Pneumatic Clean Series

174 Particle Generation Measuring MethodThe particle generation data for the SMC CLEAN SERIES are measured in the following test method.[Test method 1] (Example)Put the specimen in the acrylic resin chamber and operate it while supplying the same flow rate of clean air asthe suction flow rate of the measurement equipment (15 l/min). Measure the chronological changes of theparticle density until the number of cycles reaches the specified point.The chamber is located in a Class 100 clean bench.[Measurement conditions]Unobstructed 15lChamberQuality of supply air Same as the supply air for driving.ModelTS-1500Measuring Minimum measurableinstrument0.17µmparticle diameterInlet flow rate 15l/minManufacturerHitachi electronicengineering Co. Ltd.SettingconditionsNameSampling timeInterval timeSampling air flowLaser dust monitor(automatic particle counterby light scattering method)5min55min75lClean systemClean gasfilterClean gasfilterClean bench (Class 100)Supply rate 15l/minExhaustedfrom relief portLaser dust monitor(Suction amount15l/min)Generated output measuring circuit[Evaluation method]To obtain the measured value of particle density, the accumulated value Note 1) of particles captured by the laser dustmonitor every 5 minutes is converted into the particle density in every 1m 3 .The value used to determine the particle generation grade Note 2) is considered to be 100% against the percentage of theaverage of actually measured particle density value assumed as 95%.The extra 5% is added to ensure cleanliness in the actual operation.The graphs are plotted based on the value considered to be 100% against the percentage of the average particelddensity as 95%. The extra 5% is added to ensure cleanliness in the actual operation.Note 1) Sampling air: Number of particles contained in 75l of airNote 2) Actuator: 1 million cyclesSolenoid valve: 20 million cycles Particle generationcharacteristics of CM2 Particle generationcharacteristics of CXSL Particle generationcharacteristics of CY1BParticle density (particles/m 3 )10 610 510 410 310 210Standardproduct10-CM211-CM2Particle density (particles/m 3 )10 610 510 410 310 210Standardproduct12-CXSL11-CXSLParticle density (particles/m3)10 610 510 410 310 210Standardproduct12-CY1B1 110.1 0.5 10.1 0.5 10.1 0.5 1Particle diameter (µm) Particle diameter (µm) Particle diameter (µm)Front matter 16