Pneumatic Clean Series

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Clean Series/Common Precautions 3Be sure to read before handling.Refer to the main text for precautions for each series.12CautionIn case of a vacuum type (Series 11- / Series 13-), performvacuum suction at the vacuum port to retain the particlegeneration grade.The optimum suction rate varies among series and sizes. Refer tothe following table for guidelines. (The vacuum pressure may beapproximately -13kPa to -27kPa around the vacuum port.) ConsultSMC for other types and models.Vacuum Flow Rate of Vacuum Types(Reference value)Series Model Bore size (mm) Suction flow rate (l/min(ANR))Air cylinderCompact cylinderMini free mountcylinderFree mountcylinderSine cylinderDual rod cylinder(Compact type)Dual rodcylinderCompactcylinder with guideRotary actuatorRotary tableAir gripperAir slide table11-CJ211-CM211-CG111-CQS11-CQ211-CUJ11-CU11-REC11-CXSJ11-CXSL13-MGPL11-CRA111-MSQ11-MHZ211-MHR2Æ311-MHL213-MXS,MXQ11-MXP,MXPJ6¿10, ¿16¿20 to ¿40¿20 to ¿40¿50, ¿63¿12 to ¿25¿32, ¿40¿50, ¿63¿6, ¿8¿10¿6¿10¿16 to ¿25¿20¿25 to ¿40¿6¿10¿6¿10¿15¿20, ¿25¿32¿12 to ¿25¿32, ¿40¿50 to ¿63size30size50Size10 to Size50¿10¿16¿20¿25Size10 to Size30¿10 to ¿32¿6 to ¿12¿16¿20¿25¿6¿10¿12¿16121020551023610121271525101520510101511122102512351346Front matter 10
131 Clean Series Basic SpecificationsDischarges Particles Out ofThe Clean RoomAir Cylinder/Rotary Actuator/Air GripperAny external leakage is exhausted outside theclean room through the relief port.Prevents Particle GenerationCylinder with Guide/Rodless CylinderSpecial treatment on the guide and sliding partprevents grease scattering.Relief portSpecial treatmentSpecial treatmentActuatorRelief portSpecial treatmentSolenoidValveSolenoid ValveCommon exhaust mechanismallows air from the pilot valveto be exhausted outsidethe clean room.RegulatorBreathing air is exhaustedoutside the clean roomthrough the relief port.ReliefportClean RegulatorExcellent corrosion resistance dueto use of stainless steel for all fluidcontact parts and electrolyticaluminum on external metal parts.Air LineEquipmentAir FilterDrainage is exhaustedoutside the clean roomthrough the drain guide.Clean Gas FilterThe PTFE membraneelement enablesprecision filtering.Drain guideFittings&TubingClean One-touch FittingsPrevents sliding and reduces particle generationby holding cushion and fixing packing. Blow typeis completely oil free and uses non-metal materialfor fluid contact areas.Clean TubingPolyolefine resinFront matter 11
Page 1 and 2: 1SMC Corporation1-16-4 Shimbashi, M
Page 5 and 6: 5PageAir Line Equipment 431Flow Con
Page 7 and 8: Air CylinderSeries CJ2Air CylinderS
Page 9 and 10: 9Safety InstructionsThese safety in
Page 11: Clean Series/Common Precautions 2Be
Page 15 and 16: 153 How to Use Clean SeriesThe posi
Page 17 and 18: 174 Particle Generation Measuring M
Page 19 and 20: Front matter 1819
Page 21 and 22: 21Actuator/Common Precautions 1Be s
Page 23 and 24: 23Actuator/Common Precautions 3Be s
Page 25 and 26: 25Auto Switch/Common Precautions 2B
Page 27 and 28: SeriesHow to Order10-11-CJ2Air Cyli
Page 29 and 30: øCAir Cylinder 10-CJ2/11-CJ229Basi
Page 31 and 32: øCAir Cylinder 10-CJ2/11-CJ231Fron
Page 33 and 34: SeriesHow to Order10-11-CJ2WDouble
Page 35 and 36: øCAir Cylinder 10-CJ2W/11-CJ2W35Ba
Page 37 and 38: SeriesHow to Order10-11-CJ2RADirect
Page 39 and 40: SeriesHow to Order10-11-CM2Air Cyli
Page 41 and 42: øIøIAir Cylinder 10-CM2/11-CM241B
Page 43 and 44: Air Cylinder 10-CM2/11-CM243Axial F
Page 45 and 46: Air Cylinder 10-CM2/11-CM245Rear Fl
Page 47 and 48: 10-11- SeriesCM2W Double Rod Cylind
Page 49 and 50: øIAir Cylinder 10-CM2W/11-CM2W49Ba
Page 51 and 52: Series10-11-CM2RDirect Mount Cylind
Page 53 and 54: Air Cylinder 10-CM2R/11-CM2R53Speci
Page 55 and 56: Series10-11-CG1Air Cylinderø20,ø2
Page 57 and 58: 0000Air Cylinder 10-CG1/11-CG157Bas
Page 59 and 60: Air Cylinder 10-CG1/11-CG159Front F
Page 61 and 62: SeriesHow to Order10-11-CG1WDouble
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44Double Rod Cylinder 10-CG1W/11-CG
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SeriesHow to Order10-11-Clean serie
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SeriesHow to Order10-11-CUJMini Fre
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Mini Free Mount Cylinder 10-CUJ/11-
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SeriesHow to Order10-11-CUFree Moun
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Free Mount Cylinder 10-CU/11-CU7310
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SeriesHow to Order10-11-CQSCompact
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Compact Cylinder 10-CQS/11-CQS77Sta
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Compact Cylinder 10-CQS/11-CQS79Wit
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Compact Cylinder 10-CQS/11-CQS81CQS
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SeriesHow to Order10-11-CQ2Compact
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Compact Cylinder 10-CQ2/11-CQ28510-
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Compact Cylinder 10-CQ2/11-CQ28710-
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Compact Cylinder 10-CQ2/11-CQ289Mou
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Series10-CBM2How to OrderEnd Lock C
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End Lock Cylinder 10-CBM293Basic (B
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End Lock Cylinder 10-CBM295Rear Fla
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SeriesHow to Order10-11-RECSine Cyl
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Sine Cylinder 10-REC/11-REC99Dimens
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Sine Cylinder 10-REC/11-REC101Speci
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SeriesHow to Order11-12-CXSJDual Ro
