Pneumatic Clean Series

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OUTMicro-Mist Separator Regulator 10-AWD706Dimensions10-AWD20QSINTNAA Pressure gauge port sizeBracket(Option)Applicable tubing ø6/4OUTø44JDMUGVPCPanel fitting dimensionINZYWOUTPlate thickness10-AWD20: Max. 3.5KDrainAFPressure gauge(Option)Port sizeB1/8Width across flats 14HMin. clearancefor maintenance10-AWD30, 40TNJDMPanel fitting dimensionSAABracket(Option)Pressure gauge port sizeUINZOUTQApplicable tubing ø6/4CYWINOUTø44KOUTGVPBPlate thickness10-AWD30: Max. 3.510-AWD40: Max. 5Pressure gauge(Option)Port sizeDrainAFE1/4Width across flats 17HMin. clearancefor maintenanceApplicable modelOptional specifications10-AWD20 10-AWD30, 40With bowl guardMetal bowlMetal bowl Metal bowl with level gaugeDimensionsBBBBModel10-AWD2010-AWD3010-AWD40Port size1/8, 1/41/4, 3/81/4, 3/8, 1/2Pressuregaugeport size1/81/81/4A405370B177208246Standard specificationC738692D525975E—3038F1110.510.5G252529H455070With pressuregaugeJ636775K53.51.5M304150Accessory specificationBracket mounting sizeN344054P444654Q5.46.58.5S15.4810.5T555370U2.32.32.3V3031W28.538.535.5 42.5Panel mountY141921Z677AAM28 x 1M38 x 1.5M42 x 1.5Model10-AWD2010-AWD3010-AWD40Optional specificationWith bowl guard Metal bowlB177——B180208246Metal bowl withlevel gaugeB—22826618
707SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORKEUROPEAUSTRIASMC Pneumatik GmbHBELGIUMSMC Pneumatics N.V./S.A.BULGARIASMC Industrial Automation Bulgaria EOODCROATIASMC Industrijska automatika d.o.o.CZECH REPUBLICSMC Industrial Automation CZ s.r.o.DENMARKSMC Pneumatik A/SESTONIASMC Pneumatics Estonia OÜFINLANDSMC Pneumatics Finland OYFRANCESMC Pneumatique SAGERMANYSMC Pneumatik GmbHHUNGARYSMC Hungary Ipari Automatizálási Kft.IRELANDSMC Pneumatics (Ireland) Ltd.ITALYSMC Italia S.p.A.LATVIASMC Pnuematics Latvia SIANETHERLANDSSMC Pneumatics BV.NORWAYSMC Pneumatics Norway A/SPOLANDSMC Industrial Automation Polska Sp.z.o.o.ROMANIASMC Romania s.r.l.RUSSIASMC Pneumatik LLC.SLOVAKIASMC Priemyselná automatizáciá, s.r.o.SLOVENIASMC INDUSTRIJSKA AVTOMATIKA d.o.o.SPAIN/PORTUGALSMC España, S.A.SWEDENSMC Pneumatics Sweden ABSWITZERLANDSMC Pneumatik AG.UKSMC Pneumatics (U.K.) Ltd.ASIACHINASMC (China) Co., Ltd.HONG KONGSMC Pneumatics (Hong Kong) Ltd.INDIASMC Pneumatics (India) Pvt. Ltd.INDONESIAPT. SMC Pneumatics IndonesiaMALAYSIASMC Pneumatics (S.E.A.) Sdn. Bhd.PHILIPPINESSMC Pneumatics (Philippines), Inc.SINGAPORESMC Pneumatics (S.E.A.) Pte. Ltd.SOUTH KOREASMC Pneumatics Korea Co., Ltd.TAIWANSMC Pneumatics (Taiwan) Co., Ltd.THAILANDSMC Thailand Ltd.NORTH AMERICACANADASMC Pneumatics (Canada) Ltd.MEXICOSMC Corporation (Mexico) S.A. de C.V.USASMC Corporation of AmericaSOUTH AMERICAARGENTINASMC Argentina S.A.BOLIVIASMC Pneumatics Bolivia S.R.L.BRAZILSMC Pneumaticos Do Brazil Ltda.CHILESMC Pneumatics (Chile) S.A.VENEZUELASMC Neumatica Venezuela S.A.OCEANIAAUSTRALIASMC Pneumatics (Australia) Pty. Ltd.NEW ZEALANDSMC Pneumatics (N.Z.) Ltd.1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPANTel: 03-3502-2740 Fax: 03-3508-2480URL http://www.smcworld.com© 2005 SMC Corporation All Rights ReservedSpecifications are subject to change without prior noticeand any obligation on the part of the manufacturer.D-KS1st printing JO printing JO 120KS Printed in Japan.This catalog is printed on recycled paper with concern for the global environment.
