Pneumatic Clean Series

More documents

Recommendations

Info

Solenoid Valve 10-VQ1000/2000430How to Order Valves10 - VQ1 1 7 0 Y - 5 M - C6<strong>Clean</strong> seriesVQ1000Cylinder port sizeC3 — For ø3.2 One-touch fittingC4 — For ø4 One-touch fittingC6 — For ø6 One-touch fittingM5 — M5 threadActuation2 position single(A)(B)4 2125 1 3(R1)(P)(R2)2 position double (Latching)(A)(B)4 25 1 3(R1)(P)(R2)(A)(B)4 25 1 3(R1)(P)(R2)MetalsealRubbersealManual overrideNil — Non-locking push type (tool required)B — Lock type (tool required)C — Locking type (lever)Note) The standard manual override for pilot valve is providedfor double (latching) type.Electrical entryL plug connector M plug connectorL —With lead wire M —With lead wireLO—Without connector MO—Without connectorNote 1) LO and MO valves are used for F and P kits. Plug connector andlead wire layers are attached to the manifold.Coil voltage5 — 24VDC/With light/surge suppresser6 — 12VDC/With light/surge suppresserFunctionNil — Standard (1W): Double (Latching) typeNote) Y — Low wattage (0.5W) specifications : Single typeS Kit (Serial Transmission Kit)Seal type0 — Metal seal1 — Rubber sealHow to Order Manifold Assembly/ExampleDirectionalControl ValveKitSOABCWithout SI unitGeneral purpose type: <strong>Series</strong> EX300Mitsubishi Electric Corporation: MELSECNET/MINI-S3 data link systemOMRON Corporation: SYSBUS Wire SystemD Sharp Corporation: Satellite I/O Link SystemMaximumE Matsushita Electric Industrial Co., Ltd.: MEWNET-F System16 stationsF1GHJ1J2NKE Corporation: Uni wire system (16 outputs)Remote I/O System (RIO) by Allen-Bradley Co.NKE Corporation: Uni wire H systemCorporation: S-LINK system (16 outputs)Corporation: S-LINK system (8 outputs)Maximum8 stationsK FUJI ELECTRIC CO.,LTD.: T Link Mini SystemMaximumQ Device Net and Omron CompoBus/D16 stationsR1 CompoBus/S (16 points) by OMRON Co.R2VCompoBus/S (8 points) by OMRON Co.Mitsubishi Electric Corporation: CC -LinkMaximum8 stationsMaximum16 stationsNote) The general type requires a transmission unit with the CPU.3mD-sub connectorcableF kit(D-sub connector kit)Double (Latching) solenoid (24VDC)10-VQ1270-5MOB-C6 (4 sets)Single solenoid(24VDC)Size of cylinder port10-VQ1170Y-5MO-C6C6: For ø6 one-touch fitting(4 sets)123--------------StationsD side U sideManifold base (8 stations)10-VV5Q17-08AFU2-D10-VV5Q17-08AFU2-D ····1 set (F kit 8 station manifold base part No.)∗10-VQ1170Y-5MO-C6 ···4 sets (Single solenoidpart No.)∗10-VQ1270-5MOB-C6 ···4 sets (Double latching solenoid part No.)∗ To order valves and options mounted onto the manifold at the factory,prefix the part number of the solenoid valve and other equipment withan asterisk (∗).Specify the valves to be installed below the manifold part number.If the layout is complicated, give descriptions on a manifold specificationsheet.411
