Pneumatic Clean Series

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One-touch Fittings 10-KQ558Universal Female Elbow: 10-KQVFM5RApplicabletubing O.D.mm4681012ConnectionthreadsRcRM5 X 0.81/8M5 X 0.81/81/41/81/43/81/43/83/81/2Model10-KQVF04-M510-KQVF04-01S10-KQVF06-M510-KQVF06-01S10-KQVF06-02S10-KQVF08-01S10-KQVF08-02S10-KQVF08-03S10-KQVF10-02S10-KQVF10-03S10-KQVF12-03S10-KQVF12-04SH(Hex.)Note)øD2øD1810.414814 12.8179.813.49.813.417.6L120.52223.524.52517 17.6 28.515.222 25.2 29.519 20.618.5 31.522 25.222 25.2 3420.924 27 35L21115.512.515.520172025.52224.524.525.5L32029.52029.538.53138.545.54145.545.550A ∗ M Weightg1625.51625.532.52732.53935393942161718.5∗Reference dimensions of R thread after being screwed in.Note) øD1 indicates the maximum diameter.21226197193629376648687093M5RFemale Elbow: 10-KQLFM5RApplicable Connectiontubing O.D. threadsmm Rc4681012M5 X 0.8M6 X 1.01/81/4M5 X 0.8M6 X 1.01/81/43/81/81/43/81/43/81/21/43/81/2Model10-KQLF04-M510-KQLF04-M610-KQLF04-0110-KQLF04-0210-KQLF06-M510-KQLF06-M610-KQLF06-0110-KQLF06-0210-KQLF06-0310-KQLF08-0110-KQLF08-0210-KQLF08-0310-KQLF10-0210-KQLF10-0310-KQLF10-0410-KQLF12-0210-KQLF12-0310-KQLF12-04H(Hex.)814178141719141719171924171924Effective areaNote)WeightøD2 L1 L2 M mm 2øD1gUrethane rubber10.414.583.5 515.518.5 162113104.224.52081553.516612.8 20.5 22 17132310 25.59.026201615.2 12 23.5 26.5 18.52714.9 222318.5 172814.92726.5 28.5 2125.032.54629.520.9 17 28.5 30 22 39.7293448Note) øD1 indicates the maximum diameter.M5RAir Line EquipmentDouble Universal Elbow: 10-KQVDApplicabletubing O.D.mm4681012ConnectionthreadsR1/81/43/81/81/43/81/81/43/81/21/43/81/21/43/81/2Model10-KQVD04-01S10-KQVD04-02S10-KQVD04-03S10-KQVD06-01S10-KQVD06-02S10-KQVD06-03S10-KQVD08-01S10-KQVD08-02S10-KQVD08-03S10-KQVD08-04S10-KQVD10-02S10-KQVD10-03S10-KQVD10-04S10-KQVD12-02S10-KQVD12-03S10-KQVD12-04SH Note)øD2(Hex.) øD1L1L218.514 10.4 13.4 22 21.51723.518.51412.8 13.4 24.5 21.51741444641444648515216 13.417 13.423.521192415.2 17.6 28.518.5 15.925 45.52128.5 55.5 47.526.5 58 5221 18.5 20.6 31.5 27.5 5930.5 62535421 19.228.5 64.5 58.511826 20.9 25.2 34 29.5 65.5 59 22 21.6 11332.5 68.5 60125L3A ∗3738403738404445∗Reference dimensions of R thread after being screwed in.Note) øD1 indicates the maximum diameter.MPWeightg23294224304253516082717491539
One-touch Fittings 10-KQ559Triple Universal Male Elbow: 10-KQVTApplicable Connectiontubing O.D. threadsmm R46810121/81/43/81/81/43/81/81/43/81/21/43/81/21/43/81/2ModelH Note)øD2(Hex.) øD1L110-KQVT04-01S18.5 54.5 50.5291410-KQVT04-02S 10.4 13.4 22 21.5 57.5 51.5 16 13.4 3410-KQVT04-03S 1723.5 59.5 53.54810-KQVT06-01S18.5 54.5 50.5311410-KQVT06-02S 12.8 13.4 24.5 21.5 57.5 51.5 17 13.4 3710-KQVT06-03S 1723.5 59.5 53.55010-KQVT08-01S21 64 607110-KQVT08-02S 1924 67 616615.2 17.6 28.518.5 15.910-KQVT08-03S25 68 61.57510-KQVT08-04S 2128.5 71.5 63.59610-KQVT10-02S26.5 77.5 71.59410-KQVT10-03S 21 18.5 20.6 31.5 27.5 78.5 72 21 19.210-KQVT10-04S30.5 81.5 73.511110-KQVT12-02S28.5 86 8015310-KQVT12-03S 26 20.9 25.2 34 29.5 87 80.5 22 21.6 14210-KQVT12-04S32.5 90 82154∗Reference dimensions of R thread after being screwed in.Note) øD1 indicates the maximum diameter.L2L3A ∗MPWeightgBranch Universal Elbow: 10-KQZM5RApplicabletubing O.D.mm4681012ConnectionthreadsHModel øD2 L1 L2 L3 A(Hex.)∗Effective M5Note)M Parea mm 2 WeightøD1Polyurethane gtubing10-KQZ04-M59.8 19.5 11 18.5 153.4 88 10.416 10.410-KQZ04-01S13.4 21 14.5 26.5 22.54.7 1610-KQZ06-01S 8 13.4 22 14.5 26.5 22.51710-KQZ06-02S 12.819.5 35.5 29.5 17 12.8 8.6 3914 20.6 25.510-KQZ06-03S20.5 36.5 304710-KQZ08-01S15.5 28.5 24.52712 17.6 2610-KQZ08-02S 15.218.5 31.5 25.5 18.5 15.2 14.2 3310-KQZ08-03S 14 20.6 27 20.5 36.5 3049 R10-KQZ10-02S19.5 35.5 29.54614 18.5 20.6 2921 18.5 22.610-KQZ10-03S20.5 36.5 305410-KQZ12-03S22 39 32.57117 20.9 25.2 32.522 20.9 35.310-KQZ12-04S25 42 3488RM5 X 0.81/81/81/43/81/81/43/81/43/83/81/2∗Reference dimensions