Pneumatic Clean Series

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One-touch Fittings 10-KQ560Double Branch Universal Elbow: 10-KQZDApplicabletubingO.D. mm4681012ConnectionthreadsR1/81/43/81/81/43/81/81/43/81/21/43/81/21/43/81/2ModelH Note)øD2(Hex.) øD1L110-KQZD04-01S18.5 41 37341410-KQZD04-02S 10.4 13.4 21 21.5 44 38 16 13.4 10.4 4010-KQZD04-03S 1723.5 46 405310-KQZD06-01S18.5 41 37381410-KQZD06-02S 12.8 13.4 22 21.5 44 38 17 13.4 12.8 4310-KQZD06-03S 1723.5 46 405710-KQZD08-01S21 48 447610-KQZD08-02S 1924 51 457215.2 17.6 2618.515.915.210-KQZD08-03S25 52 45.58110-KQZD08-04S 2128.5 55.5 47.510210-KQZD10-02S26.5 58 5211110-KQZD10-03S 21 18.5 20.6 29 27.5 59 53 21 19.2 18.510-KQZD10-04S30.5 62 5412810-KQZD12-02S28.5 64.5 58.517810-KQZD12-03S 26 20.9 25.2 32 29.5 65.5 59 22 21.6 20.9 16710-KQZD12-04S32.5 68.5 60179∗Reference dimensions of R thread after being screwed in.Note) øD1 indicates the maximum diameter.L2L3A ∗MP1P2WeightgTriple Branch Universal Male Elbow: 10-KQZTApplicabletubingO.D. mm4681012ConnectionthreadsR1/81/43/81/81/43/81/81/43/81/21/43/81/21/43/81/2ModelH Note)øD2(Hex.) øD1L110-KQZT04-01S18.5 54.5 50.5251410-KQZT04-02S 10.4 13.4 21 21.5 57.5 51.5 16 13.4 10.4 3110-KQZT04-03S 1723.5 59.5 53.54410-KQZT06-01S18.5 54.5 50.5271410-KQZT06-02S 12.8 13.4 22 21.5 57.5 51.5 17 13.4 12.8 3310-KQZT06-03S 1723.5 59.5 53.54610-KQZT08-01S21 64 605610-KQZT08-02S 1924 67 615415.2 17.6 2618.5 15.9 15.210-KQZT08-03S25 68 61.56210-KQZT08-04S 2128.5 71.5 63.58510-KQZT10-02S26.5 77.5 71.58310-KQZT10-03S 21 18.5 20.6 29 27.5 78.5 72 21 19.2 18.5 8510-KQZT10-04S30.5 81.5 73.510210-KQZT12-02S28.5 86 8013410-KQZT12-03S 26 20.9 25.2 32 29.5 87 80.5 22 21.6 20.9 13010-KQZT12-04S32.5 90 82141*Reference dimensions of R thread after being screwed in.Note) øD1 indicates the maximum diameter.L2L3A ∗MP1P2WeightgAir Line EquipmentElbow: 10-KQLApplicabletubing O.D.mm3.246Model10-KQL23-0010-KQL04-0010-KQL06-00Note 1)øD9.610.412.8L17.51820Q4.34.55.3M15.51617Effective areamm 2Polyurethane tubing2.54.29.0Weightg8 10-KQL08-00 15.2 23 6 18.5 14.9 1010 10-KQL10-00 18.5 26.5 6.8 21 25.0 1712 10-KQL12-00 20.9 28.5 7.5 22 39.7 21366Note 1) øD indicates the maximum diameter.541
One-touch Fittings 10-KQ561Branch Elbow: 10-KQLUApplicabletubing O.D.mmModelNote)øDL1L2Q1Effective areamm 2Polyurethane tubing4.111.018.2Weightg4 10-KQLU04-00 10.4 18.5 24 18.5 10 16 10.466 10-KQLU06-00 12.8 21 27.5 20.5 12 17 12.888 10-KQLU08-00 15.2 24 32 24.5 14 18.5 15.21510 10-KQLU10-00 18.5 27 36.5 28 16 21 18.5 29.0 2512 10-KQLU12-00 20.9 29 40 30 18 22 20.9 45.2 32Note) øD indicates the maximum diameter.Q2MPPlug-in Elbow: 10-KQLApplicabletubing O.D.mm3.246Applicablefitting sizeødModelNote 1)øD1 øD2L1L2Effective areamm 2Polyurethane tubing2.54.29.0Weightg3.24610-KQL23-9910-KQL04-9910-KQL06-999.610.412.8781017182024.52527.51414.51715.516172338 8 10-KQL08-99 15.2 12 22.5 31.5 21 18.5 14.9 510 10 10-KQL10-99 18.5 14 25.5 35.5 23.5 21 25.0 912 12 10-KQL12-99 20.9 16 27 37.5 26 22 39.7 10AMNote 1) øD1 indicates the maximum diameter.Extended Plug-in Elbow: 10-KQWApplicable ApplicableNote)Effective areatubing O.D. fitting size Model øD1 L1 L2mmWeight2øD2A Mmm ødgPolyurethane tubing3.2 3.2 10-KQW23-99 9.6 7 17.5 35 24.5 15.5 2.5 2464610-KQW04-99 10.410-KQW06-99 12.881018203741.5263116174.29.0348 8 10-KQW08-99 15.2 12 22.5 48 37 18.5 14.9 610 10 10-KQW10-99 18.5 14 25.5 55 43.5 21 25.0 912 12 10-KQW12-99 20.9 16 27 59.5 48 22 39.7 13Note) øD indicates the maximum diameter.Reducer Elbow: 10-KQLApplicable Applicabletubing O.D. fitting sizemm ødModelNote)øD2øD1L1L2Effective areamm 2Polyurethane tubing2.5Weightg3.2 4 10-KQL23-04 9.6 7 17 25 13.5 15.5246 10-KQL04-06 8 26 14.5310.4 1816 4.28 10-KQL04-08 10 35 221168 10-KQL06-08 19.5 30.5 181212.8 10 17 9.010 10-KQL06-10 20 38.5 2419810 10-KQL08-10 22.5 33.5 20.5 2015.2 12 18.5 14.912 10-KQL08-12 23 40.5 262710 12 10-KQL10-12 18.5 17 26.5 42 30 21 25.0 2912 16 10-KQL12-16 20.9 17 28.5 49.5 34.5 22 39.7 53AMNote) øD1 indicates the maximum diameter.542
