Pneumatic Clean Series

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142 System Circuit in Clean RoomFollowing are the actuator driving system and circuit configuration of blow system employed toreduce particle generation when using pneumatic equipment in a clean room.Actuator driving systemClean blowing systemInside clean roomInside clean roomRelief port pipingSolenoid valveexhaust pipingBreathing vent Drain pipingpiping of regulatorSupermistseparator10-AMEOdorremovalfilter10-AMFCleanregulatorSRH2 port airoperatedvalveLVClean gasfilterSFAClean blowAir micro meterActuatorFlow controlequipmentAir filter/RegulatorSFBPressure feed ofclean liquidSFCAir cylinderAir cylinder10- Series 11-CJ2/CJ2W/CJ2RAAir cylinder10- Series 11-CM2/CM2W/CM2RAir cylinder10- Series 11-CG1CG1W/CG1RMini free mount cylinder10- Series 11-CUJFree mount cylinder10- Series 11-CUCompact cylinder10-Series 11-CQSCompact cylinder10-Series 11-CQ2End lock cylinderSeries 10-CBM2Sine cylinder10-Series 11-RECDual rod cylinder/Compact11-Series 12-CXSJDual rod cylinder11-Series 12-CXSLCompact cylinder with guide12-Series 13-MGPLGuide tableSeries 10-MGFAir slide tableSeries 11-MXP/MXPJ6Air slide tableSeries 13-MXQAir slide tableSeries 13-MXSClean rodless cylinderSeries CYPMagnetically coupled rodless cylinderSeries 12-CY1BMagnetically coupled rodless cylinderSeries 12-CY1RSine rodless cylinderSeries 12-REALow speed cylinder10-Series 11-CQSXLow speed cylinder10-Series 11-CQ2XLow speed cylinder10-Series 11-CM2XRotary actuatorRotary actuator/Vane typeSeries 10-CRB1Rotary actuator/Rack pinion typeSeries 11-CRA1Rotary table/Rack pinion typeSeries 11-MSQAir gripperParallel type air gripper11-MHZ2Rotary type air gripper11-MHR2Rotary type air gripper11-MHR3Wide opening parallel type air gripper11-MHL2Clean speed controllerAS-FPG/FPQWith One-touch fitting(Elbow/Universal)10-AS-FWith One-touch fitting stainless steel specifications(Elbow/Universal)10-AS-FGWith One-touch fitting stainless steel specifications(In-line)10-AS-FGWith One-touch fitting dual type10-ASDWith One-touch fitting low speed specifications10-AS-FMWith One-touch fitting low speed/dual type10-ASD-FMWith One-touch fitting stainless steel/dual type10-ASD-FGCylinder direct mount type metal elbow10-AS1200 to 4200Inline type10-AS1000 to 5000Directional control valve5 port solenoid valve10-SZ30005 port solenoid valve10-SQ1000/20004/5 port solenoid valve10-SY3000/5000/70004/5 port solenoid valve10-SYJ3000/50003 port solenoid valve10-SY1003 port solenoid valve10-SYJ300/5005 port solenoid valve10-VQ1000/20003 port solenoid valve10-VQ1004 port solenoid valve10-VQD1000Air filter/Modular type10-AF3000 to 6000Mist separator/Modular type10-AFM3000/4000Micromist separator/Modular type10-AFD3000/4000Regulator/Modular type10-AR2000 to 6000Direct operated precision regulator/Modular type10-ARP3000Regulator with check valve/Modular type10-AR2560/3060/4060Filter regulator/Modular type10-AW3000/4000Mist separator regulator/Modular type10-AWM3000/4000Micro mist separator regulator/Modular type10-AWD3000/4000Precision regulator10-IR1000/2000/3000Fittings & TubingClean One-touch fittings (for blow)Series KPClean One-touch fittings (for air piping of driving system)Series KPQ/KPGOne-touch mini10-KJOne-touch fittings10-KQOne-touch fittings stainless specifications10-KGInsert fittings10-KFMiniature fittings10-MStainless steel miniature fittings10-MSRectangular multi-connector10-KDMClean tubing/PolyolefinSeries TPHClean tubing/Soft polyolefineSeries TPSPolyurethane tubing10-TUPolyurethane coil tubing10-TCUPolyurethane flat tubing10-TFUN2GasClean regulatorExcellent corrosion resistance due to use of stainlesssteel for all fluid contact parts and electrolytic aluminumon external metal parts.Clean room regulatorSRH 3000/4000Air preparation equipmentMist separator 10-AM150 to 850Micromist separator 10-AMD150 to 850Super mist separator 10-AME150 to 850Order removal filter 10-AMF150 to 850Fittings & TubingApprovedClean One-touch fittingKPClean tubingTPH/TPSClean gas filterN2 blowAll products undergo consistent manufacturing process in a clean room(of CLASS 100 atmosphere) including ultrasonic pure water cleaning,assembly, inspection and double bag sealing.Cartridge typeDisc typeSFA100/200/300Straight typeSFB100Disposable typeStraight typeSFB300Multiple disc typeSFC100Front matter 12Front matter 13
153 How to Use Clean SeriesThe position of the pneumatic equipment in relation to the workpiece is determined by the degree of particle generation.The grade number of the pneumatic equipmentor moreThe grade number of the particle density around the workpieceClassification of particlegeneration gradesSelection procedureqParticle density(particles/ft 3 )10 410 310 21010.1Particle density(particles/m 3 )10 510 410 310 210(Equivalent to Class 1000)Grade 4(Equivalent to Class 100)Grade 3Grade 2(Equivalent to Class10)Grade 1(Equivalent to Class 1)10.1 0.5 1Particle diameter (µm)∗ The grading in the left figure is based on SMCoriginal representation. The grade numberdecreases with the amount of particle generation.