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1SMC Corporation1-16-4 Shimbashi, M
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5PageAir Line Equipment 431Flow Con
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Air CylinderSeries CJ2Air CylinderS
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9Safety InstructionsThese safety in
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Clean Series/Common Precautions 2Be
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131 Clean Series Basic Specificatio
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153 How to Use Clean SeriesThe posi
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174 Particle Generation Measuring M
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Front matter 1819
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21Actuator/Common Precautions 1Be s
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23Actuator/Common Precautions 3Be s
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25Auto Switch/Common Precautions 2B
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SeriesHow to Order10-11-CJ2Air Cyli
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øCAir Cylinder 10-CJ2/11-CJ229Basi
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øCAir Cylinder 10-CJ2/11-CJ231Fron
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SeriesHow to Order10-11-CJ2WDouble
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øCAir Cylinder 10-CJ2W/11-CJ2W35Ba
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SeriesHow to Order10-11-CJ2RADirect
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SeriesHow to Order10-11-CM2Air Cyli
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øIøIAir Cylinder 10-CM2/11-CM241B
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Air Cylinder 10-CM2/11-CM243Axial F
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Air Cylinder 10-CM2/11-CM245Rear Fl
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10-11- SeriesCM2W Double Rod Cylind
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øIAir Cylinder 10-CM2W/11-CM2W49Ba
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Series10-11-CM2RDirect Mount Cylind
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Air Cylinder 10-CM2R/11-CM2R53Speci
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Series10-11-CG1Air Cylinderø20,ø2
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0000Air Cylinder 10-CG1/11-CG157Bas
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Air Cylinder 10-CG1/11-CG159Front F
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SeriesHow to Order10-11-CG1WDouble
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44Double Rod Cylinder 10-CG1W/11-CG
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SeriesHow to Order10-11-Clean serie
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SeriesHow to Order10-11-CUJMini Fre
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Mini Free Mount Cylinder 10-CUJ/11-
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SeriesHow to Order10-11-CUFree Moun
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Free Mount Cylinder 10-CU/11-CU7310
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SeriesHow to Order10-11-CQSCompact
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Compact Cylinder 10-CQS/11-CQS77Sta
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Compact Cylinder 10-CQS/11-CQS79Wit
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Compact Cylinder 10-CQS/11-CQS81CQS
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SeriesHow to Order10-11-CQ2Compact
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Compact Cylinder 10-CQ2/11-CQ28510-
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Compact Cylinder 10-CQ2/11-CQ28710-
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Compact Cylinder 10-CQ2/11-CQ289Mou
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Series10-CBM2How to OrderEnd Lock C
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End Lock Cylinder 10-CBM293Basic (B
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End Lock Cylinder 10-CBM295Rear Fla
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SeriesHow to Order10-11-RECSine Cyl
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Sine Cylinder 10-REC/11-REC99Dimens
Page 101 and 102:
Sine Cylinder 10-REC/11-REC101Speci
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SeriesHow to Order11-12-CXSJDual Ro
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Dual Rod Cylinder/Compact Type 11-C
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SeriesHow to Order11-12-CXSLDual Ro
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Dual Rod Cylinder 11-CXSL/12-CXSL10
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SeriesHow to Order12-13-MGPLCompact
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Compact Cylinder with Guide 12-MGPL