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1SMC Corporation1-16-4 Shimbashi, M
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5PageAir Line Equipment 431Flow Con
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Air CylinderSeries CJ2Air CylinderS
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9Safety InstructionsThese safety in
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Clean Series/Common Precautions 2Be
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131 Clean Series Basic Specificatio
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153 How to Use Clean SeriesThe posi
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174 Particle Generation Measuring M
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Front matter 1819
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21Actuator/Common Precautions 1Be s
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23Actuator/Common Precautions 3Be s
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25Auto Switch/Common Precautions 2B
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SeriesHow to Order10-11-CJ2Air Cyli
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øCAir Cylinder 10-CJ2/11-CJ229Basi
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øCAir Cylinder 10-CJ2/11-CJ231Fron
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SeriesHow to Order10-11-CJ2WDouble
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øCAir Cylinder 10-CJ2W/11-CJ2W35Ba
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SeriesHow to Order10-11-CJ2RADirect
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SeriesHow to Order10-11-CM2Air Cyli
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øIøIAir Cylinder 10-CM2/11-CM241B
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Air Cylinder 10-CM2/11-CM243Axial F
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Air Cylinder 10-CM2/11-CM245Rear Fl
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10-11- SeriesCM2W Double Rod Cylind
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øIAir Cylinder 10-CM2W/11-CM2W49Ba
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Series10-11-CM2RDirect Mount Cylind
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Air Cylinder 10-CM2R/11-CM2R53Speci
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Series10-11-CG1Air Cylinderø20,ø2
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0000Air Cylinder 10-CG1/11-CG157Bas
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Air Cylinder 10-CG1/11-CG159Front F
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SeriesHow to Order10-11-CG1WDouble
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44Double Rod Cylinder 10-CG1W/11-CG
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SeriesHow to Order10-11-Clean serie
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SeriesHow to Order10-11-CUJMini Fre
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Mini Free Mount Cylinder 10-CUJ/11-
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SeriesHow to Order10-11-CUFree Moun
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Free Mount Cylinder 10-CU/11-CU7310
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SeriesHow to Order10-11-CQSCompact
