Pneumatic Clean Series

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710K10-KF10-KG10-KJ10-KQPageInsert Fittings ···························································· 564One-touch Fittings Stainless Specifications ······························ 552Miniature One-touch Fittings ············································· 524One-touch Fittings ······················································· 532M 10-M10-MGFP12-REA10-11- REC12-13-MGPL11-MHL211-MHR211-MHR311-MHZ210-MS11-MSQ11-MXP/11-MXPJ611-MXQ11-MXS10-PSE10010-PSE51010-PSE520Miniature Fittings ························································ 570Guide Table ····························································· 102Compact Cylinder With Guide ··········································· 98Wide Opening Parallel Type Air Gripper ································· 230Rotary Actuated Air Gripper 2 Finger Type ······························ 220Rotary Actuated Air Gripper 3 Finger Type ······························ 226Parallel Type Air Gripper ················································ 216Stainless Steel Miniature Fitting ········································· 576Rotary Table/Rack Pinion Type ········································· 210Air Slide Table ··························································· 106Air Slide Table ··························································· 116Air Slide Table ··························································· 144Controller ································································ 622High Precision Remote Type Digital Pressure Switch ·················· 618Pressure Sensor for General Fluids ····································· 620RSine Rodless Cylinder ··················································· 178Sine Cylinder ···························································· 78STVZSFASFBSFCSRHSRP10-SQ100010-SQ200010-SY10010-SY300010-SY500010-SY700010-SYJ30010-SYJ300010-SYJ50010-SYJ500010-SZ3000TPHTPS10-TCU10-TFU10-TU10-VQ10010-VQ100010-VQ200010-VQD100010-ZSE4010-ZSE5B10-ZSE6BClean Gas Filter/Disc Type ·············································· 650Clean Gas Filter/Straight Type ·········································· 652Clean Gas Filter/Multiple Disc ··········································· 656Clean Regulator ························································· 640Precision Clean Regulator ··············································· 6445 Port Solenoid Valve ··················································· 2545 Port Solenoid Valve ··················································· 2623 Port Solenoid Valve ··················································· 3245 Port Solenoid Valve ··················································· 2705 Port Solenoid Valve ··················································· 2705 Port Solenoid Valve ··················································· 2703 Port Solenoid Valve ··················································· 3524/5 Port Solenoid Valve ················································· 3103 Port Solenoid Valve ··················································· 3604/5 Port Solenoid Valve ················································· 3265 Port Solenoid Valve ··················································· 240Clean Tubing/Polyolefin Tubing ········································· 584Clean Tubing/Soft Polyolefin Tubing ····································· 585Polyurethane Coil Tubing ················································ 587Polyurethane Flat Tubing ················································ 588Polyurethane Tubing ···················································· 5863 Port Solenoid Valve ··················································· 4185 Port Solenoid Valve ··················································· 3685 Port Solenoid Valve ··················································· 3684 Port Direct Operated Poppet Solenoid Valve ·························· 428High Precision Digital Pressure Switch ·································· 626Digital Pressure Switch With Backlight ·································· 632Digital Pressure Switch With Backlight ·································· 636Supplement 3
711Revisions2nd EditionSeries Added• Actuator10- 11- 12-Series 10-CBM2, 11-REC, 12-CXSL, 13-MGPL, 10-MGF, 12-CY1B, 12-CY1R, 12-REA11-MSQ, 11-MHR2•3, 11-MHL2• Directional Control ValveSeries 10-SYJ, 10-SY100, 10-VQ100, 10-VQD1000• Air Line EquipmentSeries 10-AFM, 10-AFD, 10-ARP, 10-AWM, 10-AWD• Air Purification EquipmentSeries 10-AMD, 10-IDG• Pressure SwitchSeries 10-PSE, 10-ZSE/ISE• Clean RegulatorSeries SR• Clean Gas FilterSeries SFAddition of Safety InstructionsSeries Removed• Directional Control ValveSeries 10-VZAY3rd EditionSeries Added• Actuator10-11-10-Series11-CUJ, 12-CXSJ, 11-MXP, 11-MXPJ6, 13-MXQ, 13-MXS, CYP, 11-CQSX,10- 10-11-CQ2X, 11-CM2X, 11-MHZ2• Directional Control ValveSeries 10-SZ3000, 10-SQ1000/2000• Air Line EquipmentSeries AS-FPG/FPQ, 10-AS-FG (Universal, In-line ), 10-ASD,10-AS-FM, 10-ASD-FMSeries 10-IR1000/2000/3000Series KP/KPQ/KPG, TPH, TPS• Air Purification EquipmentSeries AMP220/320/420• Pressure SwitchSeries 10- ZSE40/ISE40• Clean RegulatorSeries SRH3000/4000, SRP1000Series Removed• Pressure SwitchSeries 10- ZSE4E/ISE4E• Clean RegulatorSeries SR1000/3000/4000EZPneumatic Clean SeriesFirst edition released in June, 1994Second edition released in November, 1996Third edition released in November, 2002Published by SMC Corporation1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPANTEL 03-3502-827150YGNote: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.
