Pneumatic Clean Series

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QOUT702Filter Regulator with Back Flow Mechanism 10-AW KDimensions10-AW20KSINTNAABracket(Option)Applicable tubing ø6/4OUTPressure gauge port sizeø44JDMUGVPCPanel fitting dimensionINZYWOUTPlate thickness10-AW20K: Max. 3.5BKDrainA FPressure gauge(Option)Port size1/8Width across flats 14HMin. clearancefor maintenance10-AW30K to 40K-06QINSTNPressure gauge port sizeAABracket(Option)Applicable tubing ø6/4OUTø44KJDMUGVPCPanel fitting dimensionINZYWOUTPlate thickness10-AW30K: Max. 3.510-AW40K: Max. 5Pressure gauge(Option)OUTPort sizeBDrainAFE1/4Width across flats 17HMin. clearancefor maintenanceApplicable modelOptional specifications10-AW20K 10-AW30K to 40K-06With bowl guardMetal bowlMetal bowl Metal bowl with level gaugeDimensionsBBBBModelPort size10-AW20K 1/8, 1/410-AW30K 1/4, 3/810-AW40K 1/4, 3/8, 1/210-AW40K-06 3/4Pressuregaugeport size1/81/81/41/4A40537075B164208246249Standard specificationC73869293D52597575E—303838F1110.5 2510.58G252930.5H40558080With pressuregaugeJ63677575K53.51.51.2M30415050Accessory specificationBracket mounting sizeN34405454P44465456Q5.46.58.58.5S15.4810.510.5T55537070U2.32.32.32.3V303135.537W28.538.542.542.5Panel mountY14192121Z6777AAM28 x 1M38 x 1.5M42 x 1.5M42 x 1.5Model10-AW20K10-AW30K10-AW40K10-AW40K-06Optional specificationWith bowl guard Metal bowlB164———B167208246249Metal bowl withlevel gaugeB—22826626914
<strong>Series</strong> 10-AWMMist Separator Regulator703How to OrderAccessory part no.AccessoryApplicable modelBracket assembly Note 10)10-AWM20Pressure gauge Note 11)15<strong>Clean</strong> series∗ "J" must always be selected.10 AWM 30 F 03 BG JNMist separator regulatorBody size20 30 40Thread typeNil RcNNote 1) NPTFNote 2) GNote 1) Drain guide is NPT1/8 (applicable to10-AWM20), and NPT1/4(applicable to 10-AWM30, 40).Note 2) Drain guide is G1/8 (applicable to10-AWM20), and G1/4 (applicable to10-AWM30, 40).AccessoryOptional specificationsStandard specificationsModelPort sizesFluidProof pressureMaximum operating pressureSet pressure rangePressure gauge port sizeAmbient and fluid temperatureFiltration accuracyOutlet side oil mist concentrationRated flow {l/min (ANR)} Note 8)Drain capacity (cm 3 )Drain guide piping portConstruction1.0 MPa0.2 MPaSymbol01020304Portsize1/81/43/81/220——AW20P-270ASG49-10-01G49-2-01Port sizeBody sizeNote 8) When the inlet pressure is 0.5MPa. The flow rate varies depending on the inlet pressure.Note 9) When the compressor oil mist discharge concentration is 30mg/m 3 (ANR).30——With bracketRound pressure gaugeWith set nut0.02 to 0.2 MPa settingMetal bowlNylon bowlMetal bowl with level gaugeWith bowl guardDrain guideNon-relieving typeFlow direction: Right to leftName plate, caution plate for bowl, andpressure gauge in imperial units (PSI, °F)40—AccessoriesNote 3)Symbol DescriptionApplicablemodelNilBNote 4)—With bracketWith round—GHpressure gauge(without limitindicator)With set nut(for panel mount)10-AWM20 to 4010-AWM20 to 4010-AWM20 to 40Note 3) Optional parts are notassembled and are suppliedloose at the time of shipment.Note 4) Pressure gauge mountingscrew is 1/8: 10-AWM20 to30, and 1/4: 10-AWM40.Pressure gauge is G49 type.10-AWM2010-AWM3010-AWM401/8, 1/4 1/4, 3/8 1/4, 3/8, 1/21/8Air1.5 MPa1.0 MPa0.05 to 0.85 MPa1/81/415081/8–0.5 to 60°C (with no freezing)0.3 µm (95% filtered particle size)Maximum 1.0 mg/m 3 (ANR) Note 9) (approx. 0.8 ppm)330 251/4 Relieving type820451/410-AWM30AR30P-270ASG49-10-01G49-2-01Note 10) Assembly includes a bracket and set nuts.Note 11) in part numbers for a pressure gauge indicates a type of connection thread. The symbol for thread type is Nil: R, N: NPT.Optional specificationsSymbol DescriptionApplicablemodel1 Note 5) 0.02 to 0.2 MPa setting 10-AWM20 to 4026Metal bowlNylon bowl10-AWM20 to 4010-AWM20 to 408 Metal bowl with level gauge 10-AWM30, 40C With bowl guard 10-AWM20NoteJDrain guide 1/8 10-AWM20Drain guide 1/4 10-AWM30, 406)NRNote 7)Non-relievingFlow direction: Right to leftName plate, caution plate for10-AWM20 to 4010-AWM20 to 40Z bowl, and pressure gaugein imperial units (PSI, °F)10-AWM20 to 40When more than one specification is required, indicate in alphanumeric order.Note 5) The only difference from the standard specifications is the adjusting spring for the regulator. It does notrestrict the setting of 0.2 MPa or more.Note 6) Without a valve function.Note 7) For NPT thread type.This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan.): Combination available : Combination not availableAccessory/Optional specification combinations : Varies depending on the model : Available only with NPT threadCombination Accessory Optional specificationApplicable mist separator regulatorAccessory/Optional specificationsB G H 1 2 6 8 C J N R Z 10-AWM20 10-AWM30, 40SymbolBGH–1–2–6–8–C–J–N–R–Z10-AWM40AR40P-270ASG49-10-02G49-2-02
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1SMC Corporation1-16-4 Shimbashi, M
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5PageAir Line Equipment 431Flow Con
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Air CylinderSeries CJ2Air CylinderS
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9Safety InstructionsThese safety in