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Compact Cylinder 10-CQS/11-CQS77Sta
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Compact Cylinder 10-CQS/11-CQS79Wit
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Compact Cylinder 10-CQS/11-CQS81CQS
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SeriesHow to Order10-11-CQ2Compact
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Compact Cylinder 10-CQ2/11-CQ28510-
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Compact Cylinder 10-CQ2/11-CQ28710-
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Compact Cylinder 10-CQ2/11-CQ289Mou
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Series10-CBM2How to OrderEnd Lock C
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End Lock Cylinder 10-CBM293Basic (B
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End Lock Cylinder 10-CBM295Rear Fla
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SeriesHow to Order10-11-RECSine Cyl
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Sine Cylinder 10-REC/11-REC99Dimens
Page 101 and 102:
Sine Cylinder 10-REC/11-REC101Speci
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SeriesHow to Order11-12-CXSJDual Ro
Page 105 and 106:
Dual Rod Cylinder/Compact Type 11-C
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SeriesHow to Order11-12-CXSLDual Ro
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Dual Rod Cylinder 11-CXSL/12-CXSL10
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SeriesHow to Order12-13-MGPLCompact
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Compact Cylinder with Guide 12-MGPL
Page 121 and 122:
Series10-MGFHow to OrderGuide Table
Page 123 and 124:
Guide Table 10-MGF123Dimensions10-M
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Series11-MXP/MXPJ6Air Slide Tableø
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Air Slide Table 11-MXP/MXPJ6127Dime
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Page 131 and 132:
Page 133 and 134:
Air Slide Table 11-MXP/MXPJ6133Made
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Series13-MXQHow to OrderAir Slide T
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Air Slide Table 13-MXQ137Dimensions
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Page 159 and 160:
Page 161 and 162:
Air Slide Table 13-MXQ161Constructi
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Series13-MXSAir Slide Tableø6, ø8
Page 165 and 166:
Air Slide Table 13-MXS165Dimensions
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Page 183 and 184:
Air Slide Table 13-MXS183Constructi
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SeriesCYPClean Rodless Cylinderø15
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Clean Rodless Cylinder CYP187Dimens
Page 190 and 191:
190Actuator171
Page 192 and 193:
Rodless Cylinder 12-CY1B192Basic12-
Page 194 and 195:
WarningCaution12-CY1BDisassembly an
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Magnetically Coupled Rodless Cylind
Page 198 and 199:
Sine Rodless Cylinder 12-REA198Dime
Page 200 and 201:
Low Speed Cylinder 10-CQSX/11-CQSX2
Page 202 and 203:
Low Speed Cylinder 10-CQ2X/11-CQ2X2
Page 204 and 205:
Low Speed Cylinder 10-CM2X/11-CM2X2
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Clean seriesRotary Actuator206Vane
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208Rotary Actuator/Common Precautio
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210Rotary Actuator191
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Rotary Actuator 10-CRB1212Specifica