of R thread after being screwed in.Note) øD1 indicates the maximum diameter.Branch Universal Male Elbow: 10-KQZFM5RApplicable Connectiontubing O.D.threadsRmm Rc4681012ModelH Note)øD2(Hex.) øD1L1L2L3A ∗MPWeightgM5 X 0.8 10-KQZF04-M5 8 9.8 19.5 11 20 16.5 810.416 10.41/8 10-KQZF04-01S 14 13.4 21 15.5 29.5 25.5 211/8 10-KQZF06-01S 14 13.4 22 15.5 29.5 25.5 2112.817 12.81/4 10-KQZF06-02S 19 20.6 25.5 22 41 35 471/8 10-KQZF08-01S 17 17.6 25.5 17 31 27 3215.218.5 15.21/4 10-KQZF08-02S 19 20.6 27 22 41 35 491/4 10-KQZF10-02S 19 20.6 29 22 41 35 5418.521 18.53/8 10-KQZF10-03S 22 25.2 31.5 24.5 45.5 39 743/8 10-KQZF12-03S 22 25.2 32.5 24.5 45.5 39 7720.922 20.91/2 10-KQZF12-04S 24 27 33 25 50 42 101 R∗Reference dimensions of R thread after being screwed in.Note) øD1 indicates the maximum diameter.M5540
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1SMC Corporation1-16-4 Shimbashi, M
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5PageAir Line Equipment 431Flow Con
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Air CylinderSeries CJ2Air CylinderS
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9Safety InstructionsThese safety in
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Clean Series/Common Precautions 2Be
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131 Clean Series Basic Specificatio
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153 How to Use Clean SeriesThe posi
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174 Particle Generation Measuring M
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Front matter 1819
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21Actuator/Common Precautions 1Be s
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23Actuator/Common Precautions 3Be s
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25Auto Switch/Common Precautions 2B
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SeriesHow to Order10-11-CJ2Air Cyli
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øCAir Cylinder 10-CJ2/11-CJ229Basi
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øCAir Cylinder 10-CJ2/11-CJ231Fron
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SeriesHow to Order10-11-CJ2WDouble
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øCAir Cylinder 10-CJ2W/11-CJ2W35Ba
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SeriesHow to Order10-11-CJ2RADirect
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SeriesHow to Order10-11-CM2Air Cyli
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øIøIAir Cylinder 10-CM2/11-CM241B
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Air Cylinder 10-CM2/11-CM243Axial F
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Air Cylinder 10-CM2/11-CM245Rear Fl
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10-11- SeriesCM2W Double Rod Cylind
Page 49 and 50:
øIAir Cylinder 10-CM2W/11-CM2W49Ba
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Series10-11-CM2RDirect Mount Cylind
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Air Cylinder 10-CM2R/11-CM2R53Speci
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Series10-11-CG1Air Cylinderø20,ø2
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0000Air Cylinder 10-CG1/11-CG157Bas
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Air Cylinder 10-CG1/11-CG159Front F
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SeriesHow to Order10-11-CG1WDouble
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44Double Rod Cylinder 10-CG1W/11-CG
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SeriesHow to Order10-11-Clean serie
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SeriesHow to Order10-11-CUJMini Fre
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Mini Free Mount Cylinder 10-CUJ/11-
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SeriesHow to Order10-11-CUFree Moun
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Free Mount Cylinder 10-CU/11-CU7310
