Pneumatic Clean Series

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Solenoid Valve 10-SY3000/5000324Manifold OptionIndividual SUP spacer assemblyIndividual EXH spacer assembly SUP block discBy installing a supply block discin the pressure supply passageof the manifold base, two or moredifferent pressures, high or low,can be supplied to one manifoldEXH block discBy installing an exhaust block discin the exhaust passage of themanifold bases, the passage can bedivided so that the exhaust from onevalve will not affect other valves.(Two block discs are required toblock both exhaust ports.)Series10-SY300010-SY5000Part No.SX3000-77-1ASX5000-77-1ASeries10-SY300010-SY5000Part No.SX3000-77-1ASX5000-77-1ASeries Ass'y part No. Port size10-SY3000 SY3000-38-2A M5 X 0.810-SY5000 SY5000-38-2A Rc1/8Note) Either in the lead wire directionor end plate direction. The SUPport can be used.Series Ass'y part No. Port size10-SY3000 SY3000-39-2A M5 X 0.810-SY5000 SY5000-39-2A Rc1/8Note) EXH. port can be directedeither toward the lead wire orend plate.Labels for block discLabels are applied to blocks with SUP and EXH block discs for externalconfirmation of blocked passages. (3 labels per package)VZ3000-123-1ASUP gate label EXH gate seal SUP, EXH gate labelBlanking plate assemblyCautionMounting screw tightening torqueM2: 0.15NmM3: 0.6NmM4: 1.4NmNote) When the block discs are ordered with manifolds using a manifoldspecification sheet, block disc labels are already attached where blockdiscs are installed at the time of shipment.Silencer with One-touch fittingCan be attached in one-touch to the R (Exhaust) port of the manifold.DirectionalControl ValveSeries10-SY300010-SY5000Ass'y part No.SX3000-75-1ASX5000-76-1ADIN rail dimensionsVZ1000 11 1 L dimensions∗For "", enter the No. in the DIN rail dimension table below.SeriesFor 10-SY3000 (ø8)For 10-SY5000 (ø10)ModelAN203-KM8AN200-KM10AN300-KM10Effective area14mm 226mm 230mm 2Aø16ø22ø25B2653.870Plug (White)To be inserted into unused cylinder ports and supply/exhaust ports.The minimum order quantity is 10 pieces. Order in multiples of 10.C5180.897No.L dimension098No. 11L dimension 235.5No.L dimension22373No. 33L dimension 510.5No.L dimension44648No. 55L dimension 785.5No.L dimension669231110.51224823385.53452345660.55679867935.5212313260.52439835535.54667357810.5689483135.51427325410.53654847685.55882369960.5414815285.52642337560.54869859835.5709735160.51629827435.53857349710.56084871985.5617317310.52844839585.55072361860.57185.51832329460.54059851735.562873819819335.53047341610.55274863885.59210.52034831485.54262353760.564898∗ Refer to dimension L1 on pages starting from 101 for lengths thatcorrespond to the number of manifold stations.1022321360.53249843635.55477365910.5DimensionsApplicable fitting sizesize ødModel A L D410-KQP-04 16 32 66 10-KQP-06 18 35 88 10-KQP-08 20.5 39 1010 10-KQP-10 22 43 12305
Solenoid Valve 10-SY3000/5000325Series 10-SY3000 DimensionsC410-SS5Y3-45- Stations D- C6C410-SS5Y3-45- Stations U- C6Stations nL1L2L3L429887.570.513.53 4 5 6 7 8 9 10123 135.5 148 148 160.5 173 185.5112.5 125 137.5 137.5 150 162.5 17591.515.510216.5112.517.512312.5133.513.514414.5154.515.5110.51008114.5306
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1SMC Corporation1-16-4 Shimbashi, M
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5PageAir Line Equipment 431Flow Con
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Air CylinderSeries CJ2Air CylinderS
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9Safety InstructionsThese safety in
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Clean Series/Common Precautions 2Be
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131 Clean Series Basic Specificatio
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153 How to Use Clean SeriesThe posi
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174 Particle Generation Measuring M
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Front matter 1819
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21Actuator/Common Precautions 1Be s
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23Actuator/Common Precautions 3Be s
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25Auto Switch/Common Precautions 2B
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SeriesHow to Order10-11-CJ2Air Cyli
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øCAir Cylinder 10-CJ2/11-CJ229Basi
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øCAir Cylinder 10-CJ2/11-CJ231Fron
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SeriesHow to Order10-11-CJ2WDouble
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øCAir Cylinder 10-CJ2W/11-CJ2W35Ba
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SeriesHow to Order10-11-CJ2RADirect
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SeriesHow to Order10-11-CM2Air Cyli
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øIøIAir Cylinder 10-CM2/11-CM241B
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Air Cylinder 10-CM2/11-CM243Axial F
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Air Cylinder 10-CM2/11-CM245Rear Fl
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10-11- SeriesCM2W Double Rod Cylind
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øIAir Cylinder 10-CM2W/11-CM2W49Ba
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Series10-11-CM2RDirect Mount Cylind
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Air Cylinder 10-CM2R/11-CM2R53Speci
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Series10-11-CG1Air Cylinderø20,ø2
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0000Air Cylinder 10-CG1/11-CG157Bas
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Air Cylinder 10-CG1/11-CG159Front F
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SeriesHow to Order10-11-CG1WDouble
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44Double Rod Cylinder 10-CG1W/11-CG
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SeriesHow to Order10-11-Clean serie
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SeriesHow to Order10-11-CUJMini Fre