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4-R5Rotary Actuator 10-CRB1214Optio
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Rotary Actuator 10-CRB1216Without A
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ø45Rotary Actuator 10-CRB1218Witho
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Vane Type Rotary Actuator 10-CRB122
Page 222 and 223:
Vane Type Rotary Actuator 10-CRB122
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Rack Pinion Type Rotary Actuator 11
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Rotary Table/Rack Pinion Type 11-MS
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Clean seriesAir Gripper23211-MHZ2Pa
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234Air Gripper/Common Precautions 2
Page 236 and 237:
Parallel Type Air Gripper 11-MHZ223
Page 238 and 239:
Standard/Series 11-MHZ2Finger Posit
Page 240 and 241:
Auto Switch SpecificationsRotary Ac
Page 242 and 243:
Rotary Actuated Air Gripper 11-MHR2
Page 244 and 245:
Page 246 and 247:
Auto Switch SpecificationsRotary Ac
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Page 250 and 251:
Wide Opening Parallel Type Air Grip
Page 252 and 253:
Wide Opening Parallel Type Air Grip
Page 254 and 255:
Clean seriesDirectional Control Val
Page 256 and 257:
3/4/5 Port Solenoid Valve/Common Pr
Page 258 and 259:
258Flow Characteristics of Solenoid
Page 260 and 261:
Solenoid Valve 10-SZ3000260How to O
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Solenoid Valve 10-SZ3000How to Orde
Page 264 and 265:
Solenoid Valve 10-SZ3000264Dimensio
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Page 268 and 269:
Solenoid Valve 10-SZ3000Dimensions
Page 270 and 271:
ONO FSMCA4Solenoid Valve 10-SZ30002
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Page 274 and 275:
5 Port Solenoid Valve Plug-in Type
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Solenoid Valve 10-SY3000/5000/70002
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294Solenoid Valve 10-SY3000/5000/70
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300DirectionalControl Valve281
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Solenoid Valve 10-SY3000/5000322How
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Solenoid Valve 10-SY3000/5000324Man
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Solenoid Valve 10-SY3000/5000326Ser
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Solenoid Valve 10-SY3000/5000328Ser
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Solenoid Valve 10-SYJ3000330ModelVa
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Solenoid Valve 10-SYJ3000332Body Po
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Solenoid Valve 10-SYJ3000334Base Mo
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Solenoid Valve 10-SYJ3000338Flat Ri
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Solenoid Valve 10-SYJ3000340Type 20
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Page 346 and 347:
Solenoid Valve 10-SYJ5000346ModelBo
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Solenoid Valve 10-SYJ5000348Body Po
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Flat Ribbon Cable Type ManifoldSole
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Solenoid Valve 10-SY100364How to Or
Page 366 and 367:
Solenoid Valve 10-SY100366Body Port
Page 368 and 369:
Solenoid Valve 10-SY100368ManifoldH
Page 370 and 371:
Solenoid Valve 10-SY100370Type S41
Page 372 and 373:
Solenoid Valve 10-SYJ300372ModelFlo
Page 374 and 375:
Approx.300Solenoid Valve 10-SYJ3003
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Page 380 and 381:
Solenoid Valve 10-SYJ500380ModelFlo