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Clean Series/Common Precautions 2Be
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131 Clean Series Basic Specificatio
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153 How to Use Clean SeriesThe posi
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174 Particle Generation Measuring M
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Front matter 1819
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21Actuator/Common Precautions 1Be s
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23Actuator/Common Precautions 3Be s
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25Auto Switch/Common Precautions 2B
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SeriesHow to Order10-11-CJ2Air Cyli
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øCAir Cylinder 10-CJ2/11-CJ229Basi
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øCAir Cylinder 10-CJ2/11-CJ231Fron
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SeriesHow to Order10-11-CJ2WDouble
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øCAir Cylinder 10-CJ2W/11-CJ2W35Ba
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SeriesHow to Order10-11-CJ2RADirect
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SeriesHow to Order10-11-CM2Air Cyli
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øIøIAir Cylinder 10-CM2/11-CM241B
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Air Cylinder 10-CM2/11-CM243Axial F
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Air Cylinder 10-CM2/11-CM245Rear Fl
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10-11- SeriesCM2W Double Rod Cylind
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øIAir Cylinder 10-CM2W/11-CM2W49Ba
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Series10-11-CM2RDirect Mount Cylind
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Air Cylinder 10-CM2R/11-CM2R53Speci
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Series10-11-CG1Air Cylinderø20,ø2
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0000Air Cylinder 10-CG1/11-CG157Bas
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Air Cylinder 10-CG1/11-CG159Front F
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SeriesHow to Order10-11-CG1WDouble
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44Double Rod Cylinder 10-CG1W/11-CG
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SeriesHow to Order10-11-Clean serie
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SeriesHow to Order10-11-CUJMini Fre
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Mini Free Mount Cylinder 10-CUJ/11-
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SeriesHow to Order10-11-CUFree Moun
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Free Mount Cylinder 10-CU/11-CU7310
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SeriesHow to Order10-11-CQSCompact
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Compact Cylinder 10-CQS/11-CQS77Sta
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Compact Cylinder 10-CQS/11-CQS79Wit
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Compact Cylinder 10-CQS/11-CQS81CQS
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SeriesHow to Order10-11-CQ2Compact
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Compact Cylinder 10-CQ2/11-CQ28510-
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Compact Cylinder 10-CQ2/11-CQ28710-
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Compact Cylinder 10-CQ2/11-CQ289Mou
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Series10-CBM2How to OrderEnd Lock C
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End Lock Cylinder 10-CBM293Basic (B
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End Lock Cylinder 10-CBM295Rear Fla
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SeriesHow to Order10-11-RECSine Cyl
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Sine Cylinder 10-REC/11-REC99Dimens
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Sine Cylinder 10-REC/11-REC101Speci
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SeriesHow to Order11-12-CXSJDual Ro
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Dual Rod Cylinder/Compact Type 11-C
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SeriesHow to Order11-12-CXSLDual Ro
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Dual Rod Cylinder 11-CXSL/12-CXSL10
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SeriesHow to Order12-13-MGPLCompact
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Compact Cylinder with Guide 12-MGPL
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Series10-MGFHow to OrderGuide Table
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Guide Table 10-MGF123Dimensions10-M
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Series11-MXP/MXPJ6Air Slide Tableø
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Air Slide Table 11-MXP/MXPJ6127Dime
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Air Slide Table 11-MXP/MXPJ6133Made
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Series13-MXQHow to OrderAir Slide T
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Air Slide Table 13-MXQ137Dimensions