Solenoid Valve 10-VQ1000/2000431Manifold OptionSUP/EXH Block Bush Assembly10-VVQ1000-87A-B-50Individual SUP/EXH Spacer10-VVQ1000-PR-7-C6C6 (EXH port)ø6 One-Touch fittingC6 (SUP port)ø6 One-Touch fittingD side U sidePR2R1D side U sideBlock bush ass'y(6 pcs.)Individual SUP Spacer10-VVQ1000-P-7-C6Name Plate [-N7]VVQ1000-N7-Stations (1 to Maximum stations)C6 (SUP port)ø6 One-Touch fittingBlock bush ass'y(2 pcs.)D side U sideIndividual EXH Spacer10-VVQ1000-R-7-C6C6 (EXH port)ø6 One-Touch fittingBlanking Plug (With One-touch Fitting)KQ2P- 230406Block bush ass'y(4 pcs.)D side U side412
Page 1 and 2:
1SMC Corporation1-16-4 Shimbashi, M
Page 5 and 6:
5PageAir Line Equipment 431Flow Con
Page 7 and 8:
Air CylinderSeries CJ2Air CylinderS
Page 9 and 10:
9Safety InstructionsThese safety in
Page 11 and 12:
Clean Series/Common Precautions 2Be
Page 13 and 14:
131 Clean Series Basic Specificatio
Page 15 and 16:
153 How to Use Clean SeriesThe posi
Page 17 and 18:
174 Particle Generation Measuring M
Page 19 and 20:
Front matter 1819
Page 21 and 22:
21Actuator/Common Precautions 1Be s
Page 23 and 24:
23Actuator/Common Precautions 3Be s
Page 25 and 26:
25Auto Switch/Common Precautions 2B
Page 27 and 28:
SeriesHow to Order10-11-CJ2Air Cyli
Page 29 and 30:
øCAir Cylinder 10-CJ2/11-CJ229Basi
Page 31 and 32:
øCAir Cylinder 10-CJ2/11-CJ231Fron
Page 33 and 34:
SeriesHow to Order10-11-CJ2WDouble
Page 35 and 36:
øCAir Cylinder 10-CJ2W/11-CJ2W35Ba
Page 37 and 38:
SeriesHow to Order10-11-CJ2RADirect
Page 39 and 40:
SeriesHow to Order10-11-CM2Air Cyli
Page 41 and 42:
øIøIAir Cylinder 10-CM2/11-CM241B
Page 43 and 44:
Air Cylinder 10-CM2/11-CM243Axial F
Page 45 and 46:
Air Cylinder 10-CM2/11-CM245Rear Fl
Page 47 and 48:
10-11- SeriesCM2W Double Rod Cylind
Page 49 and 50:
øIAir Cylinder 10-CM2W/11-CM2W49Ba
Page 51 and 52:
Series10-11-CM2RDirect Mount Cylind
Page 53 and 54:
Air Cylinder 10-CM2R/11-CM2R53Speci
Page 55 and 56:
Series10-11-CG1Air Cylinderø20,ø2
Page 57 and 58:
0000Air Cylinder 10-CG1/11-CG157Bas
Page 59 and 60:
Air Cylinder 10-CG1/11-CG159Front F
Page 61 and 62:
SeriesHow to Order10-11-CG1WDouble
Page 63 and 64:
44Double Rod Cylinder 10-CG1W/11-CG
Page 65 and 66:
SeriesHow to Order10-11-Clean serie
Page 67 and 68:
SeriesHow to Order10-11-CUJMini Fre
Page 69 and 70:
Mini Free Mount Cylinder 10-CUJ/11-
Page 71 and 72:
SeriesHow to Order10-11-CUFree Moun
Page 73 and 74:
Free Mount Cylinder 10-CU/11-CU7310
Page 75 and 76:
SeriesHow to Order10-11-CQSCompact
Page 77 and 78:
Compact Cylinder 10-CQS/11-CQS77Sta
Page 79 and 80:
Compact Cylinder 10-CQS/11-CQS79Wit
Page 81 and 82:
Compact Cylinder 10-CQS/11-CQS81CQS
Page 83 and 84:
SeriesHow to Order10-11-CQ2Compact
Page 85 and 86:
Compact Cylinder 10-CQ2/11-CQ28510-
Page 87 and 88:
Compact Cylinder 10-CQ2/11-CQ28710-
Page 89 and 90:
Compact Cylinder 10-CQ2/11-CQ289Mou
Page 91 and 92:
Series10-CBM2How to OrderEnd Lock C
Page 93 and 94:
End Lock Cylinder 10-CBM293Basic (B
Page 95 and 96:
End Lock Cylinder 10-CBM295Rear Fla
Page 97 and 98:
SeriesHow to Order10-11-RECSine Cyl
Page 99 and 100:
Sine Cylinder 10-REC/11-REC99Dimens
Page 101 and 102:
Sine Cylinder 10-REC/11-REC101Speci
Page 103 and 104:
SeriesHow to Order11-12-CXSJDual Ro
Page 105 and 106:
Dual Rod Cylinder/Compact Type 11-C
Page 107 and 108:
SeriesHow to Order11-12-CXSLDual Ro