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Solenoid Valve 10-SYJ500382Base Mou
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Solenoid Valve 10-VQ1000/2000388How
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Page 392 and 393:
ModelSolenoid Valve 10-VQ1000/20003
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Solenoid Valve 10-VQ1000/2000394F K
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Solenoid Valve 10-VQ1000/2000396P K
Page 398 and 399:
Solenoid Valve 10-VQ1000/2000398S K
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Solenoid Valve 10-VQ1000/2000402Mod
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Solenoid Valve 10-VQ1000/2000414Dir
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(A)(B)4 25 1 3(R1)(P)(R2)(A)(B)4 25
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Solenoid Valve 10-VQ1000/2000422F K
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Solenoid Valve 10-VQ1000/2000426C K
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Solenoid Valve 10-VQ100438JIS symbo
Page 440 and 441:
Solenoid Valve 10-VQ100440Dimension
Page 442 and 443:
Solenoid Valve 10-VQ100442Plug-in U
Page 444 and 445:
Solenoid Valve 10-VQ100444Plug Lead
Page 446 and 447:
Page 448 and 449:
Solenoid Valve 10-VQD448DimensionsL
Page 450 and 451:
Clean SeriesAir Line Equipment450Fl
Page 452 and 453:
452Flow Control Equipment/Specific
Page 454 and 455:
454Clean Speed Controller with One-
Page 456 and 457:
456Air Line Equipment437
Page 458 and 459:
Speed Controller with One-touch Fit
Page 460 and 461:
Page 462 and 463:
462Speed Controller with One-touch
Page 464 and 465:
Page 466 and 467:
Page 468 and 469:
Page 470 and 471:
Dual Speed Controller with One-touc
Page 472 and 473:
Page 474 and 475:
Speed Controller for Low Speed Oper
Page 476 and 477:
Speed Controller for Low Speed Oper
Page 478 and 479:
Dual Speed Controller for Low Speed
Page 480 and 481:
Page 482 and 483:
Dual Speed Controller with One-touc
Page 484 and 485:
Page 486 and 487:
Speed Controller 10-AS486Needle Val
Page 488 and 489:
Speed Controller 10-AS488Needle Val
Page 490 and 491:
Page 492 and 493:
492Air Filter, Regulator/Common Pre
Page 494 and 495:
Air Filter 10-AF494Dimensions10-AF3
Page 496 and 497:
Page 498 and 499:
Mist Separator 10-AFM498Dimensions1
Page 500 and 501:
Micro Mist Separator 10-AFD500Dimen
Page 502 and 503:
Regulator 10-AR502Accessories (Opti
Page 504 and 505:
Regulator 10-AR504Dimensions10-AR40
Page 506 and 507:
506Regulator 10-ARSpecific Product
Page 508 and 509:
50Precision Direct Operated Regulat
Page 510 and 511: 50Regulator 10-AR510Dimensions10-AR
Page 512 and 513: Regulator 10-AR512Specific Product
Page 514 and 515: 50Filter Regulator 10-AW514Dimensio
Page 516 and 517: Filter Regulator 10-AW516Specific P
Page 518 and 519: Mist Separator Regulator 10-AWM518D
Page 520 and 521: 520Air Line Equipment501
Page 522 and 523: Micro Mist Separator Regulator 10-A
Page 526 and 527: Precision Regulator 10-IR1000/2000/
Page 528 and 529: OUTPrecision Regulator 10-IR1000/20
Page 532 and 533: Fittings & Tube/Common Precautions
Page 534 and 535: DimensionsClean One-touch Fittings
Page 536 and 537: Clean One-touch Fittings KP536Speci
Page 540 and 541: DimensionsMale connector: KPQH, KPG
Page 542 and 543: DimensionsElbow: KPQL, KPGL——
Page 544 and 545: Miniature One-touch Fittings 10-KJ5
Page 552 and 553: One-touch Fittings 10-KQ552ModelHex
Page 554 and 555: One-touch Fittings 10-KQ554Male Con
Page 556 and 557: One-touch Fittings 10-KQ556Male Bra
Page 558 and 559: One-touch Fittings 10-KQ558Universa
Page 562 and 563: One-touch Fittings 10-KQ562Extended