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Series10-MGFHow to OrderGuide Table
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Guide Table 10-MGF123Dimensions10-M
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Series11-MXP/MXPJ6Air Slide Tableø
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Air Slide Table 11-MXP/MXPJ6127Dime
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Air Slide Table 11-MXP/MXPJ6133Made
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Series13-MXQHow to OrderAir Slide T
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Air Slide Table 13-MXQ137Dimensions
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Air Slide Table 13-MXQ161Constructi
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Series13-MXSAir Slide Tableø6, ø8
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Air Slide Table 13-MXS165Dimensions
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Air Slide Table 13-MXS183Constructi
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SeriesCYPClean Rodless Cylinderø15
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Clean Rodless Cylinder CYP187Dimens
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190Actuator171
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Rodless Cylinder 12-CY1B192Basic12-
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WarningCaution12-CY1BDisassembly an
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Magnetically Coupled Rodless Cylind
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Sine Rodless Cylinder 12-REA198Dime
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Low Speed Cylinder 10-CQSX/11-CQSX2
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Low Speed Cylinder 10-CQ2X/11-CQ2X2
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Low Speed Cylinder 10-CM2X/11-CM2X2
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Clean seriesRotary Actuator206Vane
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208Rotary Actuator/Common Precautio
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210Rotary Actuator191
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Rotary Actuator 10-CRB1212Specifica
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4-R5Rotary Actuator 10-CRB1214Optio
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Rotary Actuator 10-CRB1216Without A
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ø45Rotary Actuator 10-CRB1218Witho
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Vane Type Rotary Actuator 10-CRB122
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Vane Type Rotary Actuator 10-CRB122
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Rack Pinion Type Rotary Actuator 11
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Rotary Table/Rack Pinion Type 11-MS
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Clean seriesAir Gripper23211-MHZ2Pa
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234Air Gripper/Common Precautions 2
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Parallel Type Air Gripper 11-MHZ223
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Standard/Series 11-MHZ2Finger Posit
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Auto Switch SpecificationsRotary Ac
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Rotary Actuated Air Gripper 11-MHR2
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Auto Switch SpecificationsRotary Ac
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Wide Opening Parallel Type Air Grip
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Wide Opening Parallel Type Air Grip
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Clean seriesDirectional Control Val
Page 256 and 257:
3/4/5 Port Solenoid Valve/Common Pr
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258Flow Characteristics of Solenoid
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Solenoid Valve 10-SZ3000260How to O
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Solenoid Valve 10-SZ3000How to Orde
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Solenoid Valve 10-SZ3000264Dimensio
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Solenoid Valve 10-SZ3000Dimensions
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ONO FSMCA4Solenoid Valve 10-SZ30002
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5 Port Solenoid Valve Plug-in Type
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Solenoid Valve 10-SY3000/5000/70002
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294Solenoid Valve 10-SY3000/5000/70
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300DirectionalControl Valve281
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Solenoid Valve 10-SY3000/5000322How
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Solenoid Valve 10-SY3000/5000324Man
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Solenoid Valve 10-SY3000/5000326Ser
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Solenoid Valve 10-SY3000/5000328Ser