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1SMC Corporation1-16-4 Shimbashi, M
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5PageAir Line Equipment 431Flow Con
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Air CylinderSeries CJ2Air CylinderS
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9Safety InstructionsThese safety in
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Clean Series/Common Precautions 2Be
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131 Clean Series Basic Specificatio
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153 How to Use Clean SeriesThe posi
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174 Particle Generation Measuring M
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Front matter 1819
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21Actuator/Common Precautions 1Be s
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23Actuator/Common Precautions 3Be s
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25Auto Switch/Common Precautions 2B
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SeriesHow to Order10-11-CJ2Air Cyli
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øCAir Cylinder 10-CJ2/11-CJ229Basi
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øCAir Cylinder 10-CJ2/11-CJ231Fron
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SeriesHow to Order10-11-CJ2WDouble
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øCAir Cylinder 10-CJ2W/11-CJ2W35Ba
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SeriesHow to Order10-11-CJ2RADirect
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SeriesHow to Order10-11-CM2Air Cyli
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øIøIAir Cylinder 10-CM2/11-CM241B
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Air Cylinder 10-CM2/11-CM243Axial F
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Air Cylinder 10-CM2/11-CM245Rear Fl
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10-11- SeriesCM2W Double Rod Cylind
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øIAir Cylinder 10-CM2W/11-CM2W49Ba
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Series10-11-CM2RDirect Mount Cylind
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Air Cylinder 10-CM2R/11-CM2R53Speci
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Series10-11-CG1Air Cylinderø20,ø2
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0000Air Cylinder 10-CG1/11-CG157Bas
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Air Cylinder 10-CG1/11-CG159Front F
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SeriesHow to Order10-11-CG1WDouble
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44Double Rod Cylinder 10-CG1W/11-CG
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SeriesHow to Order10-11-Clean serie
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SeriesHow to Order10-11-CUJMini Fre
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Mini Free Mount Cylinder 10-CUJ/11-
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SeriesHow to Order10-11-CUFree Moun
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Free Mount Cylinder 10-CU/11-CU7310
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SeriesHow to Order10-11-CQSCompact
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Compact Cylinder 10-CQS/11-CQS77Sta
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Compact Cylinder 10-CQS/11-CQS79Wit
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Compact Cylinder 10-CQS/11-CQS81CQS
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SeriesHow to Order10-11-CQ2Compact
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Compact Cylinder 10-CQ2/11-CQ28510-
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Compact Cylinder 10-CQ2/11-CQ28710-
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Compact Cylinder 10-CQ2/11-CQ289Mou
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Series10-CBM2How to OrderEnd Lock C
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End Lock Cylinder 10-CBM293Basic (B
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End Lock Cylinder 10-CBM295Rear Fla
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SeriesHow to Order10-11-RECSine Cyl
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Sine Cylinder 10-REC/11-REC99Dimens
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Sine Cylinder 10-REC/11-REC101Speci
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SeriesHow to Order11-12-CXSJDual Ro
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Dual Rod Cylinder/Compact Type 11-C
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SeriesHow to Order11-12-CXSLDual Ro
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Dual Rod Cylinder 11-CXSL/12-CXSL10
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SeriesHow to Order12-13-MGPLCompact
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Compact Cylinder with Guide 12-MGPL
