano, et al, c/o SOCIETA' ITALI-<br />

ANA BREVETTI S.p.A. Via Carducci, 8, 20123<br />

Milano, IT<br />

C23C 14/34 → (51) C23C 14/18<br />

(51) C23C 14/56 (11) 1 091 017 B1<br />

C23C 14/24 C23C 16/44<br />

(25) En (26) En<br />

(21) 00303310.7 (22) 19.04.2000<br />

(84) DE FR GB<br />

(43) 11.04.2001<br />

(30) 19.04.1999 US 293965<br />

(54) • Beschichtungsanlage mit Innenoberfläche<br />

mit einer reflektierenden Schicht<br />

• Coating apparatus having reflective inside<br />

coating<br />

• Appareillage de revêtement avec une<br />

surface intérieure munie d'une couche<br />

réfléchissante<br />

(73) GENERAL ELECTRIC COMPANY, 1 River<br />

Road, Schenectady, NY 12345, US<br />

(72) Stowell, William Randolph, Rising Sun,<br />

Indiana 47040, US<br />

Europäisches <strong>Patent</strong>blatt<br />

<strong>European</strong> <strong>Patent</strong> <strong>Bulletin</strong><br />

<strong>Bulletin</strong> européen des brevets<br />

Conner, Jeffrey Allen, Hamilton, Ohio 45011,<br />

US<br />

Ackerman, John Frederick, Laramie, Wyoming<br />

82<strong>07</strong>0, US<br />

Evans, John Douglas, Sr., Springfield, Ohio<br />

45502, US<br />

Maricocchi Antonio Frank, Loveland, Ohio<br />

45140, US<br />

(74) Pedder, James Cuthbert, et al, London<br />

<strong>Patent</strong> Operation, General Electric International,<br />

Inc., 15 John Adam Street, London<br />

WC2N 6LU, GB<br />

C23C 16/02 → (51) C08J 7/04<br />

(51) C23C 16/06 (11) 1 651 793 B1<br />

C23C 16/44 C23C 16/448<br />

(25) En (26) En<br />

(21) 0482<strong>07</strong>15.3 (22) 01.<strong>07</strong>.2004<br />

(84) AT BE BG CH CY CZ DE DK EE ES FI FR GB<br />

GR HU IE IT LI LU MC NL PL PT RO SE SI SK<br />

TR<br />

(43) 03.05.2006<br />

(86) US 2004/021341 01.<strong>07</strong>.2004<br />

(87) WO 2005/060383 2005/27 <strong>07</strong>.<strong>07</strong>.2005<br />

(30) 03.<strong>07</strong>.2003 US 613620<br />

(54) • EINFACHES CVD-SYSTEM UND VERFAH-<br />

REN ZUR ABSCHEIDUNG VON MULTIME-<br />

TALLALUMINIDÜBERZÜGEN<br />

• SIMPLE CHEMICAL VAPOR DEPOSITION<br />

SYSTEM AND METHODS FOR DEPOSIT-<br />

ING MULTIPLE-METAL ALUMINIDE<br />

COATINGS<br />

• SYSTEME DE DEPOT CHIMIQUE EN<br />

PHASE VAPEUR SIMPLE ET PROCEDES<br />

POUR DEPOSER PLUSIEURS REVETE-<br />

MENTS D'ALUMINIURE DE METAL<br />

(73) Aeromet Technologies, Inc., 679 W. Sandy<br />

Parkway, Sandy, UT 84<strong>07</strong>0, US<br />

(72) FAIRBOURN, David, C., Sandy, UT 84093,<br />

US<br />

(74) Findlay, Alice Rosemary, Reddie & Grose 16<br />

Theobalds Road, London WC1X 8PL, GB<br />

C23C 16/08 → (51) H01J 37/32<br />

(51) C23C 16/30 (11) 1 022 354 B1<br />

C23C 16/40<br />

G02B 1/10<br />

B05D 7/24<br />

(25) De (26) De<br />

(21) 99124999.6<br />

(84) DE ES FR GB IT<br />

(22) 15.12.1999<br />

LT LV MK RO SI<br />

(43) 26.<strong>07</strong>.2000<br />

(30) 19.01.1999 DE 19901834<br />

(54) • Verfahren zum Beschichten von Substraten<br />

aus Kunststoff<br />

• Process for coating plastic substrates<br />

• Procédé de revêtement de substrats en<br />

matière plastique<br />

(73) Oerlikon Deutschland Holding GmbH, Sendlinger<br />

Strasse 7, 80331 München, DE<br />

(72) Grünwald, Heinrich, Dr., 61194 Niddatal, DE<br />

Schulte, Thomas, 63450 Hanau, DE<br />