Page 109 and 110:
Dual Rod Cylinder 11-CXSL/12-CXSL10
Page 111 and 112:
Page 113 and 114:
Page 115 and 116:
Page 117 and 118:
SeriesHow to Order12-13-MGPLCompact
Page 119 and 120:
Compact Cylinder with Guide 12-MGPL
Page 121 and 122:
Series10-MGFHow to OrderGuide Table
Page 123 and 124:
Guide Table 10-MGF123Dimensions10-M
Page 125 and 126:
Series11-MXP/MXPJ6Air Slide Tableø
Page 127 and 128:
Air Slide Table 11-MXP/MXPJ6127Dime
Page 129 and 130:
Page 131 and 132:
Page 133 and 134:
Air Slide Table 11-MXP/MXPJ6133Made
Page 135 and 136:
Series13-MXQHow to OrderAir Slide T
Page 137 and 138:
Air Slide Table 13-MXQ137Dimensions
Page 139 and 140:
Page 141 and 142:
Page 143 and 144:
Page 145 and 146:
Page 147 and 148:
Page 149 and 150:
Page 151 and 152:
Page 153 and 154:
Page 155 and 156:
Page 157 and 158:
Page 159 and 160:
Page 161 and 162:
Air Slide Table 13-MXQ161Constructi
Page 163 and 164:
Series13-MXSAir Slide Tableø6, ø8
Page 165 and 166:
Air Slide Table 13-MXS165Dimensions
Page 167 and 168:
Page 169 and 170:
Page 171 and 172:
Page 173 and 174:
Page 175 and 176:
Page 177 and 178:
Page 179 and 180:
Page 181 and 182:
Page 183 and 184:
Air Slide Table 13-MXS183Constructi
Page 185 and 186:
SeriesCYPClean Rodless Cylinderø15
Page 187 and 188:
Clean Rodless Cylinder CYP187Dimens
Page 190 and 191:
190Actuator171
Page 192 and 193:
Rodless Cylinder 12-CY1B192Basic12-
Page 194 and 195:
WarningCaution12-CY1BDisassembly an
Page 196 and 197:
Magnetically Coupled Rodless Cylind
Page 198 and 199:
Sine Rodless Cylinder 12-REA198Dime
Page 200 and 201:
Low Speed Cylinder 10-CQSX/11-CQSX2
Page 202 and 203:
Low Speed Cylinder 10-CQ2X/11-CQ2X2
Page 204 and 205:
Low Speed Cylinder 10-CM2X/11-CM2X2
Page 206 and 207:
Clean seriesRotary Actuator206Vane
Page 208 and 209:
208Rotary Actuator/Common Precautio
Page 210 and 211:
210Rotary Actuator191
Page 212 and 213:
Rotary Actuator 10-CRB1212Specifica
Page 214 and 215:
4-R5Rotary Actuator 10-CRB1214Optio
Page 216 and 217:
Rotary Actuator 10-CRB1216Without A
Page 218 and 219:
ø45Rotary Actuator 10-CRB1218Witho
Page 220 and 221:
Vane Type Rotary Actuator 10-CRB122
Page 222 and 223:
Vane Type Rotary Actuator 10-CRB122
Page 224 and 225:
Rack Pinion Type Rotary Actuator 11
Page 226 and 227:
Page 228 and 229:
Page 230 and 231:
Rotary Table/Rack Pinion Type 11-MS
Page 232 and 233:
Clean seriesAir Gripper23211-MHZ2Pa
Page 234 and 235:
234Air Gripper/Common Precautions 2
Page 236 and 237:
Parallel Type Air Gripper 11-MHZ223
Page 238 and 239:
Standard/Series 11-MHZ2Finger Posit
Page 240 and 241:
Auto Switch SpecificationsRotary Ac
Page 242 and 243:
Rotary Actuated Air Gripper 11-MHR2
Page 244 and 245:
Page 246 and 247:
Auto Switch SpecificationsRotary Ac
Page 248 and 249:
Page 250 and 251:
Wide Opening Parallel Type Air Grip
Page 252 and 253:
Wide Opening Parallel Type Air Grip
Page 254 and 255:
Clean seriesDirectional Control Val
Page 256 and 257:
3/4/5 Port Solenoid Valve/Common Pr
Page 258 and 259:
258Flow Characteristics of Solenoid
Page 260 and 261:
Solenoid Valve 10-SZ3000260How to O
Page 262 and 263:
Solenoid Valve 10-SZ3000How to Orde
Page 264 and 265:
Solenoid Valve 10-SZ3000264Dimensio
Page 266 and 267:
Page 268 and 269:
Solenoid Valve 10-SZ3000Dimensions
Page 270 and 271:
ONO FSMCA4Solenoid Valve 10-SZ30002
Page 272 and 273:
Page 274 and 275:
5 Port Solenoid Valve Plug-in Type
Page 276 and 277:
Page 278 and 279:
Page 280 and 281:
Page 282 and 283:
Page 284 and 285:
Page 286 and 287:
Page 288 and 289:
Page 290 and 291:
Solenoid Valve 10-SY3000/5000/70002
Page 292 and 293:
Page 294 and 295:
294Solenoid Valve 10-SY3000/5000/70
Page 296 and 297:
Page 298 and 299:
Page 300 and 301:
300DirectionalControl Valve281
Page 302 and 303:
Page 304 and 305:
Page 306 and 307:
Page 308 and 309:
Page 310 and 311:
Page 312 and 313:
Page 314 and 315:
Page 316 and 317:
Page 318 and 319:
Page 320 and 321:
320DirectionalControl Valve301
Page 322 and 323:
Solenoid Valve 10-SY3000/5000322How
Page 324 and 325:
Solenoid Valve 10-SY3000/5000324Man
Page 326 and 327:
Solenoid Valve 10-SY3000/5000326Ser
Page 328 and 329:
Solenoid Valve 10-SY3000/5000328Ser
Page 330 and 331:
Solenoid Valve 10-SYJ3000330ModelVa
Page 332 and 333:
Solenoid Valve 10-SYJ3000332Body Po
Page 334 and 335:
Solenoid Valve 10-SYJ3000334Base Mo
Page 336 and 337:
Page 338 and 339:
Solenoid Valve 10-SYJ3000338Flat Ri
Page 340 and 341:
Solenoid Valve 10-SYJ3000340Type 20
Page 342 and 343:
Page 344 and 345:
Page 346 and 347:
Solenoid Valve 10-SYJ5000346ModelBo
Page 348 and 349:
Solenoid Valve 10-SYJ5000348Body Po
Page 350 and 351:
Page 352 and 353:
Page 354 and 355:
Flat Ribbon Cable Type ManifoldSole
Page 356 and 357:
Page 358 and 359:
Page 360 and 361:
Page 362 and 363:
Page 364 and 365:
Solenoid Valve 10-SY100364How to Or
Page 366 and 367:
Solenoid Valve 10-SY100366Body Port
Page 368 and 369:
Solenoid Valve 10-SY100368ManifoldH
Page 370 and 371:
Solenoid Valve 10-SY100370Type S41
Page 372 and 373:
Solenoid Valve 10-SYJ300372ModelFlo
Page 374 and 375:
Approx.300Solenoid Valve 10-SYJ3003
Page 376 and 377:
Page 378 and 379:
Page 380 and 381: Solenoid Valve 10-SYJ500380ModelFlo
Page 382 and 383: Solenoid Valve 10-SYJ500382Base Mou
Page 384 and 385: Solenoid Valve 10-SYJ500384Type 20
Page 386 and 387: Solenoid Valve 10-SYJ500386Type 41
Page 388 and 389: Solenoid Valve 10-VQ1000/2000388How
Page 392 and 393: ModelSolenoid Valve 10-VQ1000/20003
Page 394 and 395: Solenoid Valve 10-VQ1000/2000394F K
Page 396 and 397: Solenoid Valve 10-VQ1000/2000396P K
Page 398 and 399: Solenoid Valve 10-VQ1000/2000398S K
Page 402 and 403: Solenoid Valve 10-VQ1000/2000402Mod
Page 414 and 415: Solenoid Valve 10-VQ1000/2000414Dir
Page 416 and 417: (A)(B)4 25 1 3(R1)(P)(R2)(A)(B)4 25
Page 422 and 423: Solenoid Valve 10-VQ1000/2000422F K
Page 426 and 427: Solenoid Valve 10-VQ1000/2000426C K
Page 438 and 439: Solenoid Valve 10-VQ100438JIS symbo
Page 440 and 441: Solenoid Valve 10-VQ100440Dimension
Page 442 and 443: Solenoid Valve 10-VQ100442Plug-in U
Page 444 and 445: Solenoid Valve 10-VQ100444Plug Lead
Page 446 and 447: 446DirectionalControl Valve427
Page 448 and 449: Solenoid Valve 10-VQD448DimensionsL