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Air Slide Table 13-MXQ161Constructi
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Series13-MXSAir Slide Tableø6, ø8
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Air Slide Table 13-MXS165Dimensions
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Air Slide Table 13-MXS183Constructi
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SeriesCYPClean Rodless Cylinderø15
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Clean Rodless Cylinder CYP187Dimens
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190Actuator171
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Rodless Cylinder 12-CY1B192Basic12-
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WarningCaution12-CY1BDisassembly an
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Magnetically Coupled Rodless Cylind
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Sine Rodless Cylinder 12-REA198Dime
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Low Speed Cylinder 10-CQSX/11-CQSX2
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Low Speed Cylinder 10-CQ2X/11-CQ2X2
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Low Speed Cylinder 10-CM2X/11-CM2X2
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Clean seriesRotary Actuator206Vane
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208Rotary Actuator/Common Precautio
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210Rotary Actuator191
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Rotary Actuator 10-CRB1212Specifica
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4-R5Rotary Actuator 10-CRB1214Optio
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Rotary Actuator 10-CRB1216Without A
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ø45Rotary Actuator 10-CRB1218Witho
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Vane Type Rotary Actuator 10-CRB122
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Vane Type Rotary Actuator 10-CRB122
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Rack Pinion Type Rotary Actuator 11
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Rotary Table/Rack Pinion Type 11-MS
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Clean seriesAir Gripper23211-MHZ2Pa
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234Air Gripper/Common Precautions 2
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Parallel Type Air Gripper 11-MHZ223
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Standard/Series 11-MHZ2Finger Posit
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Auto Switch SpecificationsRotary Ac
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Rotary Actuated Air Gripper 11-MHR2
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Auto Switch SpecificationsRotary Ac
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Wide Opening Parallel Type Air Grip
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Wide Opening Parallel Type Air Grip
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Clean seriesDirectional Control Val
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3/4/5 Port Solenoid Valve/Common Pr
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258Flow Characteristics of Solenoid
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Solenoid Valve 10-SZ3000260How to O
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Solenoid Valve 10-SZ3000How to Orde
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Solenoid Valve 10-SZ3000264Dimensio
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Solenoid Valve 10-SZ3000Dimensions
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ONO FSMCA4Solenoid Valve 10-SZ30002
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5 Port Solenoid Valve Plug-in Type
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Solenoid Valve 10-SY3000/5000/70002
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294Solenoid Valve 10-SY3000/5000/70
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300DirectionalControl Valve281
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Solenoid Valve 10-SY3000/5000322How
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Solenoid Valve 10-SY3000/5000324Man
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Solenoid Valve 10-SY3000/5000326Ser
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Solenoid Valve 10-SY3000/5000328Ser
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Solenoid Valve 10-SYJ3000330ModelVa
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Solenoid Valve 10-SYJ3000332Body Po
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Solenoid Valve 10-SYJ3000334Base Mo
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Solenoid Valve 10-SYJ3000338Flat Ri
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Solenoid Valve 10-SYJ3000340Type 20
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Solenoid Valve 10-SYJ5000346ModelBo
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Solenoid Valve 10-SYJ5000348Body Po
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Flat Ribbon Cable Type ManifoldSole
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Solenoid Valve 10-SY100364How to Or