Nauenburg, Klaus, Dr., 63456 Hanau, DE<br />

Dicken, Wilfried, 636<strong>07</strong> Wächtersbach, DE<br />

Beckmann, Rudolf, Dr., 63454 Hanau, DE<br />

(74) Heine-Kempkens, Claus, OC Oerlikon Balzers<br />

AG <strong>Patent</strong>abteilung Iramali 18, 9496 Balzers,<br />

LI<br />

(60) <strong>07</strong>022469.6<br />

C23C 16/30 → (51) C23C 16/40<br />

C23C 16/34 → (51) C23C 16/40<br />

(51) C23C 16/40 (11) 1 633 904 B1<br />

C23C 16/34 C23C 16/30<br />

552<br />

<strong>Patent</strong>e<br />

<strong>Patent</strong>s<br />

Brevets (<strong>07</strong>/<strong>2009</strong>) 11.02.<strong>2009</strong><br />

H01L 21/316<br />

(25) En (26) En<br />

(21) 04733869.4 (22) 19.05.2004<br />

(84) AT BE BG CH CY CZ DE DK EE ES FI FR GB<br />

GR HU IE IT LI LU MC NL PL PT RO SE SI SK<br />

TR<br />

(43) 15.03.2006<br />

(86) IB 2004/001642 19.05.2004<br />

(87) WO 2004/108985 2004/51 16.12.2004<br />

(30) 05.06.2003 US 476273 P<br />

27.10.2003 US 514757 P<br />

13.05.2004 US 844579<br />

(54) • VERFAHREN ZUR HERSTELLUNG ALUMI-<br />

NIUMHALTIGER FILME MITTELS AMINO-<br />

ALUMINIUM PRECURSOREN<br />

• METHODS FOR FORMING ALUMINUM<br />

CONTAINING FILMS UTILIZING AMINO<br />

ALUMINUM PRECURSORS<br />

• PROCEDES DE FORMATION DE COUCHES<br />

A BASE D'ALUMINIUM A L'AIDE DE<br />

PRECURSEURS AMINO-ALUMINES<br />

(73) L'AIR LIQUIDE, Société Anonyme pour<br />

l'Etude et l'Exploitation des Procédés<br />

Georges Claude, 75, quai d'Orsay, 750<strong>07</strong><br />

Paris, FR<br />

(72) JURSICH, Gregory, M., Clarendon Hills, IL<br />

60514, US<br />

INMAN, Ronald, S., Lyons, IL 60534, US<br />

(74) Vesin, Jacques, L'Air Liquide S.A. Service<br />

Propriété Industrielle, 75 Quai d'Orsay,<br />

75321 Paris Cedex <strong>07</strong>, FR<br />

C23C 16/40 → (51) C23C 16/30<br />

C23C 16/44 → (51) C23C 14/56<br />

C23C 16/44 → (51) C23C 16/06<br />

C23C 16/448 → (51) C23C 16/06<br />

C23C 16/448 → (51) H01J 37/32<br />

C23C 16/455 → (51) H01J 37/32<br />

(51) C23C 18/08 (11) 0 976 848 B1<br />

C<strong>07</strong>F 19/00 C<strong>07</strong>F 15/00<br />

(25) Ja (26) En<br />

(21) 98953055.5 (22) 13.11.1998<br />

(84) DE GB IT<br />

(43) 02.02.2000<br />

(86) JP 1998/005139 13.11.1998<br />

(87) WO 1999/027159 1999/22 03.06.1999<br />

(30) 26.11.1997 JP 36380397<br />

(54) • METALLZUSAMMENSETZUNG MIT ACE-<br />

TYLID, DAMIT METALLISCH BESCHICH-<br />

TETER ROHLING UND VERFAHREN ZUR<br />

BESCHICHTUNG<br />

• METAL COMPOSITION CONTAINING<br />

METAL ACETILIDE, BLANK HAVING<br />

METALLIC COATING FORMED THERE-<br />

WITH, AND METHOD FOR FORMING THE<br />

METALLIC COATING<br />

• COMPOSITION METALLIQUE CONTENANT<br />

UN ACETYLURE DE METAL, EBAUCHE<br />

DOTEE D'UN REVETEMENT METALLIQUE<br />

FORME A L'AIDE DE LADITE COMPOSI-<br />

TION ET PROCEDE DE FORMATION DUDIT<br />

REVETEMENT METALLIQUE<br />

(73) Daiken Chemical Co. Ltd., 7-19, Hanatennishi<br />

2-chome, Joto-ku, Osaka-shi, Osaka<br />

536-0011, JP<br />

(72) HARADA, Akio, Daiken Chemical Co., Ltd.,<br />

Osaka-shi, Osaka 536-011, JP<br />

OKAMOTO, Yoshiki, Daiken Chemical Co.,<br />

Ltd., Osaka-shi, Osaka 536-0011, JP<br />

(74) Schickedanz, Willi, et al, Langener Strasse<br />

68, 63<strong>07</strong>3 Offenbach, DE

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