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Series10-MGFHow to OrderGuide Table
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Guide Table 10-MGF123Dimensions10-M
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Series11-MXP/MXPJ6Air Slide Tableø
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Air Slide Table 11-MXP/MXPJ6127Dime
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Air Slide Table 11-MXP/MXPJ6133Made
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Series13-MXQHow to OrderAir Slide T
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Air Slide Table 13-MXQ137Dimensions
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Air Slide Table 13-MXQ161Constructi
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Series13-MXSAir Slide Tableø6, ø8
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Air Slide Table 13-MXS165Dimensions
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Air Slide Table 13-MXS183Constructi
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SeriesCYPClean Rodless Cylinderø15
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Clean Rodless Cylinder CYP187Dimens
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190Actuator171
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Rodless Cylinder 12-CY1B192Basic12-
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WarningCaution12-CY1BDisassembly an
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Magnetically Coupled Rodless Cylind
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Sine Rodless Cylinder 12-REA198Dime
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Low Speed Cylinder 10-CQSX/11-CQSX2
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Low Speed Cylinder 10-CQ2X/11-CQ2X2
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Low Speed Cylinder 10-CM2X/11-CM2X2
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Clean seriesRotary Actuator206Vane
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208Rotary Actuator/Common Precautio
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210Rotary Actuator191
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Rotary Actuator 10-CRB1212Specifica
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4-R5Rotary Actuator 10-CRB1214Optio
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Rotary Actuator 10-CRB1216Without A
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ø45Rotary Actuator 10-CRB1218Witho
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Vane Type Rotary Actuator 10-CRB122
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Vane Type Rotary Actuator 10-CRB122
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Rack Pinion Type Rotary Actuator 11
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Rotary Table/Rack Pinion Type 11-MS
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Clean seriesAir Gripper23211-MHZ2Pa
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234Air Gripper/Common Precautions 2
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Parallel Type Air Gripper 11-MHZ223
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Standard/Series 11-MHZ2Finger Posit
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Auto Switch SpecificationsRotary Ac
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Rotary Actuated Air Gripper 11-MHR2
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Auto Switch SpecificationsRotary Ac
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Wide Opening Parallel Type Air Grip
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Wide Opening Parallel Type Air Grip
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Clean seriesDirectional Control Val
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3/4/5 Port Solenoid Valve/Common Pr
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258Flow Characteristics of Solenoid
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Solenoid Valve 10-SZ3000260How to O
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Solenoid Valve 10-SZ3000How to Orde
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Solenoid Valve 10-SZ3000264Dimensio
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Solenoid Valve 10-SZ3000Dimensions
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ONO FSMCA4Solenoid Valve 10-SZ30002
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5 Port Solenoid Valve Plug-in Type
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Solenoid Valve 10-SY3000/5000/70002
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294Solenoid Valve 10-SY3000/5000/70
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300DirectionalControl Valve281
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Solenoid Valve 10-SY3000/5000322How
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Solenoid Valve 10-SY3000/5000324Man
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Solenoid Valve 10-SY3000/5000326Ser