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SeriesHow to Order10-11-CQSCompact
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Compact Cylinder 10-CQS/11-CQS77Sta
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Compact Cylinder 10-CQS/11-CQS79Wit
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Compact Cylinder 10-CQS/11-CQS81CQS
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SeriesHow to Order10-11-CQ2Compact
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Compact Cylinder 10-CQ2/11-CQ28510-
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Compact Cylinder 10-CQ2/11-CQ28710-
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Compact Cylinder 10-CQ2/11-CQ289Mou
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Series10-CBM2How to OrderEnd Lock C
Page 93 and 94:
End Lock Cylinder 10-CBM293Basic (B
Page 95 and 96:
End Lock Cylinder 10-CBM295Rear Fla
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SeriesHow to Order10-11-RECSine Cyl
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Sine Cylinder 10-REC/11-REC99Dimens
Page 101 and 102:
Sine Cylinder 10-REC/11-REC101Speci
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SeriesHow to Order11-12-CXSJDual Ro
Page 105 and 106:
Dual Rod Cylinder/Compact Type 11-C
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SeriesHow to Order11-12-CXSLDual Ro
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Dual Rod Cylinder 11-CXSL/12-CXSL10
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Page 115 and 116:
Page 117 and 118:
SeriesHow to Order12-13-MGPLCompact
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Compact Cylinder with Guide 12-MGPL
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Series10-MGFHow to OrderGuide Table
Page 123 and 124:
Guide Table 10-MGF123Dimensions10-M
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Series11-MXP/MXPJ6Air Slide Tableø
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Air Slide Table 11-MXP/MXPJ6127Dime
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Page 131 and 132:
Page 133 and 134:
Air Slide Table 11-MXP/MXPJ6133Made
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Series13-MXQHow to OrderAir Slide T
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Air Slide Table 13-MXQ137Dimensions
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Page 161 and 162:
Air Slide Table 13-MXQ161Constructi
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Series13-MXSAir Slide Tableø6, ø8
Page 165 and 166:
Air Slide Table 13-MXS165Dimensions
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Page 183 and 184:
Air Slide Table 13-MXS183Constructi
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SeriesCYPClean Rodless Cylinderø15
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Clean Rodless Cylinder CYP187Dimens
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190Actuator171
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Rodless Cylinder 12-CY1B192Basic12-
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WarningCaution12-CY1BDisassembly an
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Magnetically Coupled Rodless Cylind
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Sine Rodless Cylinder 12-REA198Dime
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Low Speed Cylinder 10-CQSX/11-CQSX2
Page 202 and 203:
Low Speed Cylinder 10-CQ2X/11-CQ2X2
Page 204 and 205:
Low Speed Cylinder 10-CM2X/11-CM2X2
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Clean seriesRotary Actuator206Vane
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208Rotary Actuator/Common Precautio
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210Rotary Actuator191
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Rotary Actuator 10-CRB1212Specifica
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4-R5Rotary Actuator 10-CRB1214Optio