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Solenoid Valve 10-SY100366Body Port
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Solenoid Valve 10-SY100368ManifoldH
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Solenoid Valve 10-SY100370Type S41
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Solenoid Valve 10-SYJ300372ModelFlo
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Approx.300Solenoid Valve 10-SYJ3003
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Solenoid Valve 10-SYJ500380ModelFlo
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Solenoid Valve 10-SYJ500382Base Mou
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Solenoid Valve 10-VQ1000/2000388How
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ModelSolenoid Valve 10-VQ1000/20003
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Solenoid Valve 10-VQ1000/2000394F K
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Solenoid Valve 10-VQ1000/2000396P K
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Solenoid Valve 10-VQ1000/2000398S K
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Solenoid Valve 10-VQ1000/2000402Mod
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Solenoid Valve 10-VQ1000/2000414Dir
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(A)(B)4 25 1 3(R1)(P)(R2)(A)(B)4 25
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Solenoid Valve 10-VQ1000/2000422F K
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Solenoid Valve 10-VQ1000/2000426C K
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Solenoid Valve 10-VQ100438JIS symbo
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Solenoid Valve 10-VQ100440Dimension
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Solenoid Valve 10-VQ100442Plug-in U
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Solenoid Valve 10-VQ100444Plug Lead
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Solenoid Valve 10-VQD448DimensionsL
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Clean SeriesAir Line Equipment450Fl
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452Flow Control Equipment/Specific
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454Clean Speed Controller with One-
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456Air Line Equipment437
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Speed Controller with One-touch Fit
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462Speed Controller with One-touch
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Dual Speed Controller with One-touc
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Speed Controller for Low Speed Oper
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Speed Controller for Low Speed Oper
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Dual Speed Controller for Low Speed
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Dual Speed Controller with One-touc
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Speed Controller 10-AS486Needle Val
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Speed Controller 10-AS488Needle Val
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Page 492 and 493:
492Air Filter, Regulator/Common Pre
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Air Filter 10-AF494Dimensions10-AF3
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Mist Separator 10-AFM498Dimensions1
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Micro Mist Separator 10-AFD500Dimen
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Regulator 10-AR502Accessories (Opti
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Regulator 10-AR504Dimensions10-AR40
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506Regulator 10-ARSpecific Product
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50Precision Direct Operated Regulat
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50Regulator 10-AR510Dimensions10-AR
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Regulator 10-AR512Specific Product
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50Filter Regulator 10-AW514Dimensio
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Filter Regulator 10-AW516Specific P
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Mist Separator Regulator 10-AWM518D
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Micro Mist Separator Regulator 10-A
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Precision Regulator 10-IR1000/2000/
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OUTPrecision Regulator 10-IR1000/20
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Fittings & Tube/Common Precautions
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DimensionsClean One-touch Fittings
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Clean One-touch Fittings KP536Speci
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DimensionsMale connector: KPQH, KPG
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DimensionsElbow: KPQL, KPGL——
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Miniature One-touch Fittings 10-KJ5
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One-touch Fittings 10-KQ552ModelHex
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One-touch Fittings 10-KQ554Male Con