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Solenoid Valve 10-SY3000/5000328Ser
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Solenoid Valve 10-SYJ3000330ModelVa
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Solenoid Valve 10-SYJ3000332Body Po
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Solenoid Valve 10-SYJ3000334Base Mo
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Solenoid Valve 10-SYJ3000338Flat Ri
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Solenoid Valve 10-SYJ3000340Type 20
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Solenoid Valve 10-SYJ5000346ModelBo
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Solenoid Valve 10-SYJ5000348Body Po
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Flat Ribbon Cable Type ManifoldSole
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Solenoid Valve 10-SY100364How to Or
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Solenoid Valve 10-SY100366Body Port
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Solenoid Valve 10-SY100368ManifoldH
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Solenoid Valve 10-SY100370Type S41
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Solenoid Valve 10-SYJ300372ModelFlo
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Approx.300Solenoid Valve 10-SYJ3003
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Solenoid Valve 10-SYJ500380ModelFlo
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Solenoid Valve 10-SYJ500382Base Mou
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Solenoid Valve 10-VQ1000/2000388How
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ModelSolenoid Valve 10-VQ1000/20003
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Solenoid Valve 10-VQ1000/2000394F K
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Solenoid Valve 10-VQ1000/2000396P K
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Solenoid Valve 10-VQ1000/2000398S K
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Solenoid Valve 10-VQ1000/2000402Mod
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Solenoid Valve 10-VQ1000/2000414Dir
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(A)(B)4 25 1 3(R1)(P)(R2)(A)(B)4 25
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Solenoid Valve 10-VQ1000/2000422F K
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Solenoid Valve 10-VQ1000/2000426C K
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Solenoid Valve 10-VQ100438JIS symbo
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Solenoid Valve 10-VQ100440Dimension
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Solenoid Valve 10-VQ100442Plug-in U
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Solenoid Valve 10-VQ100444Plug Lead
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Page 448 and 449:
Solenoid Valve 10-VQD448DimensionsL
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Clean SeriesAir Line Equipment450Fl
Page 452 and 453:
452Flow Control Equipment/Specific
Page 454 and 455:
454Clean Speed Controller with One-
Page 456 and 457:
456Air Line Equipment437
Page 458 and 459:
Speed Controller with One-touch Fit
Page 460 and 461:
Page 462 and 463:
462Speed Controller with One-touch
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Page 468 and 469:
Page 470 and 471:
Dual Speed Controller with One-touc
Page 472 and 473:
Page 474 and 475:
Speed Controller for Low Speed Oper
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Speed Controller for Low Speed Oper
Page 478 and 479:
Dual Speed Controller for Low Speed
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Page 482 and 483:
Dual Speed Controller with One-touc
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Page 486 and 487:
Speed Controller 10-AS486Needle Val
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Speed Controller 10-AS488Needle Val
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Page 492 and 493:
492Air Filter, Regulator/Common Pre
Page 494 and 495:
Air Filter 10-AF494Dimensions10-AF3
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Mist Separator 10-AFM498Dimensions1
Page 500 and 501:
Micro Mist Separator 10-AFD500Dimen
Page 502 and 503:
Regulator 10-AR502Accessories (Opti
Page 504 and 505:
Regulator 10-AR504Dimensions10-AR40
Page 506 and 507:
506Regulator 10-ARSpecific Product
Page 508 and 509:
50Precision Direct Operated Regulat
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50Regulator 10-AR510Dimensions10-AR
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Regulator 10-AR512Specific Product
Page 514 and 515:
50Filter Regulator 10-AW514Dimensio
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Filter Regulator 10-AW516Specific P
Page 518 and 519:
Mist Separator Regulator 10-AWM518D
Page 520 and 521:
Page 522 and 523:
Micro Mist Separator Regulator 10-A
Page 524 and 525:
Page 526 and 527:
Precision Regulator 10-IR1000/2000/