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Solenoid Valve 10-SYJ3000330ModelVa
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Solenoid Valve 10-SYJ3000332Body Po
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Solenoid Valve 10-SYJ3000334Base Mo
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Solenoid Valve 10-SYJ3000338Flat Ri
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Solenoid Valve 10-SYJ3000340Type 20
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Solenoid Valve 10-SYJ5000346ModelBo
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Solenoid Valve 10-SYJ5000348Body Po
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Flat Ribbon Cable Type ManifoldSole
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Solenoid Valve 10-SY100364How to Or
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Solenoid Valve 10-SY100366Body Port
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Solenoid Valve 10-SY100368ManifoldH
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Solenoid Valve 10-SY100370Type S41
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Solenoid Valve 10-SYJ300372ModelFlo
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Approx.300Solenoid Valve 10-SYJ3003
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Solenoid Valve 10-SYJ500380ModelFlo
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Solenoid Valve 10-SYJ500382Base Mou
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Solenoid Valve 10-VQ1000/2000388How
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ModelSolenoid Valve 10-VQ1000/20003
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Solenoid Valve 10-VQ1000/2000394F K
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Solenoid Valve 10-VQ1000/2000396P K
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Solenoid Valve 10-VQ1000/2000398S K
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Solenoid Valve 10-VQ1000/2000402Mod
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Solenoid Valve 10-VQ1000/2000414Dir
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(A)(B)4 25 1 3(R1)(P)(R2)(A)(B)4 25
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Solenoid Valve 10-VQ1000/2000422F K
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Solenoid Valve 10-VQ1000/2000426C K
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Solenoid Valve 10-VQ100438JIS symbo
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Solenoid Valve 10-VQ100440Dimension
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Solenoid Valve 10-VQ100442Plug-in U
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Solenoid Valve 10-VQ100444Plug Lead
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Solenoid Valve 10-VQD448DimensionsL
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Clean SeriesAir Line Equipment450Fl
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452Flow Control Equipment/Specific
Page 454 and 455:
454Clean Speed Controller with One-
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456Air Line Equipment437
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Speed Controller with One-touch Fit
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Page 462 and 463:
462Speed Controller with One-touch
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Page 470 and 471:
Dual Speed Controller with One-touc
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Speed Controller for Low Speed Oper
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Speed Controller for Low Speed Oper
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Dual Speed Controller for Low Speed
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Dual Speed Controller with One-touc
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Speed Controller 10-AS486Needle Val
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Speed Controller 10-AS488Needle Val
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Page 492 and 493:
492Air Filter, Regulator/Common Pre
Page 494 and 495:
Air Filter 10-AF494Dimensions10-AF3
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Page 498 and 499:
Mist Separator 10-AFM498Dimensions1
Page 500 and 501:
Micro Mist Separator 10-AFD500Dimen
Page 502 and 503:
Regulator 10-AR502Accessories (Opti
Page 504 and 505:
Regulator 10-AR504Dimensions10-AR40
Page 506 and 507:
506Regulator 10-ARSpecific Product
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50Precision Direct Operated Regulat
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50Regulator 10-AR510Dimensions10-AR
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Regulator 10-AR512Specific Product
Page 514 and 515:
50Filter Regulator 10-AW514Dimensio
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Filter Regulator 10-AW516Specific P
Page 518 and 519:
Mist Separator Regulator 10-AWM518D
Page 520 and 521:
Page 522 and 523:
Micro Mist Separator Regulator 10-A