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Mini Free Mount Cylinder 10-CUJ/11-
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SeriesHow to Order10-11-CUFree Moun
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Free Mount Cylinder 10-CU/11-CU7310
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SeriesHow to Order10-11-CQSCompact
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Compact Cylinder 10-CQS/11-CQS77Sta
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Compact Cylinder 10-CQS/11-CQS79Wit
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Compact Cylinder 10-CQS/11-CQS81CQS
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SeriesHow to Order10-11-CQ2Compact
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Compact Cylinder 10-CQ2/11-CQ28510-
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Compact Cylinder 10-CQ2/11-CQ28710-
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Compact Cylinder 10-CQ2/11-CQ289Mou
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Series10-CBM2How to OrderEnd Lock C
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End Lock Cylinder 10-CBM293Basic (B
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End Lock Cylinder 10-CBM295Rear Fla
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SeriesHow to Order10-11-RECSine Cyl
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Sine Cylinder 10-REC/11-REC99Dimens
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Sine Cylinder 10-REC/11-REC101Speci
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SeriesHow to Order11-12-CXSJDual Ro
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Dual Rod Cylinder/Compact Type 11-C
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SeriesHow to Order11-12-CXSLDual Ro
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Dual Rod Cylinder 11-CXSL/12-CXSL10
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SeriesHow to Order12-13-MGPLCompact
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Compact Cylinder with Guide 12-MGPL
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Series10-MGFHow to OrderGuide Table
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Guide Table 10-MGF123Dimensions10-M
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Series11-MXP/MXPJ6Air Slide Tableø
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Air Slide Table 11-MXP/MXPJ6127Dime
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Air Slide Table 11-MXP/MXPJ6133Made
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Series13-MXQHow to OrderAir Slide T
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Air Slide Table 13-MXQ137Dimensions
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Air Slide Table 13-MXQ161Constructi
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Series13-MXSAir Slide Tableø6, ø8
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Air Slide Table 13-MXS165Dimensions
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Air Slide Table 13-MXS183Constructi
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SeriesCYPClean Rodless Cylinderø15
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Clean Rodless Cylinder CYP187Dimens
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190Actuator171
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Rodless Cylinder 12-CY1B192Basic12-
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WarningCaution12-CY1BDisassembly an
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Magnetically Coupled Rodless Cylind
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Sine Rodless Cylinder 12-REA198Dime
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Low Speed Cylinder 10-CQSX/11-CQSX2
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Low Speed Cylinder 10-CQ2X/11-CQ2X2
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Low Speed Cylinder 10-CM2X/11-CM2X2
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Clean seriesRotary Actuator206Vane
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208Rotary Actuator/Common Precautio
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210Rotary Actuator191
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Rotary Actuator 10-CRB1212Specifica
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4-R5Rotary Actuator 10-CRB1214Optio
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Rotary Actuator 10-CRB1216Without A
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ø45Rotary Actuator 10-CRB1218Witho
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Vane Type Rotary Actuator 10-CRB122
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Vane Type Rotary Actuator 10-CRB122
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Rack Pinion Type Rotary Actuator 11
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Rotary Table/Rack Pinion Type 11-MS
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Clean seriesAir Gripper23211-MHZ2Pa
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234Air Gripper/Common Precautions 2
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Parallel Type Air Gripper 11-MHZ223
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Standard/Series 11-MHZ2Finger Posit
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Auto Switch SpecificationsRotary Ac
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Rotary Actuated Air Gripper 11-MHR2
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Auto Switch SpecificationsRotary Ac
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Wide Opening Parallel Type Air Grip
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Wide Opening Parallel Type Air Grip
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Clean seriesDirectional Control Val
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3/4/5 Port Solenoid Valve/Common Pr
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258Flow Characteristics of Solenoid
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Solenoid Valve 10-SZ3000260How to O
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Solenoid Valve 10-SZ3000How to Orde