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One-touch Fittings 10-KQ556Male Bra
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One-touch Fittings 10-KQ558Universa
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One-touch Fittings 10-KQ560Double B
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One-touch Fittings 10-KQ562Extended
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One-touch Fittings 10-KQ564Differen
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One-touch Fittings 10-KQ566Double B
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One-touch Fittings 10-KQ568Plug-in
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One-touch Fittings Stainless Specif
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Insert Fittings 10-KF584ModelMale C
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Insert Fittings 10-KF586Bulkhead Fe
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Insert Fittings 10-KF588Swivel Elbo
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Miniature Fittings 10-M590Series Mo
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Miniature Fittings 10-M592Series M5
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Miniature Fittings 10-M594Series M5
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Stainless Miniature Fittings 10-MS5
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Stainless Miniature Fittings 10-MS5
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Rectangular Multi-connector 10-KDM6
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Rectangular Multi-connector 10-KDM6
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Series TPSClean TubingSoft Polyolef
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606Series 10-TCU Polyurethane Coil
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Clean seriesAir Preparation Equipme
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610Air Preparation Equipment/Common
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Mist Separator 10-AM59310-AM150 to
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614Mist Separator 10-AMSpecific Pro
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Micro Mist Separator 10-AMD59710-AM
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Micro Mist Separator 10-AMD618Speci
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601Super Mist Separator 10-AMEDimen
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Super Mist Separator 10-AME622Speci
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605Odor Removal Filter 10-AMFDimens
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Odor Removal Filter 10-AMF626Specif
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DimensionsHollow Fiber Membrane Air
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Exhaust Cleaner for Clean Room AMPD
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Exhaust Cleaner for Clean Room AMP6
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Clean SeriesPressure Switch63410-PS
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636Pressure Switch (Solid State Typ
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Digital Pressure Switch 10-PSE638Di
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644Pressure Switch625
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High Precision Digital Pressure Swi
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High Precision Digital Pressure Swi
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650Pressure Switch631
Page 652 and 653: Digital Pressure Switch with Backli
Page 654 and 655: 654Pressure Switch635
Page 656 and 657: Digital Pressure Switch with Backli
Page 658 and 659: Clean SeriesClean Regulator658Clean
Page 660 and 661: Series SRH660Flow Rate Characterist
Page 662 and 663: Series SRH662ConstructionParts list
Page 664 and 665: Series SRH664OptionsPressure GaugeP
Page 666 and 667: 666Series SRHSafety InstructionsThe
Page 668 and 669: Series SRPPrecision Clean Regulator
Page 670 and 671: Precision Clean Regulator SRP670Opt
Page 672 and 673: 648672
Page 674 and 675: 674Series SFClean Gas Filter/Strain
Page 676 and 677: Clean Gas Filter SF676Cartridge Typ
Page 678 and 679: Clean Gas Filter SF678Disposable Ty
Page 680 and 681: Clean Gas Filter SF680Disposable Ty
Page 682 and 683: Clean Gas Filter SFSpecific Product
Page 684 and 685: 660684
Page 686 and 687: 686F.R. Unit Precautions 1Be sure t
Page 688 and 689: 688F.R. Unit Precautions 3Be sure t
Page 690 and 691: OUTAir Filter 10-AF690Dimensions10-
Page 692 and 693: OUTMist Separator 10-AFM692Dimensio
Page 694 and 695: OUTDimensions10-AFD20 10-AFD30 to 4
Page 696 and 697: Regulator 10-AR696Dimensions10-AR20
Page 698 and 699: Regulator: Modular Type with Back F
Page 700 and 701: QOUTFilter Regulator 10-AW700Dimens
Page 704 and 705: OUTMist Separator Regulator 10-AWM7
Page 706 and 707: OUTMicro-Mist Separator Regulator 1
Page 708 and 709: 708Alphabet IndexProduct Series Ind
Page 710 and 711: 710K10-KF10-KG10-KJ10-KQPageInsert
Page 712 and 713: memo712
Page 714 and 715: memo714
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Pneumatic Clean Series

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