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Precision Regulator 10-IR1000/2000/
Page 528 and 529:
OUTPrecision Regulator 10-IR1000/20
Page 530 and 531:
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Fittings & Tube/Common Precautions
Page 534 and 535:
DimensionsClean One-touch Fittings
Page 536 and 537:
Clean One-touch Fittings KP536Speci
Page 538 and 539:
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DimensionsMale connector: KPQH, KPG
Page 542 and 543:
DimensionsElbow: KPQL, KPGL——
Page 544 and 545:
Miniature One-touch Fittings 10-KJ5
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Page 552 and 553:
One-touch Fittings 10-KQ552ModelHex
Page 554 and 555:
One-touch Fittings 10-KQ554Male Con
Page 556 and 557:
One-touch Fittings 10-KQ556Male Bra
Page 558 and 559:
One-touch Fittings 10-KQ558Universa
Page 560 and 561:
One-touch Fittings 10-KQ560Double B
Page 562 and 563:
One-touch Fittings 10-KQ562Extended
Page 564 and 565:
One-touch Fittings 10-KQ564Differen
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One-touch Fittings 10-KQ566Double B
Page 568 and 569:
One-touch Fittings 10-KQ568Plug-in
Page 570 and 571:
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One-touch Fittings Stainless Specif
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Page 582 and 583:
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Insert Fittings 10-KF584ModelMale C
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Insert Fittings 10-KF586Bulkhead Fe
Page 588 and 589:
Insert Fittings 10-KF588Swivel Elbo
Page 590 and 591:
Miniature Fittings 10-M590Series Mo
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Miniature Fittings 10-M592Series M5
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Miniature Fittings 10-M594Series M5
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Stainless Miniature Fittings 10-MS5
Page 598 and 599:
Stainless Miniature Fittings 10-MS5
Page 600 and 601:
Rectangular Multi-connector 10-KDM6
Page 602 and 603:
Rectangular Multi-connector 10-KDM6
Page 604 and 605:
Series TPSClean TubingSoft Polyolef
Page 606 and 607:
606Series 10-TCU Polyurethane Coil
Page 608 and 609:
Clean seriesAir Preparation Equipme
Page 610 and 611:
610Air Preparation Equipment/Common
Page 612 and 613:
Mist Separator 10-AM59310-AM150 to
Page 614 and 615:
614Mist Separator 10-AMSpecific Pro
Page 616 and 617:
Micro Mist Separator 10-AMD59710-AM
Page 618 and 619:
Micro Mist Separator 10-AMD618Speci
Page 620 and 621:
601Super Mist Separator 10-AMEDimen
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Super Mist Separator 10-AME622Speci
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605Odor Removal Filter 10-AMFDimens
Page 626 and 627:
Odor Removal Filter 10-AMF626Specif
Page 628 and 629:
DimensionsHollow Fiber Membrane Air
Page 630 and 631:
Exhaust Cleaner for Clean Room AMPD
Page 632 and 633:
Exhaust Cleaner for Clean Room AMP6
Page 634 and 635:
Clean SeriesPressure Switch63410-PS
Page 636 and 637:
636Pressure Switch (Solid State Typ
Page 638 and 639:
Digital Pressure Switch 10-PSE638Di
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Page 642 and 643:
Page 644 and 645:
644Pressure Switch625
Page 646 and 647:
High Precision Digital Pressure Swi
Page 648 and 649:
High Precision Digital Pressure Swi
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Page 652 and 653:
Digital Pressure Switch with Backli
Page 654 and 655:
Page 656 and 657: Digital Pressure Switch with Backli
Page 658 and 659: Clean SeriesClean Regulator658Clean
Page 660 and 661: Series SRH660Flow Rate Characterist
Page 662 and 663: Series SRH662ConstructionParts list
Page 664 and 665: Series SRH664OptionsPressure GaugeP
Page 666 and 667: 666Series SRHSafety InstructionsThe
Page 668 and 669: Series SRPPrecision Clean Regulator
Page 670 and 671: Precision Clean Regulator SRP670Opt
Page 672 and 673: 648672
Page 674 and 675: 674Series SFClean Gas Filter/Strain
Page 676 and 677: Clean Gas Filter SF676Cartridge Typ
Page 678 and 679: Clean Gas Filter SF678Disposable Ty
Page 680 and 681: Clean Gas Filter SF680Disposable Ty
Page 682 and 683: Clean Gas Filter SFSpecific Product
Page 684 and 685: 660684
Page 686 and 687: 686F.R. Unit Precautions 1Be sure t
Page 688 and 689: 688F.R. Unit Precautions 3Be sure t
Page 690 and 691: OUTAir Filter 10-AF690Dimensions10-
Page 692 and 693: OUTMist Separator 10-AFM692Dimensio
Page 694 and 695: OUTDimensions10-AFD20 10-AFD30 to 4
Page 696 and 697: Regulator 10-AR696Dimensions10-AR20
Page 698 and 699: Regulator: Modular Type with Back F
Page 700 and 701: QOUTFilter Regulator 10-AW700Dimens
Page 702 and 703: QOUT702Filter Regulator with Back F
Page 704 and 705: OUTMist Separator Regulator 10-AWM7
Page 708 and 709: 708Alphabet IndexProduct Series Ind
Page 710 and 711: 710K10-KF10-KG10-KJ10-KQPageInsert
Page 712 and 713: memo712
Page 714 and 715: memo714
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Pneumatic Clean Series

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