(For particle generation measurement method,please refer to Item 4 particle generationmeasurement method.)What is the cleanliness of the clean room? Class10 or Class100 or Class1000 ?wHow does the air currents to theworkpiece flow? (Refer to Diagram 1.)Diagram 1 Condition of air currentsWorkpiece AThe air current is blockedbefore the workpiece.Workpiece BConvection currents are frequentlygenerated around the workpiece.eWhere is the pneumatic equipmentused? (Refer to Diagram 2.)Workpiece CThe air current flows freely.Workpiece DThe air is suctioned forcedlybelow the workpiece.rFrom the above 3 items, decide thegrade number of the particle densityaround the workpiece (Table 1).Diagram 2 Point of useCurrentAbove the workpieceWorkpieceUnstable areaBelow the workpiecerSelect the equipment to be usedfrom Table 2.Stable areaTable 1 Grades of particle density around the workpiecew Workpiece A, B Ce Position of the equipmentto be usedUpstream tothe workpieceDownstream to the workpieceUnstable area Stable areaUpstream tothe workpieceDownstream to the workpieceUnstable area Stable areaUpstream tothe workpieceDDownstream to the workpieceUnstable area Stable areaClass 10Grade 1Grade 2 Grade 1 Grade 2q CleanlinessClass 100Grade 2 Grade 3Grade 3Class 1000Grade 1 Grade 2 Grade 3 Grade 2Grade 3 Grade 4Grade 2Grade 3 Grade 4The cleanliness of Class 10 and 1000 is not available for the sections indicated withbecause of dust accumulation and flotation.Front matter 14
Page 1 and 2: 1SMC Corporation1-16-4 Shimbashi, M
Page 5 and 6: 5PageAir Line Equipment 431Flow Con
Page 7 and 8: Air CylinderSeries CJ2Air CylinderS
Page 9 and 10: 9Safety InstructionsThese safety in
Page 11 and 12: Clean Series/Common Precautions 2Be
Page 13: 131 Clean Series Basic Specificatio
Page 17 and 18: 174 Particle Generation Measuring M
Page 19 and 20: Front matter 1819
Page 21 and 22: 21Actuator/Common Precautions 1Be s
Page 23 and 24: 23Actuator/Common Precautions 3Be s
Page 25 and 26: 25Auto Switch/Common Precautions 2B
Page 27 and 28: SeriesHow to Order10-11-CJ2Air Cyli
Page 29 and 30: øCAir Cylinder 10-CJ2/11-CJ229Basi
Page 31 and 32: øCAir Cylinder 10-CJ2/11-CJ231Fron
Page 33 and 34: SeriesHow to Order10-11-CJ2WDouble
Page 35 and 36: øCAir Cylinder 10-CJ2W/11-CJ2W35Ba
Page 37 and 38: SeriesHow to Order10-11-CJ2RADirect
Page 39 and 40: SeriesHow to Order10-11-CM2Air Cyli
Page 41 and 42: øIøIAir Cylinder 10-CM2/11-CM241B
Page 43 and 44: Air Cylinder 10-CM2/11-CM243Axial F
Page 45 and 46: Air Cylinder 10-CM2/11-CM245Rear Fl
Page 47 and 48: 10-11- SeriesCM2W Double Rod Cylind
Page 49 and 50: øIAir Cylinder 10-CM2W/11-CM2W49Ba
Page 51 and 52: Series10-11-CM2RDirect Mount Cylind
Page 53 and 54: Air Cylinder 10-CM2R/11-CM2R53Speci
Page 55 and 56: Series10-11-CG1Air Cylinderø20,ø2
Page 57 and 58: 0000Air Cylinder 10-CG1/11-CG157Bas
Page 59 and 60: Air Cylinder 10-CG1/11-CG159Front F
Page 61 and 62: SeriesHow to Order10-11-CG1WDouble
Page 63 and 64: 44Double Rod Cylinder 10-CG1W/11-CG
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SeriesHow to Order10-11-Clean serie
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SeriesHow to Order10-11-CUJMini Fre
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Mini Free Mount Cylinder 10-CUJ/11-
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SeriesHow to Order10-11-CUFree Moun
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Free Mount Cylinder 10-CU/11-CU7310
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SeriesHow to Order10-11-CQSCompact
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Compact Cylinder 10-CQS/11-CQS77Sta
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Compact Cylinder 10-CQS/11-CQS79Wit
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Compact Cylinder 10-CQS/11-CQS81CQS
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SeriesHow to Order10-11-CQ2Compact
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Compact Cylinder 10-CQ2/11-CQ28510-
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Compact Cylinder 10-CQ2/11-CQ28710-
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Compact Cylinder 10-CQ2/11-CQ289Mou
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Series10-CBM2How to OrderEnd Lock C
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End Lock Cylinder 10-CBM293Basic (B
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End Lock Cylinder 10-CBM295Rear Fla
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SeriesHow to Order10-11-RECSine Cyl
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Sine Cylinder 10-REC/11-REC99Dimens
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Sine Cylinder 10-REC/11-REC101Speci
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SeriesHow to Order11-12-CXSJDual Ro
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Dual Rod Cylinder/Compact Type 11-C
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SeriesHow to Order11-12-CXSLDual Ro
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Dual Rod Cylinder 11-CXSL/12-CXSL10
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SeriesHow to Order12-13-MGPLCompact
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Compact Cylinder with Guide 12-MGPL
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Series10-MGFHow to OrderGuide Table