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Rotary Actuator 10-CRB1216Without A
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ø45Rotary Actuator 10-CRB1218Witho
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Vane Type Rotary Actuator 10-CRB122
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Vane Type Rotary Actuator 10-CRB122
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Rack Pinion Type Rotary Actuator 11
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Rotary Table/Rack Pinion Type 11-MS
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Clean seriesAir Gripper23211-MHZ2Pa
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234Air Gripper/Common Precautions 2
Page 236 and 237:
Parallel Type Air Gripper 11-MHZ223
Page 238 and 239:
Standard/Series 11-MHZ2Finger Posit
Page 240 and 241:
Auto Switch SpecificationsRotary Ac
Page 242 and 243:
Rotary Actuated Air Gripper 11-MHR2
Page 244 and 245:
Page 246 and 247:
Auto Switch SpecificationsRotary Ac
Page 248 and 249:
Page 250 and 251:
Wide Opening Parallel Type Air Grip
Page 252 and 253:
Wide Opening Parallel Type Air Grip
Page 254 and 255:
Clean seriesDirectional Control Val
Page 256 and 257:
3/4/5 Port Solenoid Valve/Common Pr
Page 258 and 259:
258Flow Characteristics of Solenoid
Page 260 and 261:
Solenoid Valve 10-SZ3000260How to O
Page 262 and 263:
Solenoid Valve 10-SZ3000How to Orde
Page 264 and 265:
Solenoid Valve 10-SZ3000264Dimensio
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Page 268 and 269:
Solenoid Valve 10-SZ3000Dimensions
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ONO FSMCA4Solenoid Valve 10-SZ30002
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Page 274 and 275:
5 Port Solenoid Valve Plug-in Type
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Solenoid Valve 10-SY3000/5000/70002
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294Solenoid Valve 10-SY3000/5000/70
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300DirectionalControl Valve281
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Solenoid Valve 10-SY3000/5000322How
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Solenoid Valve 10-SY3000/5000324Man
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Solenoid Valve 10-SY3000/5000326Ser
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Solenoid Valve 10-SY3000/5000328Ser
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Solenoid Valve 10-SYJ3000330ModelVa
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Solenoid Valve 10-SYJ3000332Body Po
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Solenoid Valve 10-SYJ3000334Base Mo
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Solenoid Valve 10-SYJ3000338Flat Ri
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Solenoid Valve 10-SYJ3000340Type 20
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Solenoid Valve 10-SYJ5000346ModelBo
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Solenoid Valve 10-SYJ5000348Body Po
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Flat Ribbon Cable Type ManifoldSole
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Solenoid Valve 10-SY100364How to Or
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Solenoid Valve 10-SY100366Body Port
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Solenoid Valve 10-SY100368ManifoldH
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Solenoid Valve 10-SY100370Type S41
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Solenoid Valve 10-SYJ300372ModelFlo
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Approx.300Solenoid Valve 10-SYJ3003
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Solenoid Valve 10-SYJ500380ModelFlo
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Solenoid Valve 10-SYJ500382Base Mou
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Solenoid Valve 10-VQ1000/2000388How