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Dual Rod Cylinder/Compact Type 11-C
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SeriesHow to Order11-12-CXSLDual Ro
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Dual Rod Cylinder 11-CXSL/12-CXSL10
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SeriesHow to Order12-13-MGPLCompact
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Compact Cylinder with Guide 12-MGPL
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Series10-MGFHow to OrderGuide Table
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Guide Table 10-MGF123Dimensions10-M
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Series11-MXP/MXPJ6Air Slide Tableø
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Air Slide Table 11-MXP/MXPJ6127Dime
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Air Slide Table 11-MXP/MXPJ6133Made
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Series13-MXQHow to OrderAir Slide T
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Air Slide Table 13-MXQ137Dimensions
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Air Slide Table 13-MXQ161Constructi
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Series13-MXSAir Slide Tableø6, ø8
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Air Slide Table 13-MXS165Dimensions
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Air Slide Table 13-MXS183Constructi
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SeriesCYPClean Rodless Cylinderø15
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Clean Rodless Cylinder CYP187Dimens
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190Actuator171
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Rodless Cylinder 12-CY1B192Basic12-
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WarningCaution12-CY1BDisassembly an
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Magnetically Coupled Rodless Cylind
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Sine Rodless Cylinder 12-REA198Dime
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Low Speed Cylinder 10-CQSX/11-CQSX2
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Low Speed Cylinder 10-CQ2X/11-CQ2X2
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Low Speed Cylinder 10-CM2X/11-CM2X2
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Clean seriesRotary Actuator206Vane
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208Rotary Actuator/Common Precautio
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210Rotary Actuator191
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Rotary Actuator 10-CRB1212Specifica
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4-R5Rotary Actuator 10-CRB1214Optio
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Rotary Actuator 10-CRB1216Without A
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ø45Rotary Actuator 10-CRB1218Witho
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Vane Type Rotary Actuator 10-CRB122
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Vane Type Rotary Actuator 10-CRB122
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Rack Pinion Type Rotary Actuator 11
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Rotary Table/Rack Pinion Type 11-MS
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Clean seriesAir Gripper23211-MHZ2Pa
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234Air Gripper/Common Precautions 2
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Parallel Type Air Gripper 11-MHZ223
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Standard/Series 11-MHZ2Finger Posit
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Auto Switch SpecificationsRotary Ac
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Rotary Actuated Air Gripper 11-MHR2
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Auto Switch SpecificationsRotary Ac
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Wide Opening Parallel Type Air Grip
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Wide Opening Parallel Type Air Grip
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Clean seriesDirectional Control Val
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3/4/5 Port Solenoid Valve/Common Pr
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258Flow Characteristics of Solenoid
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Solenoid Valve 10-SZ3000260How to O
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Solenoid Valve 10-SZ3000How to Orde
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Solenoid Valve 10-SZ3000264Dimensio
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Solenoid Valve 10-SZ3000Dimensions
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ONO FSMCA4Solenoid Valve 10-SZ30002
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5 Port Solenoid Valve Plug-in Type
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Solenoid Valve 10-SY3000/5000/70002
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294Solenoid Valve 10-SY3000/5000/70
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300DirectionalControl Valve281
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Solenoid Valve 10-SY3000/5000322How
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Solenoid Valve 10-SY3000/5000324Man
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Solenoid Valve 10-SY3000/5000326Ser
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Solenoid Valve 10-SY3000/5000328Ser
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Solenoid Valve 10-SYJ3000330ModelVa
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Solenoid Valve 10-SYJ3000332Body Po
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Solenoid Valve 10-SYJ3000334Base Mo
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Solenoid Valve 10-SYJ3000338Flat Ri
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Solenoid Valve 10-SYJ3000340Type 20