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Guide Table 10-MGF123Dimensions10-M
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Series11-MXP/MXPJ6Air Slide Tableø
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Air Slide Table 11-MXP/MXPJ6127Dime
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Air Slide Table 11-MXP/MXPJ6133Made
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Series13-MXQHow to OrderAir Slide T
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Air Slide Table 13-MXQ137Dimensions
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Air Slide Table 13-MXQ161Constructi
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Series13-MXSAir Slide Tableø6, ø8
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Air Slide Table 13-MXS165Dimensions
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Air Slide Table 13-MXS183Constructi
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SeriesCYPClean Rodless Cylinderø15
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Clean Rodless Cylinder CYP187Dimens
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190Actuator171
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Rodless Cylinder 12-CY1B192Basic12-
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WarningCaution12-CY1BDisassembly an
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Magnetically Coupled Rodless Cylind
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Sine Rodless Cylinder 12-REA198Dime
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Low Speed Cylinder 10-CQSX/11-CQSX2
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Low Speed Cylinder 10-CQ2X/11-CQ2X2
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Low Speed Cylinder 10-CM2X/11-CM2X2
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Clean seriesRotary Actuator206Vane
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208Rotary Actuator/Common Precautio
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210Rotary Actuator191
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Rotary Actuator 10-CRB1212Specifica
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4-R5Rotary Actuator 10-CRB1214Optio
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Rotary Actuator 10-CRB1216Without A
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ø45Rotary Actuator 10-CRB1218Witho
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Vane Type Rotary Actuator 10-CRB122
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Vane Type Rotary Actuator 10-CRB122
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Rack Pinion Type Rotary Actuator 11
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Rotary Table/Rack Pinion Type 11-MS
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Clean seriesAir Gripper23211-MHZ2Pa
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234Air Gripper/Common Precautions 2
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Parallel Type Air Gripper 11-MHZ223
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Standard/Series 11-MHZ2Finger Posit
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Auto Switch SpecificationsRotary Ac
Page 242 and 243:
Rotary Actuated Air Gripper 11-MHR2
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Auto Switch SpecificationsRotary Ac
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Wide Opening Parallel Type Air Grip
Page 252 and 253:
Wide Opening Parallel Type Air Grip
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Clean seriesDirectional Control Val
Page 256 and 257:
3/4/5 Port Solenoid Valve/Common Pr
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258Flow Characteristics of Solenoid
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Solenoid Valve 10-SZ3000260How to O
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Solenoid Valve 10-SZ3000How to Orde
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Solenoid Valve 10-SZ3000264Dimensio
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Solenoid Valve 10-SZ3000Dimensions
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ONO FSMCA4Solenoid Valve 10-SZ30002
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5 Port Solenoid Valve Plug-in Type
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Solenoid Valve 10-SY3000/5000/70002
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294Solenoid Valve 10-SY3000/5000/70
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300DirectionalControl Valve281
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Solenoid Valve 10-SY3000/5000322How
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Solenoid Valve 10-SY3000/5000324Man
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Solenoid Valve 10-SY3000/5000326Ser
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Solenoid Valve 10-SY3000/5000328Ser
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Solenoid Valve 10-SYJ3000330ModelVa
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Solenoid Valve 10-SYJ3000332Body Po
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Solenoid Valve 10-SYJ3000334Base Mo
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Solenoid Valve 10-SYJ3000338Flat Ri
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Solenoid Valve 10-SYJ3000340Type 20