Page 450 and 451: Clean SeriesAir Line Equipment450Fl
Page 452 and 453: 452Flow Control Equipment/Specific
Page 454 and 455: 454Clean Speed Controller with One-
Page 456 and 457: 456Air Line Equipment437
Page 458 and 459: Speed Controller with One-touch Fit
Page 462 and 463: 462Speed Controller with One-touch
Page 470 and 471: Dual Speed Controller with One-touc
Page 474 and 475: Speed Controller for Low Speed Oper
Page 476 and 477: Speed Controller for Low Speed Oper
Page 478 and 479: Dual Speed Controller for Low Speed
Page 480 and 481:
480Air Line Equipment461
Page 482 and 483:
Dual Speed Controller with One-touc
Page 484 and 485:
Page 486 and 487:
Speed Controller 10-AS486Needle Val
Page 488 and 489:
Speed Controller 10-AS488Needle Val
Page 490 and 491:
Page 492 and 493:
492Air Filter, Regulator/Common Pre
Page 494 and 495:
Air Filter 10-AF494Dimensions10-AF3
Page 496 and 497:
Page 498 and 499:
Mist Separator 10-AFM498Dimensions1
Page 500 and 501:
Micro Mist Separator 10-AFD500Dimen
Page 502 and 503:
Regulator 10-AR502Accessories (Opti
Page 504 and 505:
Regulator 10-AR504Dimensions10-AR40
Page 506 and 507:
506Regulator 10-ARSpecific Product
Page 508 and 509:
50Precision Direct Operated Regulat
Page 510 and 511:
50Regulator 10-AR510Dimensions10-AR
Page 512 and 513:
Regulator 10-AR512Specific Product
Page 514 and 515:
50Filter Regulator 10-AW514Dimensio
Page 516 and 517:
Filter Regulator 10-AW516Specific P
Page 518 and 519:
Mist Separator Regulator 10-AWM518D
Page 520 and 521:
Page 522 and 523:
Micro Mist Separator Regulator 10-A
Page 524 and 525:
Page 526 and 527:
Precision Regulator 10-IR1000/2000/
Page 528 and 529:
OUTPrecision Regulator 10-IR1000/20
Page 530 and 531:
Page 532 and 533:
Fittings & Tube/Common Precautions
Page 534 and 535:
DimensionsClean One-touch Fittings
Page 536 and 537:
Clean One-touch Fittings KP536Speci
Page 538 and 539:
Page 540 and 541:
DimensionsMale connector: KPQH, KPG
Page 542 and 543:
DimensionsElbow: KPQL, KPGL——
Page 544 and 545:
Miniature One-touch Fittings 10-KJ5
Page 546 and 547:
Page 548 and 549:
Page 550 and 551:
Page 552 and 553:
One-touch Fittings 10-KQ552ModelHex
Page 554 and 555:
One-touch Fittings 10-KQ554Male Con
Page 556 and 557:
One-touch Fittings 10-KQ556Male Bra
Page 558 and 559:
One-touch Fittings 10-KQ558Universa
Page 560 and 561:
One-touch Fittings 10-KQ560Double B
Page 562 and 563:
One-touch Fittings 10-KQ562Extended
Page 564 and 565:
One-touch Fittings 10-KQ564Differen
Page 566 and 567:
One-touch Fittings 10-KQ566Double B
Page 568 and 569:
One-touch Fittings 10-KQ568Plug-in
Page 570 and 571:
Page 572 and 573:
One-touch Fittings Stainless Specif
Page 574 and 575:
Page 576 and 577:
Page 578 and 579:
Page 580 and 581:
Page 582 and 583:
Page 584 and 585:
Insert Fittings 10-KF584ModelMale C
Page 586 and 587:
Insert Fittings 10-KF586Bulkhead Fe
Page 588 and 589:
Insert Fittings 10-KF588Swivel Elbo
Page 590 and 591:
Miniature Fittings 10-M590Series Mo
Page 592 and 593:
Miniature Fittings 10-M592Series M5
Page 594 and 595:
Miniature Fittings 10-M594Series M5
