Pneumatic Clean Series

Series 10-ZSE6B/ISE6BDigital Pressure Switchwith Backlight655How to OrderClean seriesPiping specificationsA2 — URJ 1/4 ∗B2 — TSJ 1/4 ∗∗ URJ 1/4 is equivalent to VCR.TSJ 1/4 is equivalent to Swagelok.Be careful that VCR and Swagelok arespecial fittings for semiconductor equipment.For Vacuum10 - ZSE6B - A2 - 27 L-MPositive Pressure10 - ISE6B - B2 - 67 L-MOutput specifications26 —Analog output(1 to 5V)27 —NPN open collector (2 outputs)67 —PNP open collector (2 outputs)Lead wire lengthL — 3mUnit specificationsNil—With unit conversion functionM —Fixed SI unit ∗∗)Fixed unit for vacuum pressure or compound pressure: kPaFor positive pressure: MPaPart number of panel mounting adapter(Panel adapter A + Panel adapter B + Mounting bracket)ZS-22-EPanel adapter A ·········ZS-22-03Panel adapter B ·········ZS-22-02Mounting bracket ·······ZS-22-04ZS-22-DM3 tapping screw 4 pcsOption bracketModelFor vacuumPositivepressureModelZSE6B--26LZSE6B--27LZSE6B--67LISE6B--26LISE6B--27LISE6B--67LOutput typeAnalog outputSwitch 2 outputAnalog outputSwitch 2 outputOutput specifications1 to 5V(5%F.S.)NPN open collector 30V, 80mAPNP open collector, 80mA1 to 5V(5%F.S.)NPN open collector 30V, 80mAPNP open collector, 80mAPanel adapter APanel adapter BSpecificationsMounting bracketModelVacuum10-ZSE6BPositive pressure10-ISE6BSet pressure range –100 to 100kPa –0.1 to 1MPaMax. operating pressure 200kPa1.5MPaLeak quantity1 X 10 -5 Pam 3 /skPa2 —MPa— 0.01mmHg10 —kgf/cm 20.02 0.1PSI0.2 1bar0.02 0.1Indicator light Lights up when ON (OUT1: Green OUT2: Red)Response frequency200Hz (5ms)Variable(2digit or more) Variable(3digit or more)hysteresis modeNote1)HysteresisFix (2digit)Fix (3digit)Windowcomparator modeMin. display unitNote1) Hysteresis modeIn case of ZSE: The hysteresis is automatically set to 2 digits against the set value of P1 if thevalues of P1 and P2 are equal or P1>P2 applies with 2 digits or less hysteresis.In case of ISE: The hysteresis is automatically set to 3 digits against the set value of P1 if thevalues of P1 and P2 are equal or P1>P2 applies with 3 digits or less hysteresis.Window comparator modeIn case of ZSE: Set P1 and P2 5 digits or more apart because the hysteresis is 2 digits.In case of ISE: Set P1 and P2 7 digits or more apart because the hysteresis is 3 digits.∗1 digit refers to the minimum unit of pressure indication (See the above table).FluidFluids that will not corrode SUS304, SUS630Temperature characteristics±3%F.S. or lessRepeatability±1%F.S. or lessOperating voltage12 to 24VDC (Ripple10% or less)Current consumption45mA or lessEmergency display Indicator light: Red lightening, Error display on LCDPressure indication 3 1/2 digit LED (Height of character 10 mm)Self diagnosis function (Over current Note2) ), Excess pressure, Data error, Presence of pressure at the time of zero clearOperating temperature range 0 to 50°C(With no condensation)Noise resistance500Vp-p, Pulse width 1µS, Rise 1nSWithstand voltage Measured with 50 VDC megger meter 250VAC 50/60Hz 1 minuteInsulation resistance Measured with 50 VDC megger meter 2MΩ(Measured with 50 VDC megameter)Vibration resistanceShock resistanceWeightPort sizeEnclosureNote 2) Not available with analog output types.1.5 mm amplitude in 10 to 500 Hz or acceleration of 98 m/s 2 ,whichever is smaller for 2 h in X, Y, Z direction each980m/s 2 in X, Y, Z direction,3 times each126g (Including 3m lead wire)A2: URJ1/4, B2: TSJ1/4IP40636