Page 528 and 529:
OUTPrecision Regulator 10-IR1000/20
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Page 532 and 533:
Fittings & Tube/Common Precautions
Page 534 and 535:
DimensionsClean One-touch Fittings
Page 536 and 537:
Clean One-touch Fittings KP536Speci
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DimensionsMale connector: KPQH, KPG
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DimensionsElbow: KPQL, KPGL——
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Miniature One-touch Fittings 10-KJ5
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Page 552 and 553:
One-touch Fittings 10-KQ552ModelHex
Page 554 and 555:
One-touch Fittings 10-KQ554Male Con
Page 556 and 557:
One-touch Fittings 10-KQ556Male Bra
Page 558 and 559:
One-touch Fittings 10-KQ558Universa
Page 560 and 561:
One-touch Fittings 10-KQ560Double B
Page 562 and 563:
One-touch Fittings 10-KQ562Extended
Page 564 and 565:
One-touch Fittings 10-KQ564Differen
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One-touch Fittings 10-KQ566Double B
Page 568 and 569:
One-touch Fittings 10-KQ568Plug-in
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Page 572 and 573:
One-touch Fittings Stainless Specif
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Page 582 and 583:
Page 584 and 585:
Insert Fittings 10-KF584ModelMale C
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Insert Fittings 10-KF586Bulkhead Fe
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Insert Fittings 10-KF588Swivel Elbo
Page 590 and 591:
Miniature Fittings 10-M590Series Mo
Page 592 and 593:
Miniature Fittings 10-M592Series M5
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Miniature Fittings 10-M594Series M5
Page 596 and 597:
Stainless Miniature Fittings 10-MS5
Page 598 and 599:
Stainless Miniature Fittings 10-MS5
Page 600 and 601:
Rectangular Multi-connector 10-KDM6
Page 602 and 603:
Rectangular Multi-connector 10-KDM6
Page 604 and 605:
Series TPSClean TubingSoft Polyolef
Page 606 and 607:
606Series 10-TCU Polyurethane Coil
Page 608 and 609:
Clean seriesAir Preparation Equipme
Page 610 and 611:
610Air Preparation Equipment/Common
Page 612 and 613:
Mist Separator 10-AM59310-AM150 to
Page 614 and 615:
614Mist Separator 10-AMSpecific Pro
Page 616 and 617:
Micro Mist Separator 10-AMD59710-AM
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Micro Mist Separator 10-AMD618Speci
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601Super Mist Separator 10-AMEDimen
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Super Mist Separator 10-AME622Speci
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605Odor Removal Filter 10-AMFDimens
Page 626 and 627:
Odor Removal Filter 10-AMF626Specif
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DimensionsHollow Fiber Membrane Air
Page 630 and 631:
Exhaust Cleaner for Clean Room AMPD
Page 632 and 633:
Exhaust Cleaner for Clean Room AMP6
Page 634 and 635:
Clean SeriesPressure Switch63410-PS
Page 636 and 637:
636Pressure Switch (Solid State Typ
Page 638 and 639:
Digital Pressure Switch 10-PSE638Di
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Page 642 and 643:
Page 644 and 645:
644Pressure Switch625
Page 646 and 647:
High Precision Digital Pressure Swi
Page 648 and 649:
High Precision Digital Pressure Swi
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Page 652 and 653:
Digital Pressure Switch with Backli
Page 654 and 655:
Page 656 and 657:
Digital Pressure Switch with Backli
Page 658 and 659:
Clean SeriesClean Regulator658Clean
Page 660 and 661: Series SRH660Flow Rate Characterist
Page 662 and 663: Series SRH662ConstructionParts list
Page 664 and 665: Series SRH664OptionsPressure GaugeP
Page 666 and 667: 666Series SRHSafety InstructionsThe
Page 668 and 669: Series SRPPrecision Clean Regulator
Page 670 and 671: Precision Clean Regulator SRP670Opt
Page 672 and 673: 648672
Page 674 and 675: 674Series SFClean Gas Filter/Strain
Page 676 and 677: Clean Gas Filter SF676Cartridge Typ
Page 678 and 679: Clean Gas Filter SF678Disposable Ty
Page 680 and 681: Clean Gas Filter SF680Disposable Ty
Page 682 and 683: Clean Gas Filter SFSpecific Product
Page 684 and 685: 660684
Page 686 and 687: 686F.R. Unit Precautions 1Be sure t
Page 688 and 689: 688F.R. Unit Precautions 3Be sure t
Page 690 and 691: OUTAir Filter 10-AF690Dimensions10-
Page 692 and 693: OUTMist Separator 10-AFM692Dimensio
Page 694 and 695: OUTDimensions10-AFD20 10-AFD30 to 4
Page 696 and 697: Regulator 10-AR696Dimensions10-AR20
Page 698 and 699: Regulator: Modular Type with Back F
Page 700 and 701: QOUTFilter Regulator 10-AW700Dimens
Page 702 and 703: QOUT702Filter Regulator with Back F
Page 704 and 705: OUTMist Separator Regulator 10-AWM7
Page 706 and 707: OUTMicro-Mist Separator Regulator 1
Page 708 and 709: 708Alphabet IndexProduct Series Ind
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Pneumatic Clean Series

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