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ModelSolenoid Valve 10-VQ1000/20003
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Solenoid Valve 10-VQ1000/2000394F K
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Solenoid Valve 10-VQ1000/2000396P K
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Solenoid Valve 10-VQ1000/2000398S K
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Solenoid Valve 10-VQ1000/2000402Mod
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Solenoid Valve 10-VQ1000/2000414Dir
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(A)(B)4 25 1 3(R1)(P)(R2)(A)(B)4 25
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Solenoid Valve 10-VQ1000/2000422F K
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Solenoid Valve 10-VQ1000/2000426C K
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Solenoid Valve 10-VQ100438JIS symbo
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Solenoid Valve 10-VQ100440Dimension
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Solenoid Valve 10-VQ100442Plug-in U
Page 444 and 445:
Solenoid Valve 10-VQ100444Plug Lead
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Page 448 and 449:
Solenoid Valve 10-VQD448DimensionsL
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Clean SeriesAir Line Equipment450Fl
Page 452 and 453:
452Flow Control Equipment/Specific
Page 454 and 455:
454Clean Speed Controller with One-
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456Air Line Equipment437
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Speed Controller with One-touch Fit
Page 460 and 461:
Page 462 and 463:
462Speed Controller with One-touch
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Page 468 and 469:
Page 470 and 471:
Dual Speed Controller with One-touc
Page 472 and 473:
Page 474 and 475:
Speed Controller for Low Speed Oper
Page 476 and 477:
Speed Controller for Low Speed Oper
Page 478 and 479:
Dual Speed Controller for Low Speed
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Page 482 and 483:
Dual Speed Controller with One-touc
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Page 486 and 487:
Speed Controller 10-AS486Needle Val
Page 488 and 489:
Speed Controller 10-AS488Needle Val
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Page 492 and 493:
492Air Filter, Regulator/Common Pre
Page 494 and 495:
Air Filter 10-AF494Dimensions10-AF3
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Page 498 and 499:
Mist Separator 10-AFM498Dimensions1
Page 500 and 501:
Micro Mist Separator 10-AFD500Dimen
Page 502 and 503:
Regulator 10-AR502Accessories (Opti
Page 504 and 505:
Regulator 10-AR504Dimensions10-AR40
Page 506 and 507:
506Regulator 10-ARSpecific Product
Page 508 and 509: 50Precision Direct Operated Regulat
Page 510 and 511: 50Regulator 10-AR510Dimensions10-AR
Page 512 and 513: Regulator 10-AR512Specific Product
Page 514 and 515: 50Filter Regulator 10-AW514Dimensio
Page 516 and 517: Filter Regulator 10-AW516Specific P
Page 518 and 519: Mist Separator Regulator 10-AWM518D
Page 520 and 521: 520Air Line Equipment501
Page 522 and 523: Micro Mist Separator Regulator 10-A
Page 526 and 527: Precision Regulator 10-IR1000/2000/
Page 528 and 529: OUTPrecision Regulator 10-IR1000/20
Page 532 and 533: Fittings & Tube/Common Precautions
Page 534 and 535: DimensionsClean One-touch Fittings
Page 536 and 537: Clean One-touch Fittings KP536Speci
Page 540 and 541: DimensionsMale connector: KPQH, KPG
Page 542 and 543: DimensionsElbow: KPQL, KPGL——
Page 544 and 545: Miniature One-touch Fittings 10-KJ5
Page 552 and 553: One-touch Fittings 10-KQ552ModelHex
Page 554 and 555: One-touch Fittings 10-KQ554Male Con
Page 556 and 557: One-touch Fittings 10-KQ556Male Bra
Page 560 and 561: One-touch Fittings 10-KQ560Double B
Page 562 and 563: One-touch Fittings 10-KQ562Extended
Page 564 and 565: One-touch Fittings 10-KQ564Differen
Page 566 and 567: One-touch Fittings 10-KQ566Double B