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Solenoid Valve 10-SYJ5000346ModelBo
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Solenoid Valve 10-SYJ5000348Body Po
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Flat Ribbon Cable Type ManifoldSole
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Solenoid Valve 10-SY100364How to Or
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Solenoid Valve 10-SY100366Body Port
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Solenoid Valve 10-SY100368ManifoldH
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Solenoid Valve 10-SY100370Type S41
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Solenoid Valve 10-SYJ300372ModelFlo
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Approx.300Solenoid Valve 10-SYJ3003
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Solenoid Valve 10-SYJ500380ModelFlo
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Solenoid Valve 10-SYJ500382Base Mou
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Solenoid Valve 10-VQ1000/2000388How
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ModelSolenoid Valve 10-VQ1000/20003
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Solenoid Valve 10-VQ1000/2000394F K
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Solenoid Valve 10-VQ1000/2000396P K
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Solenoid Valve 10-VQ1000/2000398S K
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Solenoid Valve 10-VQ1000/2000402Mod
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Solenoid Valve 10-VQ1000/2000414Dir
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(A)(B)4 25 1 3(R1)(P)(R2)(A)(B)4 25
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Solenoid Valve 10-VQ1000/2000422F K
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Solenoid Valve 10-VQ1000/2000426C K
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Solenoid Valve 10-VQ100438JIS symbo
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Solenoid Valve 10-VQ100440Dimension
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Solenoid Valve 10-VQ100442Plug-in U
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Solenoid Valve 10-VQ100444Plug Lead
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Page 448 and 449:
Solenoid Valve 10-VQD448DimensionsL
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Clean SeriesAir Line Equipment450Fl
Page 452 and 453:
452Flow Control Equipment/Specific
Page 454 and 455:
454Clean Speed Controller with One-
Page 456 and 457:
456Air Line Equipment437
Page 458 and 459:
Speed Controller with One-touch Fit
Page 460 and 461:
Page 462 and 463:
462Speed Controller with One-touch
Page 464 and 465:
Page 466 and 467:
Page 468 and 469:
Page 470 and 471:
Dual Speed Controller with One-touc
Page 472 and 473:
Page 474 and 475:
Speed Controller for Low Speed Oper
Page 476 and 477:
Speed Controller for Low Speed Oper
Page 478 and 479:
Dual Speed Controller for Low Speed
Page 480 and 481:
Page 482 and 483:
Dual Speed Controller with One-touc
Page 484 and 485:
Page 486 and 487:
Speed Controller 10-AS486Needle Val
Page 488 and 489:
Speed Controller 10-AS488Needle Val
Page 490 and 491:
Page 492 and 493:
492Air Filter, Regulator/Common Pre
Page 494 and 495:
Air Filter 10-AF494Dimensions10-AF3
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Page 498 and 499:
Mist Separator 10-AFM498Dimensions1
Page 500 and 501:
Micro Mist Separator 10-AFD500Dimen
Page 502 and 503:
Regulator 10-AR502Accessories (Opti
Page 504 and 505:
Regulator 10-AR504Dimensions10-AR40
Page 506 and 507:
506Regulator 10-ARSpecific Product
Page 508 and 509:
50Precision Direct Operated Regulat
Page 510 and 511:
50Regulator 10-AR510Dimensions10-AR
Page 512 and 513:
Regulator 10-AR512Specific Product
Page 514 and 515:
50Filter Regulator 10-AW514Dimensio
Page 516 and 517:
Filter Regulator 10-AW516Specific P
Page 518 and 519:
Mist Separator Regulator 10-AWM518D
Page 520 and 521:
Page 522 and 523:
Micro Mist Separator Regulator 10-A
Page 524 and 525:
Page 526 and 527:
Precision Regulator 10-IR1000/2000/
Page 528 and 529:
OUTPrecision Regulator 10-IR1000/20
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Page 532 and 533:
Fittings & Tube/Common Precautions
Page 534 and 535:
DimensionsClean One-touch Fittings
Page 536 and 537:
Clean One-touch Fittings KP536Speci
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DimensionsMale connector: KPQH, KPG
Page 542 and 543:
DimensionsElbow: KPQL, KPGL——
Page 544 and 545:
Miniature One-touch Fittings 10-KJ5
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One-touch Fittings 10-KQ552ModelHex
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One-touch Fittings 10-KQ554Male Con
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One-touch Fittings 10-KQ556Male Bra
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One-touch Fittings 10-KQ558Universa
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One-touch Fittings 10-KQ560Double B
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One-touch Fittings 10-KQ562Extended
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One-touch Fittings 10-KQ564Differen