Page 564 and 565: One-touch Fittings 10-KQ564Differen
Page 566 and 567: One-touch Fittings 10-KQ566Double B
Page 568 and 569: One-touch Fittings 10-KQ568Plug-in
Page 572 and 573: One-touch Fittings Stainless Specif
Page 584 and 585: Insert Fittings 10-KF584ModelMale C
Page 586 and 587: Insert Fittings 10-KF586Bulkhead Fe
Page 588 and 589: Insert Fittings 10-KF588Swivel Elbo
Page 590 and 591: Miniature Fittings 10-M590Series Mo
Page 592 and 593: Miniature Fittings 10-M592Series M5
Page 594 and 595: Miniature Fittings 10-M594Series M5
Page 596 and 597: Stainless Miniature Fittings 10-MS5
Page 598 and 599: Stainless Miniature Fittings 10-MS5
Page 600 and 601: Rectangular Multi-connector 10-KDM6
Page 602 and 603: Rectangular Multi-connector 10-KDM6
Page 604 and 605: Series TPSClean TubingSoft Polyolef
Page 606 and 607: 606Series 10-TCU Polyurethane Coil
Page 608 and 609: Clean seriesAir Preparation Equipme
Page 610 and 611:
610Air Preparation Equipment/Common
Page 612 and 613:
Mist Separator 10-AM59310-AM150 to
Page 614 and 615:
614Mist Separator 10-AMSpecific Pro
Page 616 and 617:
Micro Mist Separator 10-AMD59710-AM
Page 618 and 619:
Micro Mist Separator 10-AMD618Speci
Page 620 and 621:
601Super Mist Separator 10-AMEDimen
Page 622 and 623:
Super Mist Separator 10-AME622Speci
Page 624 and 625:
605Odor Removal Filter 10-AMFDimens
Page 626 and 627:
Odor Removal Filter 10-AMF626Specif
Page 628 and 629:
DimensionsHollow Fiber Membrane Air
Page 630 and 631:
Exhaust Cleaner for Clean Room AMPD
Page 632 and 633:
Exhaust Cleaner for Clean Room AMP6
Page 634 and 635:
Clean SeriesPressure Switch63410-PS
Page 636 and 637:
636Pressure Switch (Solid State Typ
Page 638 and 639:
Digital Pressure Switch 10-PSE638Di
Page 640 and 641:
Page 642 and 643:
Page 644 and 645:
644Pressure Switch625
Page 646 and 647:
High Precision Digital Pressure Swi
Page 648 and 649:
High Precision Digital Pressure Swi
Page 650 and 651:
Page 652 and 653:
Digital Pressure Switch with Backli
Page 654 and 655:
Page 656 and 657:
Digital Pressure Switch with Backli
Page 658 and 659:
Clean SeriesClean Regulator658Clean
Page 660 and 661:
Series SRH660Flow Rate Characterist
Page 662 and 663:
Series SRH662ConstructionParts list
Page 664 and 665:
Series SRH664OptionsPressure GaugeP
Page 666 and 667:
666Series SRHSafety InstructionsThe
Page 668 and 669:
Series SRPPrecision Clean Regulator
Page 670 and 671:
Precision Clean Regulator SRP670Opt
Page 672 and 673:
648672
Page 674 and 675:
674Series SFClean Gas Filter/Strain
Page 676 and 677:
Clean Gas Filter SF676Cartridge Typ
Page 678 and 679:
Clean Gas Filter SF678Disposable Ty
Page 680 and 681:
Clean Gas Filter SF680Disposable Ty
Page 682 and 683:
Clean Gas Filter SFSpecific Product
Page 684 and 685:
660684
Page 686 and 687:
686F.R. Unit Precautions 1Be sure t
Page 688 and 689:
688F.R. Unit Precautions 3Be sure t
Page 690 and 691:
OUTAir Filter 10-AF690Dimensions10-
Page 692 and 693:
OUTMist Separator 10-AFM692Dimensio
Page 694 and 695:
OUTDimensions10-AFD20 10-AFD30 to 4
Page 696 and 697:
Regulator 10-AR696Dimensions10-AR20
Page 698 and 699:
Regulator: Modular Type with Back F
Page 700 and 701:
QOUTFilter Regulator 10-AW700Dimens
Page 702 and 703:
QOUT702Filter Regulator with Back F
Page 704 and 705:
OUTMist Separator Regulator 10-AWM7
Page 706 and 707:
OUTMicro-Mist Separator Regulator 1
Page 708 and 709:
708Alphabet IndexProduct Series Ind
Page 710 and 711:
710K10-KF10-KG10-KJ10-KQPageInsert
Page 712 and 713:
memo712
Page 714 and 715:
memo714
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Pneumatic Clean Series

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