Page 568 and 569: One-touch Fittings 10-KQ568Plug-in
Page 572 and 573: One-touch Fittings Stainless Specif
Page 584 and 585: Insert Fittings 10-KF584ModelMale C
Page 586 and 587: Insert Fittings 10-KF586Bulkhead Fe
Page 588 and 589: Insert Fittings 10-KF588Swivel Elbo
Page 590 and 591: Miniature Fittings 10-M590Series Mo
Page 592 and 593: Miniature Fittings 10-M592Series M5
Page 594 and 595: Miniature Fittings 10-M594Series M5
Page 596 and 597: Stainless Miniature Fittings 10-MS5
Page 598 and 599: Stainless Miniature Fittings 10-MS5
Page 600 and 601: Rectangular Multi-connector 10-KDM6
Page 602 and 603: Rectangular Multi-connector 10-KDM6
Page 604 and 605: Series TPSClean TubingSoft Polyolef
Page 606 and 607: 606Series 10-TCU Polyurethane Coil
Page 608 and 609:
Clean seriesAir Preparation Equipme
Page 610 and 611:
610Air Preparation Equipment/Common
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Mist Separator 10-AM59310-AM150 to
Page 614 and 615:
614Mist Separator 10-AMSpecific Pro
Page 616 and 617:
Micro Mist Separator 10-AMD59710-AM
Page 618 and 619:
Micro Mist Separator 10-AMD618Speci
Page 620 and 621:
601Super Mist Separator 10-AMEDimen
Page 622 and 623:
Super Mist Separator 10-AME622Speci
Page 624 and 625:
605Odor Removal Filter 10-AMFDimens
Page 626 and 627:
Odor Removal Filter 10-AMF626Specif
Page 628 and 629:
DimensionsHollow Fiber Membrane Air
Page 630 and 631:
Exhaust Cleaner for Clean Room AMPD
Page 632 and 633:
Exhaust Cleaner for Clean Room AMP6
Page 634 and 635:
Clean SeriesPressure Switch63410-PS
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636Pressure Switch (Solid State Typ
Page 638 and 639:
Digital Pressure Switch 10-PSE638Di
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Page 642 and 643:
Page 644 and 645:
644Pressure Switch625
Page 646 and 647:
High Precision Digital Pressure Swi
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High Precision Digital Pressure Swi
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Page 652 and 653:
Digital Pressure Switch with Backli
Page 654 and 655:
Page 656 and 657:
Digital Pressure Switch with Backli
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Clean SeriesClean Regulator658Clean
Page 660 and 661:
Series SRH660Flow Rate Characterist
Page 662 and 663:
Series SRH662ConstructionParts list
Page 664 and 665:
Series SRH664OptionsPressure GaugeP
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666Series SRHSafety InstructionsThe
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Series SRPPrecision Clean Regulator
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Precision Clean Regulator SRP670Opt
Page 672 and 673:
648672
Page 674 and 675:
674Series SFClean Gas Filter/Strain
Page 676 and 677:
Clean Gas Filter SF676Cartridge Typ
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Clean Gas Filter SF678Disposable Ty
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Clean Gas Filter SF680Disposable Ty
Page 682 and 683:
Clean Gas Filter SFSpecific Product
Page 684 and 685:
660684
Page 686 and 687:
686F.R. Unit Precautions 1Be sure t
Page 688 and 689:
688F.R. Unit Precautions 3Be sure t
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OUTAir Filter 10-AF690Dimensions10-
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OUTMist Separator 10-AFM692Dimensio
Page 694 and 695:
OUTDimensions10-AFD20 10-AFD30 to 4
Page 696 and 697:
Regulator 10-AR696Dimensions10-AR20
Page 698 and 699:
Regulator: Modular Type with Back F
Page 700 and 701:
QOUTFilter Regulator 10-AW700Dimens
Page 702 and 703:
QOUT702Filter Regulator with Back F
Page 704 and 705:
OUTMist Separator Regulator 10-AWM7
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OUTMicro-Mist Separator Regulator 1
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708Alphabet IndexProduct Series Ind
Page 710 and 711:
710K10-KF10-KG10-KJ10-KQPageInsert
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