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One-touch Fittings 10-KQ566Double B
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One-touch Fittings 10-KQ568Plug-in
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One-touch Fittings Stainless Specif
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Insert Fittings 10-KF584ModelMale C
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Insert Fittings 10-KF586Bulkhead Fe
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Insert Fittings 10-KF588Swivel Elbo
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Miniature Fittings 10-M590Series Mo
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Miniature Fittings 10-M592Series M5
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Miniature Fittings 10-M594Series M5
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Stainless Miniature Fittings 10-MS5
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Stainless Miniature Fittings 10-MS5
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Rectangular Multi-connector 10-KDM6
Page 602 and 603:
Rectangular Multi-connector 10-KDM6
Page 604 and 605:
Series TPSClean TubingSoft Polyolef
Page 606 and 607:
606Series 10-TCU Polyurethane Coil
Page 608 and 609:
Clean seriesAir Preparation Equipme
Page 610 and 611:
610Air Preparation Equipment/Common
Page 612 and 613:
Mist Separator 10-AM59310-AM150 to
Page 614 and 615:
614Mist Separator 10-AMSpecific Pro
Page 616 and 617:
Micro Mist Separator 10-AMD59710-AM
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Micro Mist Separator 10-AMD618Speci
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601Super Mist Separator 10-AMEDimen
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Super Mist Separator 10-AME622Speci
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605Odor Removal Filter 10-AMFDimens
Page 626 and 627:
Odor Removal Filter 10-AMF626Specif
Page 628 and 629:
DimensionsHollow Fiber Membrane Air
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Exhaust Cleaner for Clean Room AMPD
Page 632 and 633:
Exhaust Cleaner for Clean Room AMP6
Page 634 and 635:
Clean SeriesPressure Switch63410-PS
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636Pressure Switch (Solid State Typ
Page 638 and 639:
Digital Pressure Switch 10-PSE638Di
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644Pressure Switch625
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High Precision Digital Pressure Swi
Page 648 and 649:
High Precision Digital Pressure Swi
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Digital Pressure Switch with Backli
Page 654 and 655:
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Digital Pressure Switch with Backli
Page 658 and 659:
Clean SeriesClean Regulator658Clean
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Series SRH660Flow Rate Characterist
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Series SRH662ConstructionParts list
Page 664 and 665:
Series SRH664OptionsPressure GaugeP
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666Series SRHSafety InstructionsThe
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Series SRPPrecision Clean Regulator
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Precision Clean Regulator SRP670Opt
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648672
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674Series SFClean Gas Filter/Strain
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Clean Gas Filter SF676Cartridge Typ
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Clean Gas Filter SF678Disposable Ty
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Clean Gas Filter SF680Disposable Ty
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Clean Gas Filter SFSpecific Product
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660684
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686F.R. Unit Precautions 1Be sure t
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688F.R. Unit Precautions 3Be sure t
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OUTAir Filter 10-AF690Dimensions10-
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OUTMist Separator 10-AFM692Dimensio
Page 694 and 695:
OUTDimensions10-AFD20 10-AFD30 to 4
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Regulator 10-AR696Dimensions10-AR20
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Regulator: Modular Type with Back F
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QOUTFilter Regulator 10-AW700Dimens
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QOUT702Filter Regulator with Back F
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OUTMist Separator Regulator 10-AWM7
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OUTMicro-Mist Separator Regulator 1
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708Alphabet IndexProduct Series Ind
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710K10-KF10-KG10-KJ10-KQPageInsert
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memo712
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memo714
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Pneumatic Clean Series

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