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Solenoid Valve 10-SYJ5000346ModelBo
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Solenoid Valve 10-SYJ5000348Body Po
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Flat Ribbon Cable Type ManifoldSole
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Solenoid Valve 10-SY100364How to Or
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Solenoid Valve 10-SY100366Body Port
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Solenoid Valve 10-SY100368ManifoldH
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Solenoid Valve 10-SY100370Type S41
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Solenoid Valve 10-SYJ300372ModelFlo
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Approx.300Solenoid Valve 10-SYJ3003
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Solenoid Valve 10-SYJ500380ModelFlo
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Solenoid Valve 10-SYJ500382Base Mou
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Solenoid Valve 10-VQ1000/2000388How
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ModelSolenoid Valve 10-VQ1000/20003
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Solenoid Valve 10-VQ1000/2000394F K
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Solenoid Valve 10-VQ1000/2000396P K
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Solenoid Valve 10-VQ1000/2000398S K
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Solenoid Valve 10-VQ1000/2000402Mod
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Solenoid Valve 10-VQ1000/2000414Dir
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(A)(B)4 25 1 3(R1)(P)(R2)(A)(B)4 25
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Solenoid Valve 10-VQ1000/2000422F K
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Solenoid Valve 10-VQ1000/2000426C K
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Solenoid Valve 10-VQ100438JIS symbo
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Solenoid Valve 10-VQ100440Dimension
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Solenoid Valve 10-VQ100442Plug-in U
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Solenoid Valve 10-VQ100444Plug Lead
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Solenoid Valve 10-VQD448DimensionsL
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Clean SeriesAir Line Equipment450Fl
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452Flow Control Equipment/Specific
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454Clean Speed Controller with One-
Page 456 and 457:
456Air Line Equipment437
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Speed Controller with One-touch Fit
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Page 462 and 463:
462Speed Controller with One-touch
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Page 468 and 469:
Page 470 and 471:
Dual Speed Controller with One-touc
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Page 474 and 475:
Speed Controller for Low Speed Oper
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Speed Controller for Low Speed Oper
Page 478 and 479:
Dual Speed Controller for Low Speed
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Page 482 and 483:
Dual Speed Controller with One-touc
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Speed Controller 10-AS486Needle Val
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Speed Controller 10-AS488Needle Val
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Page 492 and 493:
492Air Filter, Regulator/Common Pre
Page 494 and 495:
Air Filter 10-AF494Dimensions10-AF3
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Mist Separator 10-AFM498Dimensions1
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Micro Mist Separator 10-AFD500Dimen
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Regulator 10-AR502Accessories (Opti
Page 504 and 505:
Regulator 10-AR504Dimensions10-AR40
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506Regulator 10-ARSpecific Product
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50Precision Direct Operated Regulat
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50Regulator 10-AR510Dimensions10-AR
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Regulator 10-AR512Specific Product
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50Filter Regulator 10-AW514Dimensio
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Filter Regulator 10-AW516Specific P
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Mist Separator Regulator 10-AWM518D
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Micro Mist Separator Regulator 10-A
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Precision Regulator 10-IR1000/2000/
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OUTPrecision Regulator 10-IR1000/20
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Fittings & Tube/Common Precautions
Page 534 and 535:
DimensionsClean One-touch Fittings
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Clean One-touch Fittings KP536Speci
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DimensionsMale connector: KPQH, KPG
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DimensionsElbow: KPQL, KPGL——
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Miniature One-touch Fittings 10-KJ5
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One-touch Fittings 10-KQ552ModelHex
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One-touch Fittings 10-KQ554Male Con
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One-touch Fittings 10-KQ556Male Bra
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One-touch Fittings 10-KQ558Universa
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One-touch Fittings 10-KQ560Double B
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One-touch Fittings 10-KQ562Extended