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Solenoid Valve 10-SZ3000264Dimensio
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Solenoid Valve 10-SZ3000Dimensions
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ONO FSMCA4Solenoid Valve 10-SZ30002
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Page 274 and 275: 5 Port Solenoid Valve Plug-in Type
Page 290 and 291: Solenoid Valve 10-SY3000/5000/70002
Page 294 and 295: 294Solenoid Valve 10-SY3000/5000/70
Page 300 and 301: 300DirectionalControl Valve281
Page 320 and 321: 320DirectionalControl Valve301
Page 322 and 323: Solenoid Valve 10-SY3000/5000322How
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Page 330 and 331: Solenoid Valve 10-SYJ3000330ModelVa
Page 332 and 333: Solenoid Valve 10-SYJ3000332Body Po
Page 334 and 335: Solenoid Valve 10-SYJ3000334Base Mo
Page 338 and 339: Solenoid Valve 10-SYJ3000338Flat Ri
Page 340 and 341: Solenoid Valve 10-SYJ3000340Type 20
Page 346 and 347: Solenoid Valve 10-SYJ5000346ModelBo
Page 348 and 349: Solenoid Valve 10-SYJ5000348Body Po
Page 354 and 355: Flat Ribbon Cable Type ManifoldSole
Page 364 and 365: Solenoid Valve 10-SY100364How to Or
Page 366 and 367: Solenoid Valve 10-SY100366Body Port
Page 368 and 369: Solenoid Valve 10-SY100368ManifoldH
Page 370 and 371: Solenoid Valve 10-SY100370Type S41
Page 372 and 373: Solenoid Valve 10-SYJ300372ModelFlo
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Approx.300Solenoid Valve 10-SYJ3003
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Solenoid Valve 10-SYJ300376Type 20
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Solenoid Valve 10-SYJ500380ModelFlo
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Solenoid Valve 10-SYJ500382Base Mou
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Solenoid Valve 10-VQ1000/2000388How
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ModelSolenoid Valve 10-VQ1000/20003
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Solenoid Valve 10-VQ1000/2000394F K
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Solenoid Valve 10-VQ1000/2000396P K
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Solenoid Valve 10-VQ1000/2000398S K
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Solenoid Valve 10-VQ1000/2000402Mod
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Solenoid Valve 10-VQ1000/2000414Dir
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(A)(B)4 25 1 3(R1)(P)(R2)(A)(B)4 25
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Solenoid Valve 10-VQ1000/2000422F K
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Solenoid Valve 10-VQ1000/2000426C K
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Solenoid Valve 10-VQ100438JIS symbo
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Solenoid Valve 10-VQ100440Dimension
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Solenoid Valve 10-VQ100442Plug-in U
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Solenoid Valve 10-VQ100444Plug Lead
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446DirectionalControl Valve427
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Solenoid Valve 10-VQD448DimensionsL
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Clean SeriesAir Line Equipment450Fl
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452Flow Control Equipment/Specific
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454Clean Speed Controller with One-
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456Air Line Equipment437
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Speed Controller with One-touch Fit
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462Speed Controller with One-touch
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Dual Speed Controller with One-touc
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Speed Controller for Low Speed Oper
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Speed Controller for Low Speed Oper
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Dual Speed Controller for Low Speed
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Dual Speed Controller with One-touc
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Speed Controller 10-AS486Needle Val
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Speed Controller 10-AS488Needle Val
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Page 492 and 493:
492Air Filter, Regulator/Common Pre
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Air Filter 10-AF494Dimensions10-AF3
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Mist Separator 10-AFM498Dimensions1
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Micro Mist Separator 10-AFD500Dimen
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Regulator 10-AR502Accessories (Opti
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Regulator 10-AR504Dimensions10-AR40
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506Regulator 10-ARSpecific Product
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50Precision Direct Operated Regulat
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50Regulator 10-AR510Dimensions10-AR
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Regulator 10-AR512Specific Product
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50Filter Regulator 10-AW514Dimensio
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Filter Regulator 10-AW516Specific P
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Mist Separator Regulator 10-AWM518D
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Micro Mist Separator Regulator 10-A
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Precision Regulator 10-IR1000/2000/
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OUTPrecision Regulator 10-IR1000/20
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Fittings & Tube/Common Precautions
Page 534 and 535:
DimensionsClean One-touch Fittings
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Clean One-touch Fittings KP536Speci
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DimensionsMale connector: KPQH, KPG