Page 596 and 597:
Stainless Miniature Fittings 10-MS5
Page 598 and 599:
Stainless Miniature Fittings 10-MS5
Page 600 and 601:
Rectangular Multi-connector 10-KDM6
Page 602 and 603:
Rectangular Multi-connector 10-KDM6
Page 604 and 605:
Series TPSClean TubingSoft Polyolef
Page 606 and 607:
606Series 10-TCU Polyurethane Coil
Page 608 and 609:
Clean seriesAir Preparation Equipme
Page 610 and 611:
610Air Preparation Equipment/Common
Page 612 and 613:
Mist Separator 10-AM59310-AM150 to
Page 614 and 615:
614Mist Separator 10-AMSpecific Pro
Page 616 and 617:
Micro Mist Separator 10-AMD59710-AM
Page 618 and 619:
Micro Mist Separator 10-AMD618Speci
Page 620 and 621:
601Super Mist Separator 10-AMEDimen
Page 622 and 623:
Super Mist Separator 10-AME622Speci
Page 624 and 625:
605Odor Removal Filter 10-AMFDimens
Page 626 and 627:
Odor Removal Filter 10-AMF626Specif
Page 628 and 629:
DimensionsHollow Fiber Membrane Air
Page 630 and 631:
Exhaust Cleaner for Clean Room AMPD
Page 632 and 633:
Exhaust Cleaner for Clean Room AMP6
Page 634 and 635:
Clean SeriesPressure Switch63410-PS
Page 636 and 637:
636Pressure Switch (Solid State Typ
Page 638 and 639:
Digital Pressure Switch 10-PSE638Di
Page 640 and 641:
Page 642 and 643:
Page 644 and 645:
644Pressure Switch625
Page 646 and 647:
High Precision Digital Pressure Swi
Page 648 and 649:
High Precision Digital Pressure Swi
Page 650 and 651:
Page 652 and 653:
Digital Pressure Switch with Backli
Page 654 and 655:
Page 656 and 657:
Digital Pressure Switch with Backli
Page 658 and 659:
Clean SeriesClean Regulator658Clean
Page 660 and 661:
Series SRH660Flow Rate Characterist
Page 662 and 663:
Series SRH662ConstructionParts list
Page 664 and 665:
Series SRH664OptionsPressure GaugeP
Page 666 and 667:
666Series SRHSafety InstructionsThe
Page 668 and 669:
Series SRPPrecision Clean Regulator
Page 670 and 671:
Precision Clean Regulator SRP670Opt
Page 672 and 673:
648672
Page 674 and 675:
674Series SFClean Gas Filter/Strain
Page 676 and 677:
Clean Gas Filter SF676Cartridge Typ
Page 678 and 679:
Clean Gas Filter SF678Disposable Ty
Page 680 and 681:
Clean Gas Filter SF680Disposable Ty
Page 682 and 683:
Clean Gas Filter SFSpecific Product
Page 684 and 685:
660684
Page 686 and 687:
686F.R. Unit Precautions 1Be sure t
Page 688 and 689:
688F.R. Unit Precautions 3Be sure t
Page 690 and 691:
OUTAir Filter 10-AF690Dimensions10-
Page 692 and 693:
OUTMist Separator 10-AFM692Dimensio
Page 694 and 695:
OUTDimensions10-AFD20 10-AFD30 to 4
Page 696 and 697:
Regulator 10-AR696Dimensions10-AR20
Page 698 and 699:
Regulator: Modular Type with Back F
Page 700 and 701:
QOUTFilter Regulator 10-AW700Dimens
Page 702 and 703:
QOUT702Filter Regulator with Back F
Page 704 and 705:
OUTMist Separator Regulator 10-AWM7
Page 706 and 707:
OUTMicro-Mist Separator Regulator 1
Page 708 and 709:
708Alphabet IndexProduct Series Ind
Page 710 and 711:
710K10-KF10-KG10-KJ10-KQPageInsert
Page 712 and 713:
memo712
Page 714 and 715:
memo714
show all

Pneumatic Clean Series

Create successful ePaper yourself

Delete template?

Save as template?