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One-touch Fittings 10-KQ564Differen
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One-touch Fittings 10-KQ566Double B
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One-touch Fittings 10-KQ568Plug-in
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One-touch Fittings Stainless Specif
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Insert Fittings 10-KF584ModelMale C
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Insert Fittings 10-KF586Bulkhead Fe
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Insert Fittings 10-KF588Swivel Elbo
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Miniature Fittings 10-M590Series Mo
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Miniature Fittings 10-M592Series M5
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Miniature Fittings 10-M594Series M5
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Stainless Miniature Fittings 10-MS5
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Stainless Miniature Fittings 10-MS5
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Rectangular Multi-connector 10-KDM6
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Rectangular Multi-connector 10-KDM6
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Series TPSClean TubingSoft Polyolef
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606Series 10-TCU Polyurethane Coil
Page 608 and 609:
Clean seriesAir Preparation Equipme
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610Air Preparation Equipment/Common
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Mist Separator 10-AM59310-AM150 to
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614Mist Separator 10-AMSpecific Pro
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Micro Mist Separator 10-AMD59710-AM
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Micro Mist Separator 10-AMD618Speci
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601Super Mist Separator 10-AMEDimen
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Super Mist Separator 10-AME622Speci
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605Odor Removal Filter 10-AMFDimens
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Odor Removal Filter 10-AMF626Specif
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DimensionsHollow Fiber Membrane Air
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Exhaust Cleaner for Clean Room AMPD
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Exhaust Cleaner for Clean Room AMP6
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Clean SeriesPressure Switch63410-PS
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636Pressure Switch (Solid State Typ
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Digital Pressure Switch 10-PSE638Di
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644Pressure Switch625
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High Precision Digital Pressure Swi
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High Precision Digital Pressure Swi
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Digital Pressure Switch with Backli
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Digital Pressure Switch with Backli
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Clean SeriesClean Regulator658Clean
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Series SRH660Flow Rate Characterist
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Series SRH662ConstructionParts list
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Series SRH664OptionsPressure GaugeP
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666Series SRHSafety InstructionsThe
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Series SRPPrecision Clean Regulator
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Precision Clean Regulator SRP670Opt
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648672
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674Series SFClean Gas Filter/Strain
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Clean Gas Filter SF676Cartridge Typ
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Clean Gas Filter SF678Disposable Ty
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Clean Gas Filter SF680Disposable Ty
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Clean Gas Filter SFSpecific Product
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660684
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686F.R. Unit Precautions 1Be sure t
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688F.R. Unit Precautions 3Be sure t
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OUTAir Filter 10-AF690Dimensions10-
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OUTMist Separator 10-AFM692Dimensio
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OUTDimensions10-AFD20 10-AFD30 to 4
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Regulator 10-AR696Dimensions10-AR20
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Regulator: Modular Type with Back F
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QOUTFilter Regulator 10-AW700Dimens
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QOUT702Filter Regulator with Back F
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OUTMist Separator Regulator 10-AWM7
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OUTMicro-Mist Separator Regulator 1
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708Alphabet IndexProduct Series Ind
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710K10-KF10-KG10-KJ10-KQPageInsert
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memo712
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memo714
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Pneumatic Clean Series

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