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DimensionsElbow: KPQL, KPGL——
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Miniature One-touch Fittings 10-KJ5
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One-touch Fittings 10-KQ552ModelHex
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One-touch Fittings 10-KQ554Male Con
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One-touch Fittings 10-KQ556Male Bra
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One-touch Fittings 10-KQ558Universa
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One-touch Fittings 10-KQ560Double B
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One-touch Fittings 10-KQ562Extended
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One-touch Fittings 10-KQ564Differen
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One-touch Fittings 10-KQ566Double B
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One-touch Fittings 10-KQ568Plug-in
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One-touch Fittings Stainless Specif
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Insert Fittings 10-KF584ModelMale C
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Insert Fittings 10-KF586Bulkhead Fe
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Insert Fittings 10-KF588Swivel Elbo
Page 590 and 591:
Miniature Fittings 10-M590Series Mo
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Miniature Fittings 10-M592Series M5
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Miniature Fittings 10-M594Series M5
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Stainless Miniature Fittings 10-MS5
Page 598 and 599:
Stainless Miniature Fittings 10-MS5
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Rectangular Multi-connector 10-KDM6
Page 602 and 603:
Rectangular Multi-connector 10-KDM6
Page 604 and 605:
Series TPSClean TubingSoft Polyolef
Page 606 and 607:
606Series 10-TCU Polyurethane Coil
Page 608 and 609:
Clean seriesAir Preparation Equipme
Page 610 and 611:
610Air Preparation Equipment/Common
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Mist Separator 10-AM59310-AM150 to
Page 614 and 615:
614Mist Separator 10-AMSpecific Pro
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Micro Mist Separator 10-AMD59710-AM
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Micro Mist Separator 10-AMD618Speci
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601Super Mist Separator 10-AMEDimen
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Super Mist Separator 10-AME622Speci
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605Odor Removal Filter 10-AMFDimens
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Odor Removal Filter 10-AMF626Specif
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DimensionsHollow Fiber Membrane Air
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Exhaust Cleaner for Clean Room AMPD
Page 632 and 633:
Exhaust Cleaner for Clean Room AMP6
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Clean SeriesPressure Switch63410-PS
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636Pressure Switch (Solid State Typ
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Digital Pressure Switch 10-PSE638Di
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644Pressure Switch625
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High Precision Digital Pressure Swi
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High Precision Digital Pressure Swi
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Digital Pressure Switch with Backli
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Digital Pressure Switch with Backli
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Clean SeriesClean Regulator658Clean
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Series SRH660Flow Rate Characterist
Page 662 and 663:
Series SRH662ConstructionParts list
Page 664 and 665:
Series SRH664OptionsPressure GaugeP
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666Series SRHSafety InstructionsThe
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Series SRPPrecision Clean Regulator
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Precision Clean Regulator SRP670Opt
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648672
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674Series SFClean Gas Filter/Strain
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Clean Gas Filter SF676Cartridge Typ
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Clean Gas Filter SF678Disposable Ty
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Clean Gas Filter SF680Disposable Ty
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Clean Gas Filter SFSpecific Product
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660684
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686F.R. Unit Precautions 1Be sure t
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688F.R. Unit Precautions 3Be sure t
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OUTAir Filter 10-AF690Dimensions10-
Page 692 and 693:
OUTMist Separator 10-AFM692Dimensio
Page 694 and 695:
OUTDimensions10-AFD20 10-AFD30 to 4
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Regulator 10-AR696Dimensions10-AR20
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Regulator: Modular Type with Back F
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QOUTFilter Regulator 10-AW700Dimens
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QOUT702Filter Regulator with Back F
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OUTMist Separator Regulator 10-AWM7
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OUTMicro-Mist Separator Regulator 1
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708Alphabet IndexProduct Series Ind
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710K10-KF10-KG10-KJ10-KQPageInsert
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memo712
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memo714
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Pneumatic Clean Series

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